Isukura wafer ya SCREEN SU-3200

SCREEN SU-3200 ni sisitemu ikomeye yo gusukura inshuro imwe ya 300mm mu nganda zikora ibikoresho bya semiconductor. Kubera ubushobozi bwayo bwo gukora neza no gukoresha ikoranabuhanga rihambaye mu gusukura, yabaye icyitegererezo cy’ingenzi cya SCREEN igihe kirekire, gishyigikira gukora ibikoresho bya logique na memory chips kuva kuri 32nm kugeza kuri 7nm ndetse n’ibice bigezweho, bigira uruhare runini ku isoko ry’ibikoresho byo gusukura.

Incamake y'ikoranabuhanga n'imiterere y'ibanze: Uburyo SU-3200 ishyirwamo ni ukongera cyane umusaruro w'isuku ya single-wafer mu gihe ikomeza kugira isuku nyinshi cyane, ihuze n'ubushobozi bukabije bw'ibikorwa bigezweho.

Igishushanyo mbonera cy’umusaruro mwinshi: Binyuze mu buryo bushya bw’imiterere y’ibice bine, sisitemu imwe ishobora gushyirwaho hamwe n’ibyumba 12 byigenga byo gutunganya, bikagera ku bushobozi bwo gutunganya wafer 800 ku isaha (WPH), byari ku isonga ku isi mu buryo bwo gusukura wafer imwe icyo gihe.

Uburyo bwo gusukura cyane: Kugira ngo yuzuze ibisabwa bikomeye bya 22nm n'uduce duteye imbere, SU-3200 ifite ikoranabuhanga rya SCREEN rya APAC (Advanced Process Atmosphere Control). Mu kunoza ibidukikije byo mu cyumba mu ngero nyinshi, bitanga isuku ihebuje mu gikorwa cyo gusukura.

Ibisobanuro by'ingenzi bya tekiniki: Kugira ngo ugere ku ntego ebyiri zo gukoresha neza no kugira isuku, SU-3200 ikoresha urutonde rw'imiterere mishya, irambuye mu mbonerahamwe ikurikira:

Ingano y'ikoranabuhanga | Izina ry'ikoranabuhanga | Imikorere y'ingenzi n'uburyo bwo kuyishyira mu bikorwa

Kunoza Ubushobozi bwo Guteza Imbere | Icyumba Gito | Bigabanya ingano y'icyumba kimwe cy'imikorere kugeza kuri kimwe cya kabiri cy'icyabanjirije, bigatuma bishoboka ko hashyirwamo ibyumba byinshi mu mwanya umwe, bityo bikongera umusaruro wabyo kuri buri gice.

Sisitemu yo Kohereza Ibinyabiziga Yihuta | Inoza uburyo bwo kohereza ibinyabiziga n'umuvuduko wabyo hagati y'ibyumba, ikaba ari inkunga ikomeye yo kugera ku musaruro mwinshi wa binyabiziga 800 ku isaha (WPH).

Igenzura ry'isuku | Ikoranabuhanga rya APAC | Ikoranabuhanga rya "Ultra-clean chamber" ni ijambo rusange risobanura urukurikirane rw'ikoranabuhanga. Ikoranabuhanga ryaryo ry'ingenzi ririmo:

Icyumba gito cya AMC: Kugabanya ingano y'imbere y'icyumba kugeza kuri kimwe cya gatatu cy'icyabanjirije, bigatuma habaho kwihutisha gusimbuza gazi no kunoza neza isuku y'ibidukikije.

Uburyo bwo Kugabanya Ubwinshi bw'Ingufu mu Myotsi bwa ABG: Bukoreshwa mu kugabanya ubwinshi bw'umwuka utemba uhuhwa n'icyuma cyo hejuru gikoresha ikoranabuhanga rigezweho (FFU), bukarinda imiyoboro cyangwa ibice byapfuye mu cyumba no kugenzura ko uduce duto dukurwamo neza.

Uburinzi bwa ASP buhanitse bwo gusya: Binyuze mu buryo bwimbitse, kugabanya gusya imiti mu gihe cyo gutera imiti, no kwemeza ko ahantu ho gutunganya wafer hasukuye.

Akazu ko kurinda umwuka ka APN: Gukoresha "igitambaro cy'umwuka" mu gihe cyo kuma kugira ngo ukingire ubuso bwa wafer no gukumira umwanda w'amazi uterwa n'ibisigazwa by'amazi aturuka mu mwuka.

Itangwa ry’imiti rihindagurika: Inkomoko y’imiti ishobora gutegurwa mu buryo bworoshye. Haraboneka sisitemu zombi zo mu bwoko bwa Dynamic Direct Injection (DDI) n’izo mu bwoko bwa kabati, bigatuma abakiriya bahitamo mu buryo bworoshye hakurikijwe ibisabwa mu buryo bwihariye.

Uburyo bworoshye bwo kubungabunga: Imiterere yo gukurura: Icyumba cyo gutunganya ibintu gishobora gukururwa nk'agasanduku kugira ngo byoroshye gusukura, gusimbuza ibice, n'indi mirimo yo kubungabunga, bigabanye neza igihe cyo gukoresha ibikoresho. Ahantu hakoreshwa: Kuva ku bushakashatsi n'iterambere bigezweho kugeza ku nganda zikuze

SU-3200 ifite uburyo bwinshi bwo kuyikoresha, ikaba ikubiyemo ibyiciro byinshi by'ingenzi byo gukora semiconductor.

Udupira two mu mutwe n’ubwo mu mutwe: SU-3200 ikoreshwa mu bushakashatsi no mu ikorwa rya za chips, harimo na 7nm n’izindi nodes zigezweho, haba mu buryo bwa FEOL (front-end) na back-end (BEOL).

Ibikoresho by'ingenzi bya Semiconductor n'inzira: Mu bikorwa byinshi ishyigikira harimo gusukura ibikoresho bya semiconductor byo mu gisekuru cya gatatu nka SiC (Silicon Carbide) na GaN (Gallium Nitride).

Ubushakashatsi Bugezweho n'Ubufatanye mu Bidukikije: Imikorere ikomeye ya SU-3200 ituma iba amahitamo y'ibigo bikomeye by'ubushakashatsi n'iterambere ku isi. Urugero, IBM yashyize mu bikorwa SU-3200 mu kigo cyayo cy'ubushakashatsi cya semiconductor kiri i Albany, muri New York. Byongeye kandi, SCREEN yafatanyije na Applied Materials, bashyira SU-3200 mu Kigo cyayo cya META kugira ngo bateze imbere uburyo bwa chip bugezweho.

Isoko rihagaze n'uruhare rwaryo mu mateka

SU-3200 si ibicuruzwa byatsinze gusa, ahubwo ni n'ikintu cy'ingenzi mu gushyiraho umwanya w'ubuyobozi bwa SCREEN ku isoko.

Ubwiganze bw'Isoko: Nyuma y'intsinzi ya SU-3200, SCREEN yakomeje gukomera ku mwanya wayo wa mbere mu bijyanye n'ibikoresho byo gusukura. Nk'uko imibare yemewe ya SCREEN ibigaragaza, kugeza muri Nyakanga 2025, ibikoresho byayo byose byo gusukura bya semiconductor byari birengeje units 15.000, bikaba bifite umugabane wa mbere ku isoko ku isi mu byiciro byinshi birimo gusukura rimwe, gusukura mu byiciro, no gusukura mu buryo bwa spin.

Inkingi y'Ibyinjira: Igihe kirekire, SU-3200 yari ingenzi cyane muri SCREEN, kandi amafaranga yinjiraga mu bucuruzi bw'ibikoresho byo gusukura yari ashingiye cyane kuri ubu buryo.