Mīhini horoi plasma Panasonic PSX307

Ko te Panasonic PSX307 he pūnaha horoi plasma ā-roto aunoa i hangaia mō ngā papa me ngā papa, i hangaia kia tutuki ai ngā tono tere o te hanga semiconductor hou. Mā te whakamahi i te hangarau hiko pereti-whakarara hou, ka whakanui ake tēnei pūnaha i te pai o te whakaputanga mā te 1.5 ngā wā, me te whakarite i te kounga o te tukanga; ka tukuna he otinga mahi-teitei i hangaia hei whakatika i ngā wero maimoatanga mata uaua haere e pā ana ki te ao o te takai matatau.

**Mātāpono Whakahaere**

Ka whakamahia e te PSX307 tētahi pūtake hiko Auautanga Reo Irirangi (RF) 13.56 MHz hei whakaputa i tētahi mara plasma ōrite mā te whirihoranga hiko pereti-whakarara. Ina whakakorikoria ngā hau tukatuka—pērā i te argon—ka tutuki i ngā matūriki pūngao-nui te horoi i te tauine nano me te whakahohenga mata mā te mahi tahi a te pupuhi ā-tinana me ngā tauhohenga matū. Mō te whai huatanga me te ōritetanga, ka tukuna e tēnei hoahoa he painga matua ki ngā pūnaha plasma momo-puranga tuku iho. **Ngā Tauira Matua me te Tūnga Hua**

Kei roto i te raupapa PSX307 he whānuitanga o ngā tauira, i hangaia hei whakatutuki i ngā whakaritenga kanorau o ngā raina whakaputa rerekē. Kei raro nei te whakataurite i ngā āhuatanga matua mō ia tauira:

**Āhuatanga** | **Momo-S** | **Momo-M** | **PSX307A**

**Te Tūnga o ngā Taputapu** | He pai mō ngā papa iti ki te rahi waenga | He pai mō ngā papa reo ki te rahi nui | He pai mō te Takai Taumata-Wafer (WLP)

**Tukatuka Whāinga** | Papa raro (hei tauira, PCB) | Papa raro (hei tauira, PCB) | Ngā anga anga tae atu ki te 300 mm (me ngā anga anga, kāore rānei)

**Awhe Rahi o te Papa** | P 50 x W 20 ki P 250 x W 75 mm | P 50 x W 20 ki P 330 x W 120 mm | Ka taea te tukatuka i ngā papa e whā me te whānui o te 77.5 mm i te wā kotahi

**Ngā Ahu o Waho (tae atu ki te Kawe)** | Whānui 2113 × T 1100 × T 1450 mm | Whānui 2266 × T 1100 × T 1450 mm | Tirohia te pepa whakaritenga hangarau mō ētahi atu kōrero

**Taumaha Taputapu** | Tata ki te 850 kg | Tata ki te 725 kg | -

**Matotoru o te Papa** | 0.5 mm ki te 2.0 mm (hei tohutoro anake) | 0.5 mm ki te 2.0 mm | -

**Ngā Whakatakotoranga Taipitopito (Tauira Turanga PSX307)**

**Kāwai Tawhā** | **Ngā Whakatakotoranga Taipitopito**

**Tauira Taputapu** | NM-EFP1A

**Tikanga Horoi** | Te Whakaoho-muri RF pereti-whakarara

**Hau Tukunga** | Ākona (Ar) [Hāora (O₂) kōwhiringa]

**Ngā Ahu o Waho (Wāhanga Matua)** | W 930 × D 1100 × T 1450 mm

**Taumaha Taputapu (Wāhanga Matua)** | Tata ki te 555 kg

**Ngā Whakatakotoranga Pūnaha Hiko** | AC wāhanga-kotahi 200 V, 2.00 kVA (Piki 5.00 kVA)

**Ngā Whakaritenga Tuku Hau** | 0.49 MPa ...neke atu rānei; 6.5 L/min (ANR)

**Ngā Mahi Matua me ngā Āhuatanga Hangarau**

He tino matatau, he matatau hoki te PSX307, ā, e whakaatu ana tēnei i tōna hiranga hangarau mā roto i ēnei āhuatanga e whai ake nei:

**Te Taurite o te Hoahoa Rūma me te Tere o te Whakairoiro:** Mā te whakarite kia tino ōrite ngā hua whakairo o ia puranga tukatuka—he mea nui mō te pumau me te hua o te tukanga.

**Te Mahi Aroturuki Plasma Motuhake a Panasonic:** Te aroturukitanga me te pehi i ngā āhuatanga rerekē o te tukunga plasma i te wā tūturu hei ārai i te kino o te Tukunga Hiko Pūmau (ESD), kia "kore ai e pakaru" ngā hua.

**Mahi Aroturuki:** E whakarato ana i ngā āheinga aroturuki raraunga whānui mō te tukanga whakaputa, e tutuki ai ngā whakaritenga whakahaere kounga pakari o te rāngai hanga haurua-ira.

**Te Kawe ā-Rāina me te Kawe Aunoa:** Ka tautoko i ngā whirihoranga taputapu uta/tango me ngā whakatakotoranga ā-rāina, e āhei ai te whakaurunga tika ki ngā raina whakaputa aunoa me te kore e hiahiatia he wawaotanga ā-ringa.

**Ngā Painga Matua me ngā Āpure Taupānga**

Mā te whakamahi i ngā hangarau matua kua whakahuatia ake nei, ka whakaatuhia e te PSX307 ngā painga nui ki te whakapai ake i te kounga whakaputa me te whakaiti i ngā utu, inā koa i ngā wāhanga e whai ake nei:

**Te Whai Hua o te Utu:** Mā te whakamahi i te hangarau tukatuka plasma Argon (Ar) hei tango i ngā matū nikara o te mata, ka taea te whakamahi i te tukanga whakakikorua "Flash Gold" iti te utu. I te wā kotahi, ka whakaitihia ngā take pēnei i te wehewehe, ngā āputa, me ngā kapiti ka puta i te wā o te tukanga tākai. **Te Whakapai Ake i te Whai Hua:** Nā te hoahoa ā-roto me te pūnaha kawe aunoa, ka eke te taputapu ki te tere tukatuka tae atu ki te 360 ​​papa/rīpene ia hāora—e tohu ana i te pikinga 50% o te whai huatanga ki te whakataurite ki ngā taputapu tuku iho.

Te Whakarerekētanga o te Mata hei Whakatutuki i ngā Whakaritenga Tukanga Kanorau:

**Te Whakapai Ake i te Āheinga ki te Here i te Mea Whakarewa:** I mua i te herea o te waea, i te huihuinga maramara hurihuri rānei, mā te tango i ngā poke waro ka tino whakanui ake i te kaha kutikuti me te pono o te here.

**Te Piripiri Kapia Whakapai Ake:** Mā te whakarerekētanga mata e whakamahi ana i te plasma hāora (O₂) ka takirua te kaha piri o ngā matū whakakikorua epoxy me ngā rauemi whakakī-kore, ā, ka ārai pai i te wehewehe.

**Ngā Tukanga Whakakī-iti Arotau:** Ka whakapai ake i ngā āhuatanga rere o te capillary, ka whakaiti i te wā whakakī-iti mā te neke atu i te 40%—he painga tino nui mō ngā maramara hōputu-rahi me ērā he nui ngā kiato I/O.

**Ngā Wāhi Matua mō te Whakamahinga**

Nā ōna āheinga mahi-teitei, e whakamahia whānuitia ana te PSX307 i roto i ngā tukanga hanga haurua-whakairoiro teitei:

**Tākai Taumata-Whāriki:** Te whakarerekētanga o te mata o te whāriki i mua i te herenga o te mate; te horoi i ngā puku whakarewa i mua i te herenga o te maramara hurihuri; me te tango i ngā toenga (te tango waikura) i roto i ngā hanganga TSV (Through-Silicon Via).

**Mōkihi Matatau:** Te horoi me te whakahohe i te mata o ngā papa PCB i mua i te herea o te waea, te whakakī iti, me ngā tukanga whakapūtanga.

**Ngā Tukanga me ngā Rauemi Motuhake:** Te tango i ngā toenga kapia mai i ngā puku whakapiri wafer; te whakapai ake i te āheinga whakapiri o ngā paparanga whakakikorua koura iti te utu; me ngā whakamahinga rite.

**Ngā Taputapu Tāpiri**

Hei wāhanga nui o te kohinga otinga haurua-ira a Panasonic, ka mahi tahi te PSX307 me ngā hononga maramara-hurihuri MD-P raupapa tino tika a Panasonic. Mā tēnei mahi tahi ka pai te whakawhiti mai i te horoi ki te whakatakotoranga, ka hua ake he whakapainga nui i te pono o te hua whānui.

**Whakarāpopototanga**

Hei whakamutunga, ko te Panasonic PSX307 he pūnaha horoi plasma hangarau matatau i hangaia mō ngā taiao whakaputa papatipu. Mā te whakaurunga o te hangarau pereti-whakarara auaha me te pūnaha aroturuki motuhake, ka tutuki he hua nui i roto i te pai o te whakaputa me te whakaiti i ngā utu hanga, me te whakarite i tētahi tukanga kore-whakangaro me te ōritetanga tino pai. Mō ngā tono e whai wāhi ana ki ngā papa whakatakotoranga-rahi, ki ngā papa 300mm rānei—me ngā wāhi e hiahiatia ana e ngā tukanga nui pēnei i te here waea me te whakakī iti—ko te PSX307 te otinga e tika ana kia whakaarohia nuitia.