Mīhini huri wafer DISCO DFG8830

He mīhini whakakoi me te whakakanapa aunoa te DISCO DFG8830 mō ngā rauemi mārō me ngā rauemi pakarukaru, i whakarewaina e te DISCO Corporation o Hapani. Ko tana arotahi matua ko te whakakanapa pai, iti te kino o ngā rauemi mārō me ngā rauemi pakarukaru o te whakatupuranga tuatoru o te semiconductor/whatu pērā i te SiC me te hapaira. He hoahoa 4-tuaka, 5-wāhanga, e whakataurite ana i te kaha whakaputa me te tino tika, ka waiho hei mīhini matua mō te whakakanapa i ngā anga mārō me ngā rauemi pakarukaru 6-8 inihi te whānui.

I. Ngā Whakatakotoranga Matua me ngā Tauira Taupānga

1. Te Tūnga Matua

He mīhini whakakanapa, whakanikoniko aunoa katoa, i hangaia mō ngā rauemi tino mārō, tino pakarukaru (SiC, hapaira, uku, karāhe, me ētahi atu), e whakaoti ana i ngā raruraru o te iti o te pai o te tukatuka, te nui o te kino, me te iti o te hua o ngā taputapu tuku iho.

2. Ngā Whakamahinga Noa

Ngā Kaiārahi-ā-Haumaru: Te whakaangawari i ngā papa hiko SiC/GaN (6-8 inihi), te whakaangawari i ngā papa hapaira (ngā maramara LED).

Whatu: Te angiangi o te karāhe whatu, ngā papa uku, me ngā rauemi pūwhero-whero.

Tākai Matatau: Te angiangi i ngā angaanga hiato me ngā papa tautoko karāhe/uku (te matotoru katoa ≤ 3.5mm).

3. Ngā Rahi Hototahi

Ngā Waferi Tukatuka: Φ4/5/6 inihi (te mōrahi Φ150mm).

Ngā Papa Tautoko: Φ5/6/8 inihi (hototahi ki ngā papa 8-inihi e tautoko ana i ngā papa angiangi 6-inihi).

II. Hanganga Whānui me te Whirihoranga Matua

1. Hanganga Whānui

Tahora: 4 ngā miro + 5 ngā tēpu tītaha + 1 tepu hurihuri, e whakauru ana i te tukanga katoa o te uta, te huri, te horoi, te whakamaroke, me te tango uta, e 3.5 mita anake te rahi, he kiato, he whai hua hoki.

Ngā Ahu (Wh×D×T): 1400×2500×2000mm; Taumaha: Tata ki te 6000kg.

2. Ngā Wāhanga Matua

(1) Pūnaha Porowhita (4 tuaka, Z1-Z4)

Mana: Ko te Z1-Z3 he 6.3kW (he pakari, he taipana teitei, he pai mō ngā kawenga taumaha i runga i ngā rauemi mārō me ngā rauemi pakarukaru); ko te Z4 te tuaka whakaoti. Tere hurihuri: 1000-4000 min⁻¹ (putanga mana pumau, he pai mō te huri taratara/pai).

Wira huri: Wira huri taimana paerewa Φ300mm (rahi te whānui, tere tango tere, e tika ana mō ngā rauemi mārō me ngā rauemi pakarukaru).

(2) Pūnaha tēpu mahi

E 5 ngā tēpu mahi kapu momi korehau me te 1 tepu hurihuri e āhei ai te tukatuka whakarara me te mahi tonu, me te UPH (te kaha teitei ia hāora) e toru ngā wā i tērā o ngā taputapu tuaka-kotahi (pērā i te DFG8340).

Mā te mimiti korehau + te tika o te tūnga ±2μm ka whakarite kia ≤2μm te TTV (te rerekētanga matotoru katoa) o te angaanga i muri i te angiangi.

(3) Pūnaha whakahaere

Atanga whakahaere: 15-inihi te atanga pa, he mahi e hangai ana ki ngā ata, e tautoko ana i te aroturukitanga wā-tūturu, te rokiroki tawhā, me ngā whakaoho rerekē.

Matua whakahaere: He porowhita kati-tūturu te servo + te kupenga, he tika te whakahaere matotoru ±0.1μm, e tautoko ana i te angiangi taumata-micron (ki raro ki te 50μm). 3. Ngā Wāhanga Matua

Wāhanga Huri: Te wehenga mahi tuaka-4 (huri taratara Z1 → huri waenga Z2 → huri pai Z3 → oro/whakaoti Z4), te whakaoti i ngā tukanga maha i roto i te kotahi whakapiringa, te whakaiti i te kino o te whakahaere.

Wāhanga Horoi me te Whakamaroke: Te rehu wai parakore + te whakamaroke hau katote i muri i te huri, kāore he toenga, he tohuwai rānei e toe ana, e tutuki ana i ngā whakaritenga horoi haurua-waenga.

Te Utaina me te Tango Aunoa: Ngā pouaka rauemi takirua (25 ngā paparanga mō ia pouaka), ka tautuhi aunoa i ngā paparanga/papa, ka whakaiti i te wawaotanga ā-ringa.

III. Te Mātāpono Mahi me te Rere o te Tukanga

1. Te Mātāpono Huri

Te whakamahi i te tikanga hurihanga o te angaanga + te tikanga huri whāngai-roto: Ka huri te angaanga i te tere tere me te tēpu mahi, ā, ka whāngai te wira huri taimana ki te taha tuaka, ka tangohia te rauemi mā te tapahi whakakoi me te pakaru moroiti. Mō ngā rauemi mārō me ngā rauemi pakarukaru, ko te tango pakarukaru te tikanga matua, me te tango kirihou, hei whakahaere i te hohonutanga o te kapiti ≤5μm.

2. Rere Tukanga Paerewa

Te utaina: Ka tangohia ake te anga whakarewa e te ringa karetao i te pouaka rauemi → ka whakanohohia → ka mimitihia e te korehau ki runga i te tēpu mahi.

Te Hurihanga Matariki (Z1): Te tere tango teitei (50-100μm/min), ka tere te angiangi ki te matotoru e hiahiatia ana + 20μm.

Huri Waenga (Z2): Tere tango waenga (20-50μm/min), ka whakaitihia te paparanga pakaru ki te matotoru whainga + 5μm.

Te Hurihanga Pai (Z3): Te tere tango iti (5-10μm/min), TTV ≤ 2μm, paparanga pakaru ≤ 2μm.

Te whakakanapa/Te whakaotinga mata (Z4): Te whakaotinga whakaata, te taratara o te mata Ra ≤ 0.1μm.

Te Horoi me te Whakamaroke: Rehu wai parakore → whakamaroke hau katote → tango ki roto i te pouaka rauemi.

3. Tautoko i te Rere Tukatuka Papa: Ka urutau ki ngā papa whakarewa karāhe/uku (te matotoru katoa ≤ 3.5mm), ka tiakina e te mimiti korehau o te papa te taha o mua o te papa whakarewa, ka huri noa i te taha o muri, ka whakatau i ngā raruraru piko me te pakaru o ngā papa whakarewa tino angiangi.

IV. Ngā Painga Hangarau Matua

1. Kaha te Urutau ki ngā Rauemi Mārō me ngā Rauemi Pakari

He wira huri taimana nui te whānui (6.3kW) me te pou hurihuri mana-teitei, e whakanui ana i te pai o te tukatuka SiC/hapaira mā te 3 ngā wā, ā, e whakaroa ana i te roa o te ora o te wira mā te 50%.

Tukanga huri iti-kino: Paparanga kino ≤2μm, hua ≥99%, nui atu i ngā tukanga huri tuku iho.

2. Te kaha whakaputa tino pai (4 toki, 5 tēpu mahi)

Tukatuka whakarara: 4 ngā tuaka e mahi tahi ana, 5 ngā tēpu mahi e hurihuri tonu ana, UPH≥30 ngā anga (6-inihi SiC), e 3 ngā wā o te nui ake i te taputapu tuaka kotahi.

Aunoa katoa: Te uta, te tango i te taumaha, te huri, te horoi, me te whakamaroke kua whakauruhia; te mahi tonu me te kore e tirotirohia mō ngā hāora 24.

3. Te tino tika me te pumau teitei

Mana whakahaere matotoru: ±0.1μm, TTV≤2μm, e tutuki ana i ngā whakaritenga o te wafer SiC kounga-aunoa.

Hanganga pakari: Tinana rino maka + hoahoa whakaiti wiri, wiri ≤0.5μm, kāore he paheketanga o te tika i te wā roa o te mahi. 4. Ngāwari te urutau me te iti o ngā utu whakahaere

Hototahi Maha-rahi: Hototahi ki ngā anga 6-inihi me ngā papa 8-inihi, e āhei ai te whakamahi maha-kaupapa me te whakaiti i te haumi taputapu.

Tukatuka Kakariki: Ka whakamahia te wai parakore anake, ka whakakorea te parahanga o te paru whakakanapa; ka taea te tuku tika i te wai para, ka whakaitihia ngā utu whakahaere mā te 30%.

V. Ripanga Tawhā Hangarau Matua

Uara Tawhā Ripanga

Rahi o te Wafer Tukatuka Φ4/5/6 inihi (mōrahi Φ150mm)

Rahi Papa Tautoko Φ5/6/8 inihi

Tau o ngā Miro / Mana 4 ngā tuaka, Z1-Z3: 6.3kW

Tere o te Miro 1000-4000min⁻¹

Whakatakotoranga o te Wira Huri Φ300mm Wira Huri Taimana

Te Tika o te Whakahaere Matotoru ±0.1μm

TTV (Te Rerekētanga Matotoru Katoa) ≤2μm

Te Pākari o te Mata Ra≤0.1μm

Te kaha (6-inihi SiC) UPH≥30 ngā papa

Ngā Rahi Mīhini Katoa (W×H×T) 1400×2500×2000mm

Taumaha Tata ki te 6000kg

Te rahi o te papa 3.5㎡

VI. Te Whakataurite ki ngā Taputapu Rite (DFG8830 vs DFG8340)

Tūemi Whakataurite Ripanga DFG8830 (4 tuaka, 5 tēpu mahi) DFG8340 (1-tuaka, 2-wāhanga)

Whirihoranga o te miro: 4 × 6.3kW, wehenga whakatā/whakaoti/whakakanapa: 1 × 4.2kW, tukanga kotahi

Te kaha: UPH≥30 ngā papa (6-inihi SiC), UPH≤10 ngā papa (6-inihi SiC)

Te tika o te tukatuka: TTV≤2μm, paparanga kino≤2μm, TTV≤5μm, paparanga kino≤5μm

Ngā rauemi e tika ana: SiC, hapaira, ngā papa whakarewa hiato (me te papa), ngā papa whakarewa silicon, ngā uku iti-mārō

Tawhito: 3.5㎡, 2㎡

Ngā āhuatanga e tika ana: Te whakaputanga papatipu, ngā rauemi pakeke-nui me te pakarukaru; Puranga iti, ngā papa silicon/ngā rauemi pakeke-iti

VII. Whakarāpopototanga me te Uara Ahumahi

Ko te DISCO DFG8830, me tōna hoahoa tuaka-4, wāhanga-5, he miro kaha-teitei, me te tukanga iti-kino, kua noho hei taputapu paerewa mō te angiangi o ngā semiconductors o te whakatupuranga tuatoru (SiC/GaN) me ngā papa whatu hapaira, e whakaoti ana i ngā raruraru o te ahumahi o te iti o te whai hua, te nui o te kino, me te iti o te hua i roto i te tukatuka o ngā rauemi mārō me te pakarukaru. I roto i ngā mara pēnei i ngā waka hiko hou, ngā whakawhitiwhiti kōrero 5G, me te rama LED, ka āwhina te DFG8830 i ngā taputapu hiko SiC me ngā maramara LED hapaira ki te whakatutuki i te whakaputanga papatipu, me te akiaki i te ahumahi semiconductor ki te whānui ake o te āputa roopu, ngā kōtaha angiangi, me te mahi teitei ake.