Kaihoroi plasma Nordson MAREHE AP-300

He pūnaha plasma korehau papa mahi iti, he iti te utu, te Nordson MARCH AP-300. Ko tōna kaha matua kei roto i te whakaurunga o te pūhiko hiko RF 13.56 MHz me te whatunga taurite aukati aunoa, e āhei ai te tuku hua tukatuka plasma tino pai, pumau, me te ōrite i roto i te tapuwae iti.

**Mātāpono Whakahaere**

Ka mahi te AP-300 mā te whakamahi i tētahi papu korehau hei whakawātea i te rūma ki tētahi āhua korehau-teitei, ā, muri iho ka whakaurua mai he hau tukatuka motuhake. Mā te whakamahi i te pūngao RF 13.56 MHz, ka whakakoitia te hau hei hanga i tētahi parāuma. Ka uru ngā matūriki pūngao-teitei me ngā momo tauhohe i roto i te parāuma ki te pupuhi ā-tinana, ki ngā tauhohenga matū rānei ki te mata o te rauemi, ā, ka tutuki te horoinga o te mata, te whakahohenga, te whakairo rānei.

**Ngā Mahi Matua me ngā Taupānga**

Ko te mahi matua a te AP-300 he whakarato i tētahi taiao plasma pumau, ka taea te whakahaere. Ko te mea nui, ko te arotau i te kounga me te pono o ngā hua whakamutunga mā roto i ngā tikanga matua e toru:

**Kāwai Mahi** | **Tikanga Whakatinanatanga me te Pānga**

**Te Horoi Parahi** | Ka tango i ngā poke me ngā waikura waro mai i ngā mata o ngā rauemi, ka tutuki ai te ma o te taumata ngota.

**Whakahohenga Mata** | Ka whakauru i ngā rōpū mahi porowhita—pērā i ngā rōpū hydroxyl me te carboxyl—ki te mata o te rauemi, ā, ka whakanui ake i te kaha o te mata me te mākū kia pai ake ai te piri ki ētahi atu rauemi.

**Te Whakairo / Te Wehenga** | Ka whakamahi i ngā hau tukatuka kei roto te fluorine (hei tauira, CF₄) hei mahi i te whakairo anisotropic, isotropic rānei i ngā tauine micron, nanometer rānei; ka taea te tango i ngā toenga photoresist mai i ngā wafers.

**Ngā Painga Matua me ngā Āhuatanga**

He tino pai te taurite o te hoahoa o te AP-300 i waenga i te mahi me te ngāwari i roto i te wāhi iti. Kei raro nei ngā āhuatanga matua:

**Kāwai** | **Āhuatanga Matua** | **Whakaahuatanga Motuhake**

**Ngā Painga** | **Teitei o te Taurite me te Auautanga** | Ko te whakaputanga RF 13.56 MHz, me te whatunga taurite aukati aunoa, ka whakarite kia auau rawa ngā hua o te tukanga.

**Mahi Māmā, Pono hoki** | Kei roto he pūnaha whakahaere mata pa e hangai ana ki te PLC e tuku ana i tētahi atanga whakairoiro māmā me te aroturuki tukanga wā-tūturu; he hanganga pakari, he mea hanga ki te konganuku katoa e whakapūmau ana i te pumau mō te wā roa.

**Ngāwari me te Whakawhanui** | Ka tautoko i ngā raina hau e whā, e whakatutuki ana i ngā whakaritenga tukanga mō ngā hau pēnei i te O₂, Ar, H₂, He, me te CF₄. **Utu-Pai** | Ka tukuna he mahi tino pai me te ngāwari i te utu iti, ka waiho hei whiringa pai mō te R&D me te whakaputa whakamātautau iti.

**Ngā Āhuatanga Matua** | **Hoahoa Papamahi Kiato** | He tino motuhake; me hono noa he papu korehau o waho, ā, he ngāwari te uru ki runga i tētahi paepae taiwhanga paerewa, i tētahi tēpu mahi rānei.

**Whiringa Rūma Ngāwari** | He mea hanga te rūma ki te konumohe pakari, ā, e whitu ngā paepae hiko ka taea te tango, te whakarite hoki.

**Tautoko ana i ngā Aratau Tukanga Maha** | Tautoko ana i ngā aratau Plasma Tika (te nuinga ko te pupuhi ā-tinana) me te Plasma o raro (te nuinga ko ngā rauropi matū), e tuku ana i te ngāwari ki te whakatutuki i ngā whakaritenga tukanga kanorau.

**Ngā Whakatakotoranga Taipitopito**

**Kāwai Tawhā** | **Ngā Whakatakotoranga Motuhake**

**Ngā Ahu Whānui (WhxDxH)** | 569 × 869 × 704 mm

**Taumaha Kupenga** | 221 kg (487 lbs)

**Rōrahi o te Rūma** | 33.1 Rita

**Tau o ngā Irahiko** | Tae atu ki te 7

**Te Wāhi Irahiko** | 25.4 mm (1 inihi)

**Mana RF Paerewa** | 300 W @ 13.56 MHz

**Mana Rere Hau (MFC)** | E 2 kei roto hei paerewa; ka taea te whakawhanui ki te 4

**Ngā Hau Hototahi** | Ar, O₂, H₂, He, CF₄, me ētahi atu.

**Ngā Wāhi Whakamahinga Whānui**

He whānuitia ngā whakamahinga o te AP-300, ā, he mea nui tēnei mahi—ina koa i roto i ngā rāngai ahumahi matua e whai ake nei:

**Ngā Ārahi-ā-Irahiko me ngā Hikohiko Moroiti:** He whānuitia te whakamahinga mō te horoi whakahohe i mua i te herenga o te mate, te herenga waea, me te whakakī i te maramara-hurihuri; tae atu ki te tango ātete i muri i te whakaahua-lithography me te maimoatanga plasma i mua i te takai taumata-wafer.

**Papa Ara Iahiko Tānga me te Huinga Hiko:** Ka tango pai i ngā poke—pērā i te rerenga toenga—ā, ka whakarei ake i te mākū o te mata i mua i ngā tukanga pēnei i te paninga āhua rite me te whakakī iti.

**Hauora me ngā Pūtaiao Ora:** Ka tukuna he mahi horoi pono i roto i ngā tukanga honohono me te hanganga o ngā hanganga uaua, pērā i ngā maramara moroiti.

**Whakarāpopototanga**

Hei whakarāpopototanga, ko te Nordson MARCH AP-300 he pūnaha plasma papamahi e whakakotahi ana i te tika o te rangahau, te pono o te ahumahi, me te ngāwari o te whakamahi. Ko tōna uara matua kei roto i te pupuri i ngā kaha kaha i roto i te tapuwae iti, he mea pai mō ngā tono R&D me ngā tono whakaputa iti puta noa i ngā rāngai semiconductor, microelectronics, me te hauora.