Ngā Rauemi Whaihua Pūnaha Whakakikorua Hiko Ā-Haumaru Raider® Edge ECD

Ko te pūnaha Raider® Edge ECD a Applied Materials te paearu matua mō te whakatakoto hikohiko (ECD) i roto i te hanga haurua-ira. Nā te whakaurunga hangarau whai muri i te hokonga mai o Semitool e Applied Materials, kua whakamahia whānuitia te pūnaha ki roto i ngā tukanga takai matatau me te hononga taumata-wafer, e mōhiotia whānuitia ana e tōna ngāwari teitei, tōna kaha whakaputa tere, me tōna mana whakahaere tukanga tino pai.

**Te Tūnga Pūnaha**

**Kamupene:** Ngā Rauemi Whakamahia, Inc.

**Tauira Hua:** Raider® Edge ECD

**Momo Taputapu:** Pūnaha Whakatakotoranga Hiko Matū Wafer-Kotahi-Rūma-maha Aunoa

**Te Hiranga o te Hītori:** He "Paepae Ahumahi" rongonui i roto i te mara o te hangarau whakakikorua kotahi-wafer. Koinei te whakatupuranga tuawhā o ngā taputapu ECD kotahi-wafer; ko tōna mua, ko te pūnaha Raider GT, i hangaia tuatahitia hei tautoko i te whanaketanga o ngā whakatupuranga e toru o te hangarau maramara.

**Ngā Mātāpono Matua**

Ko te whakatakoto hikohiko matū ko te whakamahi i te iahiko hiko hei whakaiti i ngā katote konganuku ki runga i te mata o te papa, ā, ka hangaia he kiriata angiangi motuhake. Kei tua atu i te whakakikorua noa iho te pūnaha Raider Edge ECD; mā te pūnaha whakahaere matatau, ka taea e tēnei tukanga te whakatutuki i te tika taumata-atomika. Hei tāpiri, ka tautokohia e te pūnaha ngā mahi tukatuka mākū, pērā i te whakairo me te horoi papa.

**Ngā Āhuatanga me ngā Painga**

Ehara i te mea ko tōna kaha anake kei roto i tōna kaha ki te whakahaere i ngā mahi whakakikorua paerewa, engari ko te mea nui ake ko tōna ngāwari tino pai, te whakahaere tukanga tika, me te hoahoa tino aunoa.

**Āhuatanga/Painga** | **Whakaahuatanga Taipitopito**

**Ngāwari Tukanga** | Ka taea te tukatuka i ngā rahi papa rerekē, tae atu ki te 150mm, 200mm, me te 300mm; ka tautoko i ngā raupapa tukatuka mākū maha-taahiraa i runga i ngā papa, tae atu ki te whakatakotoranga whakarewa, te whakairo, me te horoi.

**Tautoko Rauemi Whānui** | Tautoko i te whakatakotoranga o te whānuitanga o ngā konganuku me ngā koranu, pērā i te parahi, te nikara, te koura, te hiriwa-tini, ngā koranu aukume, me ngā tūhono koura-tini eutectic. Ka tautokohia hoki te whakairo puranga maha-paparanga mō ngā rauemi motuhake pērā i te CZT me te AlN.

**Mana Tukanga Matatau** | Ka whakamahia he huinga anode maha-rohe hei whakatutuki i te whakakikoruatanga ōrite, ahakoa i runga i ngā paparanga purapura tino angiangi, ātete rānei. I runga i ngā paparanga 300mm, ka taea e tana tauhohenga rūma whakarei ake te whakarerekē i te kiato o te iahiko kia rite ai te whakatakotoranga.

**Te Huarahi Whakahaere Teitei me te Utu Iti** | Mā te aunoatanga tika "Teachless" ka kore e taea te whakaroa i te wā e pā ana ki te whakatikatika ā-ringa, ā, mā te hangarau kiriuhi katote ka roa ake te ora o te kaukau matū, ka iti rawa ngā utu whakahaere. Hei tāpiri, mā tōna tapuwae iti ka whakanui ake i te kaha whakaputa katoa. **Te Whanuitanga Hangarau Motuhake:** Ko tōna mua, ko te pūnaha Raider GT, i tautoko i te ono rūma whakakikorua, ā, i tukuna he kōwae whakamahana, he kōwae ine rānei, me ngā rūma whakauru mō te horoi taha wafer, te bevel, me te taha muri.

**Ngā Wāhi Whakamahi**

**Mōkihi me ngā Hononga Matatau:** Whakamahia mō te whakakī hononga parahi i roto i te hanga maramara, kia kore ai he āputa; whakamahia hoki mō te whakatakotoranga o ngā pou parahi, ngā puku honohono (tae atu ki te honohono kore-mata), me ngā paparanga tohatoha anō (RDL) i roto i te takai taumata-wafer.

**Te Hanga Pūrere Motuhake:** Whakamahia mō te whakatakoto whakarewa maha-paparanga ki roto i ngā taputapu pēnei i te MEMS me ngā pūoko; e whakarato ana i te whakakī parahi kounga teitei mō ngā TSV (Through-Silicon Vias) me ngā TGV (Through-Glass Vias).

**Ngā Kaiārahi Hiko me te Pūhui:** Whakamahia mō te whakatakoto parahi matotoru i roto i ngā taputapu hiko, tae atu ki te whakakoi i te taha muri o te mea he iti te ahotea i runga i ngā angiangi.

**Ētahi Atu Tukanga Motuhake:** Ka taea te whakatakoto koura mā roto i ngā arai, te horoi rānei i ngā papa karaihe mā te whakamahi i ngā matū kei roto i te ozone; ka taea te mahi whakairo paparanga maha-paparanga—ka nui atu i ngā āheinga whakairo UBM (Under Bump Metallization) tuku iho.

**Ngā Whakatakotoranga Hangarau**

**Tautoko Rahi o te Angaanga:** 150mm, 200mm, 300mm

**Tau o ngā Kōwae Whakakikorua:** Ka tautokohia e ngā tauira turanga ngā kōwae maha; ka taea e ngā tauira papai te whakauru ki te 6.

**Te Whakatakotoranga Whakakikorua:** He mea ārahi i te ahumahi (kāore i whakaratohia he raraunga motuhake).

**Ngā Rauemi Tautoko:** Cu (Parahi), Au (Koura), SnAg (Tin-Hiriwa), Ni (Nikara), ngā koranu aukume, AuSn (Koura-Tin Eutectic), me ētahi atu.

**Ngā Āheinga Tukanga:** Tautoko i te whakatakotoranga parahi matotoru tae atu ki te 100µm, te whakakī i ngā hanganga Tauwehenga Āhua Teitei (HAR), me te whakakī i ngā pona me ngā Ahu Matua (CD) iti iho i te 22nm.

**Taumata Aunoatanga:** He hoahoa maha-rūma e hangai ana ki te rōpū, he tino aunoa; e tautoko ana i ngā kawa aunoatanga wheketere pēnei i te SECS/GEM; e hototahi ana ki ngā pūtu whakawhiti wafer SMIF me FOUP.

Te whakataurite ki te taupānga ACM ULTRA ECP

Hei kaitākaro matua i roto i te ao o ngā taputapu whakakikorua haurua-ira, he rerekē te tūnga o tēnei pūnaha i te ACM Research ULTRA ECP app-p—te tauira i pātaihia e koe i mua. Ko te kōwhiringa i waenga i ngā mea e rua ka whakawhirinaki ki ō whakaritenga tukanga.

**Ngā Ahu Whakataurite** | **Ngā Rauemi Whakamahia Raider Edge ECD** | **ACM Research ULTRA ECP taupānga-p**

**Hangarau Matua** | Arotahi ki te whakakikoruatanga tino tika ki ngā papa kotahi | Hangarau whakakikoruatanga whakapae hou mō ngā papa taumata-panel

**Papa Whāinga** | Ngā papa angiangi 150mm – 300mm | Ngā panera 510mm x 515mm

**Ngā Painga Matua** | Paerewa ahumahi; pakari hangarau teitei; matapihi tukanga whānui | Whakakīia he āputa ahumahi; āhei ai te whakaputa papatipu utu-whai hua i te taumata panera

**Arotahi ki te Tukanga** | E whakanui ana i te whakaurunga maeneene me ngā tukanga hononga-mua | I hangaia mō te Tākai Taumata-Papa-Haere (FOLP)

Ko te kaha tūturu o te Raider Edge ECD kei roto i tōna whanaketanga: i te tīmatanga he hangarau i whakamahia mō ngā hononga parahi i te pona 22nm, kua huri hei tūāpapa tino maha ngā mahi e taea ai te tautoko i te whānuitanga o ngā tukanga motuhake—mai i ngā rauemi aukume ki te takai matatau—e whakaatu ana i tōna kaha ki te whakawhanui.