Mīhini Tohu Taiaho ThinkLaser SigmaClean Wafer

He pūnaha tohu taiaho "tohu-ngāwari" aunoa a ThinkLaser SigmaClean, i hangaia mō ngā anga 100mm ki te 200mm, e tutuki ana i ngā paerewa rūma ma o te Akomanga 1. Ko tana kaupapa matua he whakamahi i te hangarau taiaho kua patenttia hei whakarato i ngā tohu whai hua, pakari, me te tino mārama ki ngā anga haurua-ira - me te kore e puta he poke matūriki - kia taea ai te whai aunoa puta noa i te huringa ora o te anga.

**Ngā Mātāpono Hangarau**

Ko ngā kaha matua o SigmaClean kei roto i tana hangarau horoi e whakahaerehia ana e te pūtake me tana hoahoa taputapu pumau, he tika hoki te hanga.

**Hangarau SuperSoftMark® Patented:** Koinei te mea matua e wehewehe ana i a SigmaClean i ētahi atu taputapu. Mā te whakahaere tika i te kaha o te laser, ka tutuki te tohu "Kore Para". Mā tēnei āhuatanga ka whakakorea te mōrearea o te poke matūriki, ka taea ai te whakamahi haumaru i te pūnaha i roto i ngā taiao hangahanga Front-End of Line (FEOL) kei reira ngā whakaritenga horoi e tino kaha ana.

**Reiara Āhua-Toka Tino Pūmau, Papuhia e te Diode:** Ka whakamahia e te pūnaha he reiara ā-tōka papuhia e te diode, he mea ātaahua te pumau o te pao-ki-te-pao. Mā tēnei ka whakarite i te tino ōrite o te hohonutanga me te porowhita o ia ira kua tohua, ā, ka whakamanahia te pumau me te auautanga o te kounga tohu.

**Ngā Pūnaha Whatu me te Aunoatanga Pakari:** He hoahoa aunoa katoa te mīhini katoa, e tautoko ana i ngā kawa whakawhitiwhiti aunoa a te wheketere SECS II/GEM, ā, ka hono pai ki ngā pūnaha whakahaere wafer aunoa matua, pērā i ngā pod wafer SMIF (Standard Mechanical Interface).

**Ngā Painga Matua me ngā Āhuatanga**

Ko ngā painga o SigmaClean kei tua atu i ōna kaha tohu matatau, tae noa ki te uara tūturu e tukuna ana e ia ki ngā wheketere hanga wafer.

**Te Ma Kore e Taea te Whakaōrite:** E tutuki ana i ngā whakaritenga hototahi rūma ma o te Akomanga 1 (Paerewa o te Ao ISO Akomanga 3), ā, koinei te whiringa pai mō ngā whare hanga angaanga o mua (Fabs) me ngā paerewa taiao ma tino tono.

**Te Huarahi Mahi Teitei me te Whai Huatanga Utu:** Ko te tukanga tohu-ngāwari—i whakawhanakehia motuhake hei tohu i ngā anga kua orohia i roto i ngā taiao rūma ma, ā, kua waiho hei paerewa ahumahi inaianei—e whakamahia ana e tēnei pūnaha hei whakarato i tētahi otinga tino whai hua.

**Te Kounga Tohu Pūmau me te Whai Aroturuki:** Ko te pumau o te pā o te taiaho te mea nui ki te whakatutuki i te hohonutanga me te porowhita o ngā ira, he mea nui ki te whakanui ake i ngā reiti mōhiotanga o ngā pūnaha tirohanga mīhini o muri mai (Optical Character Recognition, OCR). I te wā kotahi, ka hangaia e te pūnaha ngā tohu pumau, mārama hoki, e whakarato ana i te whai aroturuki puta noa i ia wāhanga o te whakaputanga.

Ngāwari ki te Whakamahinga: Ka taea te whakanoho i ngā rōpū tohu maha ki tētahi aronga i runga i te mata o te papa, me ngā wāhi tohu e herea ana ki tētahi rohe porowhita i roto i te 25 mm o te taha o te papa.

Ngā Whakatakotoranga me te Whakahaere/Tiaki

Kāwai Whakatakotoranga | Ngā Tawhā Taipitopito me te Whakaahuatanga

Whakarōpūtanga Taputapu | Aunoa Katoa, Hototahi ki te Rūma Ma, ISO 3 / Akomanga 1, Pūnaha Tohu Ngāwari Wafer 100–200 mm

Rahi o te Angaanga | Tautoko paerewa mō te 100 mm – 200 mm (4–8 inihi)

Momo Taiaho | Taiaho Āhua-Toka Pupuhi-Diode Sigma100

Hangarau Tohu | SuperSoftMark® Patented (Tohu Ngāwari Kore-Para)

Tauwāhi Tohu | Tetahi aronga i roto i te rohe porowhita 25 mm i te taha o te papa whariki

Atanga Whakawhitiwhiti Kōrero | SECS II/GEM, Atanga Manaaki Paerewa SEMI

Kawe/Rīpene | 3 Ngā Teihana Rīpene Tuwhera; 200 mm SMIF Pod Adapter Kōwhiringa

Ngā Āhuatanga Kōwhiringa | Te Pānui me te Tohu Anō i te OCR/Waehere Pae

Pūnaha Pūmanawa | Atanga Kaiwhakamahi e hangai ana ki te Windows®

Te Whakatutukitanga me te Tiwhikete | Te Whakatutukitanga ki ngā paerewa SEMI S2/S8, CE, me ētahi atu paerewa

Pūngao Hiko me te Hau | Pūngao Hiko Paerewa Ahumahi Kotahi-Wāhanga 220V me te Hau Kōpeke Ma

Kua hangaia hoki a SigmaClean kia māmā ake te tiaki:

**Te Māmā o te Tiaki:** Mā te hoahoa o te pūnaha ka māmā ake te tiaki i ia rā; ka taea te whakaoti i ngā tirotiro auau—pērā i te horoi i te karaihe—i roto i te 5 meneti pea. Hei tāpiri, kei roto i te taputapu ngā āheinga tātaritanga whaiaro aunoa o ia rā, ā, ka whakaratohia he aratohu mārama mō ngā tikanga tiaki mēnā he hapa, ā, ka māmā ake te tiaki kua whakaritea e te kaiwhakamahi.

**Haumarutanga me te Ma:** Ka tutuki te hoahoa whānui o te mīhini i ngā paerewa haumaru o te ao (hei tauira, SEMI S2/S8, CE, me ētahi atu) ā, he pūnaha tango puehu whakauru kei roto, hei whakarite i te haumaru me te akuaku o te taiao whakaputa.

**Ngā Mahi Matua me ngā Horopaki Taupānga**

**Te Hanganga Wafer Mua:** He pai mō ngā wafer i hangaia mai i ngā rauemi pēnei i te silicon, SiC, me te GaAs, mai i te 100mm ki te 200mm te rahi. Mā te whakairo i tētahi tohu motuhake i ngā wāhanga tuatahi o te hanga, ka taea e te pūnaha te whai i te kounga me te Whakahaere Tukanga Tatauranga (SPC) mai i te tīmatanga ki te mutunga.

**Mōkihi Matatau:** Ka whakarato i ngā tohu whaiwhai matua i roto i ngā tukanga Mōkihi Taumata-Wafer (WLP) me ngā tukanga Wafer Whakahou.

**R&D me te Hanga Puranga Iti:** Nā tōna hoahoa ngāwari, aunoa hoki, he mea tino pai mō ngā taiao R&D me ngā taiao whakaputa whakamātautau e tohuhia ana e te nui o te ranunga me te iti o te rahinga hanga.

**Whakarāpopototanga me te Whakataurite**

Hei whakarāpopototanga, ko te ThinkLaser SigmaClean he taputapu e tutuki ana i ngā paerewa matua o te umanga e pā ana ki te horoi, te pumau, me te aunoatanga. Mā te whakamahi i tana hangarau SuperSoftMark® kua patenttia, ka whakatauhia e ia te tino raruraru—te poke o ngā matūriki—e pā ana ki ngā tikanga tohu tuku iho, ā, ka whakatūria ia hei paearu i roto i te mara o te "tohu ngohengohe" mō ngā wafers 4-ki-8-inihi. Hei whiwhi māramatanga mārama ake mō tōna tūnga i roto i te raina hua, tirohia te whakataurite e whai ake nei ki te SC300—tētahi atu taputapu tohu ngohengohe:

**Āhuatanga** | **SigmaClean** | **SC300**

**Te Tūnga Matua** | Pūnaha tohu-ngāwari aunoa mō ngā papa 100–200mm (4–8-inihi) | Pūnaha tohu-ngāwari aunoa mō ngā papa 300mm (12-inihi)

**Te Whakamahinga Mākete** | E aro ana ki ngā wheketere wafer semiconductor me ngā wheketere takai e whakahaere ana i ngā wafer 8-inihi me ngā wafer iti iho; koia te otinga matua i tēnei wāhanga mākete | E whakamahia whānuitia ana e ngā Kaihanga Pūrere Whakauru 300mm katoa (IDM) me ngā wheketere wafer

**Ngā Āhuatanga Hangarau** | Hototahi ki te rūma ma o te akomanga 1; e whakamahi ana i te hangarau SuperSoftMark® kua patenttia hei whakatutuki i te tohu kore-para | E whakamahi ana hoki i te hangarau tohu-ngāwari, e whakarato ana i te hototahitanga, te ma, te kounga tohu, me te pono e hiahiatia ana mō te hanga papatipu 300mm

**Pūnaha Kawe** | E toru ngā teihana rīpene tuwhera e whirihorahia ana; kei te wātea ngā pod SMIF hei kōwhiringa | He hototahi ki ngā Pod Whakakotahi Whakatuwhera-Mua (FOUP); e tautoko ana i ngā pūnaha OHT (Overhead Hoist Transport)

**Tūnga Ahumahi** | Ko te otinga ārahi-a-umanga mō te tohu ngohengohe o ngā papa wafer 4–8-inihi | Ko te paerewa ahumahi mō te tohu ngohengohe i roto i ngā papanga papa wafer 300mm, e whakamanamana ana ki te turanga nui kua tāutahia (neke atu i te 140 ngā waeine)