Mīhini Tohu Taiaho ThinkLaser HM300

Ko te ThinkLaser HM300 he mīhini tohu taiaho "Tohu Mārō" aunoa katoa, he mea hanga motuhake kia tutuki ai ngā whakaritenga tohu hohonu pakari—e mōhiotia ana ko te "tohu mārō"—e mau ana i roto i te tukanga hanga papa haurua-ira. Ko tōna uara matua kei roto i tōna kaha ki te whakairo i ngā waehere tautuhi pumau ki runga i ngā papa mā te mahi whakahaere hohonu ka taea te whakarite; he pakari ēnei waehere ki te tu atu i ngā ahotea whakakoi i puta mai i ngā tukanga hanga kaha-teitei i muri mai, kia tino whaia ai te hua puta noa i tōna huringa ora katoa—mai i te hanga maramara me te takai tae noa ki te whakamātautau whakamutunga.

**Ngā Hangarau Matua me ngā Whakatakotoranga Matua**

Ko te kaupapa matua o te HM300 e aro ana ki ngā āhuatanga matua e toru: te hōhonutanga, te tika, me te aunoatanga. Ko ōna whakatakotoranga hangarau motuhake koia ēnei:

**Tuemi** | **Whakatakotoranga / Whakaahuatanga**

**Momo Taputapu** | Pūnaha Tohu Taiaho Mārō Aunoa Katoa

**Whakamahinga Whāinga** | I hangaia mō te tohu mārō o te papa haurua-haurua, e tutuki ana i ngā whakaritenga e tika ana mō ngā paerewa SEMI

**Mahinga Matua** | Mana Hōhonu Ka Taea te Whakarite: Te hōhonutanga tohu ka taea te whakarite, ka eke ki te hōhonutanga mōrahi o te 110 maikorona (µm), me te tika o te hōhonutanga o te ±10%

**Hangarau Matua** | Ngā Tirohanga Āhua-rua™: E whakamahi ana i tētahi hoahoa tirohanga ā-rua e āhei ai te whakawhiti i waenga i ngā rahi tirohanga taiaho e rua (mai i te 50 µm ki te 110 µm) i roto i te pūnaha kotahi.

**Aroturukitanga Pūnaha** | Aroturukitanga Pūnaha Whānui: Ka tuhi tika i ngā raraunga mahi taiaho katoa

**Atanga Aunoa** | Tautokohia ngā atanga SECS II/GEM hei whakahaere i te whakahaere aunoatanga o te wheketere

**Hototahi ki te Wafer** | Tautokohia ngā rahi wafer 100mm ki te 200mm (e wātea ana te tautoko kōwhiringa mō ngā panera 300mm/310mm; kua whakaūtia te whaihuatanga mā ngā raraunga o nāianei)

**Ngā Mahi, Ngā Painga, me Ngā Āhuatanga**

Mā te whakamahi i tētahi huinga hangarau matatau, ka aro pai te HM300 ki ngā tino raruraru o te mara o te tohu wafer:

**Te Āheinga "Tohu Mārō" mō ngā Tukanga Pūmau:** Kāore i rite ki te "Tohu Ngāwari," ka puta i te āheinga "Tohu Mārō" o te HM300 ngā tohu hohonu rawa. Mā tēnei ka noho tonu ngā tohu—me te kore e pakaru, e mimiti rānei—i roto i ngā tukanga kaha-nui e whai ake nei (pēnei i te maimoatanga pāmahana-tiketike, te horoi matū, me te huri miihini), kia mau tonu ai te whai i ngā tukanga katoa. **Te Tika me te Ngāwari Teitei:**

**Hohonutanga Whakahaere:** Mā te mahi whakahaere hohonu ka taea te whakarite (e tuku ana i te tika tae atu ki te ±10% me te whānuitanga hohonu e tae atu ana ki te 110 µm) ka taea e ngā kiritaki te whakatikatika tika i te hohonutanga tohu, kia tino ōrite ai ki ngā whakaritenga tukanga motuhake. **Rahi Wāhi Ka Taea te Whakarite:** Mā tōna hangarau Dual-Spot Optics™ kua manatia, ka taea te whakawhiti i waenga i ngā rahi wāhi taiaho e rua (50 µm me te 110 µm) me te kore e hiahiatia he whakarerekētanga taputapu, kia tutuki ai te whānuitanga o ngā rauemi tohu me ngā whakaritenga ataahua motuhake.

**Te Aunoatanga me te Whakahaere Maamaa:**

**Whakahaere Aunoa Katoa:** Ka tuku i ngā āheinga whakahaere taputapu aunoa katoa, ka whakaiti i te wawaotanga a te tangata me te whakaiti i te tūponotanga o ngā hapa.

**Tautoko Tikanga SECS/GEM:** Tautoko ana i ngā kawa aunoatanga paerewa-ahumahi (SECS II/GEM), e āhei ai te whakaurunga maeneene ki roto i ngā Pūnaha Whakahaere Hanga (MES) o ngā whare hanga haurua-waea hou kia taea ai te aroturuki i te tūnga taputapu wā-tūturu me te whakahaere mamao o ngā tawhā tukanga.

**Te Takiuru Raraunga Whānui:** Ka tuhia tika e te pūnaha ngā raraunga mahi taiaho katoa, e whakarato ana i te turanga pakari mō te tātari tukanga me te whai i te kounga.

**Hototahi Whānui mō ngā Rauemi me ngā Tukanga:**

I hangaia mō ngā kiritaki e mahi ana i ngā mara o ngā haurua-ā-ira matū, ngā pūnga tukanga matatau, me ngā tākai matatau, ka aro pai tēnei pūnaha ki ngā wero tohu e pā ana ki ngā rauemi haurua-ā-ira o te whakatupuranga hou pērā i te SiC, GaN, me te GaAs.

Kāore tōna rapunga whakaaro hoahoa i te mea nui atu i ngā mahi tohu taketake; kua tū hei "otinga tohu wafer whānui," ka taea te whai i ngā aromatawai me ngā whakapainga ritenga—he mea whakarite ki ngā rauemi wafer me ngā rahi ahurei—kia tutuki ai ngā whakaritenga motuhake.

**Ngā Wāhi Whakamahi**

He taputapu tino nui te HM300 i roto i ngā mara o te hanga haurua-ira me te tākai matatau, e whakamahia ana i roto i ngā mara e whai ake nei:

**Te Hanganga Ārahi-ā-Irahiko (Mua me Muri):** E whakarato ana i ngā tohu tuakiri pumau mō ngā papa whakarewa—tae atu ki te silicon, te SiC, me te GaN—mā reira ka tautoko i te whakahaere raina aunoa me te whai i te kounga i roto i ngā tipu hanga (Fabs) me ngā whare huihuinga/whakamātautau.

**Mōkihi Matatau:** Ka tukuna he tohu pono mō ngā angaanga, ngā panera rānei kua hangaia anō i roto i ngā tukanga Mōkihi Taumata-Angaanga (WLP) me te Mōkihi Taumata-Panera (PLP).

**Te Mahi Tahi me Ētahi Atu Hua ThinkLaser**

Kei a ThinkLaser tētahi huinga whānui o ngā otinga tohu wafer, ā, he mahi nui tā te HM300 i roto i ēnei:

**Te Mahi Tahi me ngā Taputapu Tohu Ngāwari:** I runga i te raina whakaputa kotahi, ka taea e te HM300 te mahi tahi me te SC300 a ThinkLaser (he pūnaha tohu ngāwari mō ngā papa 300mm) me te SigmaClean rānei (he pūnaha tohu ngāwari mō ngā papa 100–200mm). Ka taea e ngā kaihanga te whiriwhiri ngāwari i te hangarau tohu tino tika i runga i ngā pūnga tukanga motuhake, i ngā whakaritenga rānei a te kiritaki.

**Whakarāpopototanga**

Hei whakarāpopototanga, ko te ThinkLaser HM300 he pūnaha motuhake, he taumata ahumahi, i hangaia hei whakarato i te tohu wafer pumau, e whakahaeretia ana te hohonu, e tutuki ana i ngā paerewa ahumahi tino pakari. Mā roto i tana whakahaere hohonu ka taea te whakarite, te hangarau hihi-rua, me ngā āheinga aunoa matatau, ka whakatauhia pai te wero nui i roto i te umanga semiconductor o te pupuri i te whai i ngā hua puta noa i ngā mekameka tukanga kaha-tiketike; he taputapu matua ia i roto i ngā raina hanga wafer me te takai kounga teitei. Ko tana kaiwhakawhanake, ko ThinkLaser, e whakamanamana ana ki te neke atu i te 80 tau o te wheako kapa tahi i roto i tēnei mara, ā, kei a ia te 80% o te hea mākete i roto i te United States.