Ko te ThinkLaser SC300 he pūnaha tohu taiaho "Tohu Ngāwari" tino-aunoa, i hangaia mō ngā anga 300mm. Ko tōna uara matua kei roto i tōna kaha ki te whakamahi i ngā tohu pakari, tino mārama, me te kore e pakaru te anga, e whakaputa paru rānei—nō reira ka tutuki i ngā whakaritenga tino pakari mō te hua me te whai i roto i te tukatuka haurua-mua.
I hangaia tuatahitia hei whakatutuki i te tono nui mō te tohu kore poke o ngā angaanga ina uru ki roto i te taiao rūma ma.
**Ngā Mātāpono Whakahaere me ngā Hangarau Matua**
Ka taea te mārama ake i ngā painga o te mahi me te hangarau o te SC300 mā te whakataurite i raro nei:
**Hangarau Matua** | **Mātāpono Whakahaere** | **Painga Matua**
**Tohu SuperSoftMark™** | E whakamahi ana i te taiaho Diode-Pumped Solid-State (DPSS) kua patenttia; mā te whakahaere tika i te kaha taiaho, ka hangaia he tohu papaku tae atu ki te 2.5µm i runga i te mata o te papa, ka whakarerekē noa i te whakaata o te rauemi me te kore e kino te tinana. | Kore para, he tino ma, he mārama ngā tohu, ā, kāore he kino ki te papa.
**Hangarau Taiaho Patene** | E whakamahi ana i te taiaho Nd:YLF 1053 nm me te pumau o te pāorooro (<0.5%), e whakarite ana kia ōrite te hohonutanga o ia ira kua tohua, kia pai hoki te hanga. | Kounga tohu pumau me te porowhita ira teitei (ōwehenga tuaka nui-ki-iti <1.1), e tutuki ana i ngā paerewa kounga tino pakari.
**Pūnaha Whakahaere Matatau** | Ka whakauruhia te mana whakahaere porowhita-kati taumata-pūnaha me te atanga SECS/GEM, ka taea te tuhi tika i ngā raraunga mahi taiaho katoa tae noa ki te taumata Mana Tukanga Tatauranga (SPC). | He tukanga tino whakahaere me te whai, ka taea te whakauru pai ki ngā pūnaha aunoatanga wheketere.
**Ngā Whakatakotoranga Hangarau**
I runga i ōna hangarau matua, ko ngā whakatakotoranga hangarau matua o te SC300 e whai ake nei:
**Rahi Wafer e Tautokona ana:** Paerewa 300mm (12-inihi), me te hototahitanga whakararo mō ngā wafer 200mm (8-inihi).
**Te Mahi Tohu:** Te tere tohu pūāhua kotahi tae atu ki te 125 ngā pūāhua ia hāora (WPH). E 80 ngā pūāhua e tautokona ana e ia rōpū tohu.
**Te Tika o te Tohu:** Te āheinga teitei ki te tukurua i te tūnga, ka eke ki te ±0.125mm i roto i te rohe 50×50mm. Ngā Whakatakotoranga Ā-tinana: He hoahoa pūnaha whakamatao hau, ā, e tutuki ana i ngā paerewa haumaru me te taiao o te ao, tae atu ki te CE, SEMI S2, S8, me te S14.
Ngā Wāhi Whakamahinga
Ko te SC300 he taputapu matua mō te whai i ngā raina whakaputa haurua-ā-ira nui, e whakamahia ana mō:
Te Hanganga Wafer Mua: Te tohu i ngā wafer me ngā ID ahurei hei whakahaere i te tātari hua, te arotau tukanga, me te aroturuki i ngā wafer.
Tākai Matatau: Te whakarato "tohu ngohengohe" ki ngā angaanga, ki ngā panera rānei kua hangaia anō i te wā o ngā tukanga Tākai Taumata-Angaanga (WLP), kia taea ai te whai i te tukanga mai i te tīmatanga ki te mutunga.
Ngā Kaiārahi Āhua Matū: Ka taea te tukatuka i ngā rauemi ā-hua o muri mai—pērā i te SiC, GaN, me te GaAs—kia tutuki ai ngā whakaritenga motuhake o ngā tukanga hanga motuhake.
Ngā Hua Tāpiri
Kei a ThinkLaser tētahi huinga otinga tautuhi wafer whānui, ā, he mahi nui tā te SC300 i roto i ēnei:
Hei tāpiri atu ki te HM300: He tohunga te SC300 ki te "tohu ngohengohe"—he tikanga e kore ai e hiahiatia he kino, he poke rānei o te mata—engari ko te HM300 he mea hanga mō ngā tono "tohu mārō" e hiahia ana kia roa te mau.
He Wāhanga o te Raina Hua SigmaClean/SigmaDSC: Ahakoa e arotahi ana te SC300 ki te mākete 300mm, ka mahi ngā pūnaha SigmaClean me SigmaDSC hei otinga tohu-ngāwari aunoa mō ngā wafer he 200mm te rahi me te iti iho; ka mahi tahi ēnei pūnaha i tētahi matrix hua katoa mō ngā otinga tohu wafer.
Whakarāpopototanga
Hei whakamutunga, ko te ThinkLaser SC300 he pūnaha tohu ngohengohe hangarau matatau i hangaia mō te hanga wafer 300mm nui. Ko tōna uara matua kei roto i tana hangarau SuperSoftMark™ motuhake, e āhei ai te tohu whai hua, kore puehu, me te tino tika me te kore e kino ki te mata o te wafer—he mea nui hei whakarite i te whai i ngā tukanga katoa i roto i te hanga semiconductor hou.
