Teihana tirotiro haurua-haurua CCRETECH UF200R

Ko te ACCRETECH UF200R he taputapu whakamātautau haurua-ā-ira aunoa, utu-pai hoki mai i ACCRETECH (Hapani) mō ngā wafer 120–200mm (5–8 inihi). E whakamahia ana mō te whakamātautau hiko (whakamātautau CP) o ngā maramara taumata-wafer i mua i te tapatapahi.

He aha tāna mahi?

He māmā noa iho: I mua i te tapatapahia o te wafer kia takitahi, ka pā ngā tirotiro ki ngā papa maramara hei whakahaere i te whakamātautau hiko/mahi, hei wehewehe i ngā maramara pai me ngā maramara hapa. Wāhanga: Whakamātautau Wafer (CP)

Whāinga: 200mm (8-inihi) te nuinga, he pai hoki mō ngā anga 5/6-inihi

Ngā Maramara Noa: Arorau, Analog, Pūrere Hiko, Pūrere Motuhake, MEMS

II. Ngā Whakatakotoranga Matua (He Tirohanga Poto)

Rahi o te Angaanga: 120/150/200mm (5–8-inihi)

Te Tika o te Tūnga: ±1.5μm (XY)

Tere Nekehanga:

XY: Tae atu ki te 300 mm/s

Z: Tae atu ki te 30 mm/s

Awhe Pāmahana: -40℃ ～ +150℃ (Mana Pāmahana Kōwhiringa)

Wāhanga: Pūhara Z/θ pakari-teitei, hototahi ki ngā anga angiangi/pikopiko

Te Mahi: Te uta me te tango aunoa, te whakarite aunoa, te tirotiro i te pūwero

III. Ngā Mahi Matua

Tukanga Whakamātautau Aunoa Katoa

Te Utaina Aunoa o te Wafer → Te Whakarite Whakaahua → Te Hoapā Tirotiro → Te Whakamātautau Hiko → Te Wehewehenga me te Tuhituhi → Te Tango Aunoa

Hototahitanga Maha-Kāwai

Arorau Paerewa, Analog, Mana, MOSFET, Diode, Transistor, MEMS Ka taea te ine katoa. He whānuitanga pāmahana whānui me ngā whakamātautau motuhake. He kōwhiringa katoa mō te pāmahana iti/teitei, te iahiko moroiti, te whakamātautau ngaohiko teitei, me ētahi atu. Te tukatuka i ngā papa angiangi rawa/piko. Te mimiti o te taha whakamuri + te tikanga whakahaere motuhake, e tautoko ana i ngā papa angiangi rawa (≤50μm) me ngā papa piko teitei.

IV. Ngā Painga (Ki te whakataurite ki ngā hua ōrite)

Te ōwehenga utu-mahi teitei: Tata ki te tika me te tūāpapa o te UF2000 kounga teitei (pērā i te MMI), engari he utu whaitake ake.

Te tere whakaputa tere: kāri whakawhiti pine tere XY + tere, e tika ana mō ngā raina whakaputa 8-inihi te rahinga nui.

Pūmau, pono hoki: He tūāpapa ACCRETECH kua pakari, he iti te tiaki, he roa te ora.

Whakawhanui ngāwari: Hoahoa ā-pūtau, ka taea te tāpiri i muri mai me te whakahaere pāmahana, te ngaohiko teitei, te iahiko moroiti, te ipu-rua, me ētahi atu.

V. Ngā whakataurite noa (e āwhina ana i a koe ki te kimi tere i te hua tika)

UF200R: Te whakaputanga papatipu whānui 8-inihi, arorau/mana/motuhake, te kaupapa matua mō te whai huatanga-utu.

UF190R: He kiato ake, he taumata tīmatanga, e aro nui ana ki ngā taputapu motuhake/ngā puranga iti.

UF2000: 8-inihi teitei, he tika ake, he whānui ake te whakahaere pāmahana, MEMS/ Hangarau Matatau

Hei whakarāpopototanga: Ko te UF200R te "teihana tirotiro utu-pai matua" i roto i te mākete whakamātautau waenga 8-inihi—he tika, he tere teitei, he pumau, he roa, he kaha hoki ki te whakawhanui, he mea e tika ana mō ngā raina whakaputa 8-inihi maha-momo, he nui te rahinga.