Kaihoroi plasma PVA TePla IoN 200

Ko te IoN 200, i whakaurua mai e PVA TePla, he pūnaha plasma RF (Redio Frequency) i hangaia mō te whakarerekētanga mata, te horoi, me te whakamahi i te pungarehu. Ko tōna kaha matua kei roto i tōna ngāwari tino pai: ehara i te mea ka tutuki noa i ngā hiahia o ngā taiwhanga R&D mō te tūhuratanga tukanga tika engari ka uru pai hoki ki ngā taiao whakaputa papatipu, ka taea ai te tukatuka i ngā paparanga whakatakotoranga-rahi me te tautoko i te hanga nui-rahi.

**Mātāpono Whakahaere**

Ka whakamahia e te IoN 200 te hangarau RF plasma hei whakaoho i ngā hau i roto i te taiao korehau, ā, ka puta he plasma. Ka tīmatahia e ngā rauropi plasma kaha-teitei te pupuhi ā-tinana me ngā tauhohenga matū ki runga i te mata o te rauemi, ā, ka tutuki ngā mahi tukanga pēnei i te horoi, te whakahohe, te whakairo rānei. Hei tāpiri, ka tukuna e te PVA TePla he waeine hangarau plasma ngaruiti whiriwhiri; ka whakamahia e tēnei hangarau te kaha ngaru hikohiko hei whakaoho i ngā hau me te whakaputa i ngā rauropi tauhohe. Mā tēnei ka whakarite he tukanga horoi tino whai hua, he ōrite, he isotropic, me te ārai i te kino i puta mai i te katote me te kohikohinga utu hiko.

**Ngā Āheinga Matua**

He whānui ngā āheinga tukanga o te IoN 200:

**Te Horoi Mata:** Te tango i ngā toenga kore-pūngoi, pērā i ngā poke rauropi me ngā waikura.

**Whakahohenga Mata:** Te whakaurunga o ngā rōpū mahi porowhita hei whakarei ake i te mākū me te piri o te mata, kia rite ai te mata mō ngā tukanga e whai ake nei pērā i te tohatoha me te here.

**Te Whakapūngao / Te Whakakorenga:** I roto i ngā tukanga hanga me te takai wafer, ko te tango tika i te photoresist—te whakakore rānei i ngā toenga e toe ana i muri i te whakairo tauira (arā, te whakakorenga)—mā te tukanga whakapūngao photoresist tino whai hua; mā tēnei ka whakarite kia kore e pakaru, kia tika hoki te tukatuka.

**Ngā Painga me ngā Āhuatanga**

E whakaatu ana te ripanga i raro nei i ngā painga hangarau me ngā āhuatanga hoahoa tino pai o te IoN 200 puta noa i ngā āhuatanga rerekē:

**Ahu** | **Whakaahuatanga Taipitopito**

**Ngāwari Tino Pai** | Ka taea te tukatuka i ngā angaanga tae atu ki te 200 mm te whānui, me ngā momo paparanga whakatakotoranga-rahi. He maha ngā kōwhiringa tuku hiko RF e tukuna ana e te pūnaha, ā, e tautoko ana i te whirihoranga o ngā rūma me ngā irahiko i roto i ngā rahi rerekē kia ōrite tika ai ki ngā whakaritenga tukanga me ngā putanga whakaputa; he mea nui, ko te kōwhiringa rūma nui rawa atu e whakamanamana ana ki te kaha tae atu ki te 1,200 rita, e whakarato ana i te wāhi nui mō te whakawhānui me te whakapai ake i te pūnaha a meake nei.

**Te Mahi Pakari o te Tukanga** | Mā te whakamahi i te hangarau plasma RF—me te tuku i tētahi kōwae plasma ngaruiti whiriwhiri—e whakaatu ana te pūnaha i te whānui o te urutau tukanga. Ko tana whāinga matua he whakarite i ngā hua tukanga pumau me te rite tonu i runga i ngā papa tae atu ki te 200 mm te rahi. Hei tauira, i te wā e tangohia ana te photoresist, ka tutuki i te pūnaha ngā tere tango me te ōritetanga tino pai.

**Te Ma me te Ātaahua ki te Taiao:** Ka whakamahia e te pūnaha he tukanga horoi "maroke"—he rerekē rawa atu ki ngā tikanga horoi matū mākū tuku iho—ā, ka kore e hiahiatia te whakahaere i ngā para wai kino, ā, ka whakatūria hei hangarau "kakariki" e pai ana ki te taiao.

**Hangarau Matua me te Kounga Pono:** Mā te whakamahi i ngā tau neke atu i te 25 o te tohungatanga hohonu i roto i te mara o te tukatuka plasma, e rongonui ana te PVA TePla i roto i te umanga mō te roanga o te ora o ngā taputapu neke atu i te 20 tau—he tohu tēnei mō tōna kounga me tōna pono tino pai. Mā tōna hangarau plasma ngaruiti ahurei ka taea te horoi whānui me te kore e pakaru i ngā tauira.

**Whakahaere Māmā me te Whai Aroturuki Raraunga:** Ko te hoahoa o te pūnaha e aro nui ana ki te whakahaere kaupapa maha-whakamahinga, ngā pūnaha whakaoho haumaru-kore, me ngā pūmanawa kohikohi raraunga. Ehara i te mea ka whakaratohia e tēnei he wheako whakahaere matatau me te māmā noa iho ki ngā kaiwhakamahi, engari ka whakarite hoki i te whai aru i ngā tukanga, kia tutuki ai ngā whakaritenga pakari a te umanga mō te whakahaere kounga. **Ngā Whakatakotoranga Hangarau**

Ahakoa he rerekē pea ngā whakatakotoranga taputapu motuhake i runga i te whirihoranga tuturu, ko ngā āhuatanga matua e whai ake nei o te IoN 200 kua whakarārangihia i runga i ngā mōhiohio e wātea ana ki te marea:

**Tauwhā** | **Ngā Taipitopito**

**Momo Pūrere** | Pūnaha Tukatuka Plasma RF (Auau Reo Irirangi) (Kei te wātea he Pūnaha Plasma Ngaruiti Kōwhiringa)

**Rahi o te Anga/Papa** | Tautoko tae atu ki te 200 mm (8 inihi)

**Aratau Tukatuka** | Tautoko ana i te tukatuka puranga me ngā aratau tukatuka kotahi-wafer/papa hei whakatutuki i ngā whakaritenga tukanga kanorau e pā ana ki te ōritetanga me te whai hua o te utu

**Whirihoranga Rūma** | Hoahoa ā-pūrere, hototahi ki ngā momo irahiko me ngā hanganga rūma

**Ngā Whakamahinga Matua** | Te tango i te ātete-ata (Te tango pungarehu/Te tango i ngā poke), Te tango i ngā poke waro/kore waro, Te whakahohenga o te mata

**Ngā Hau Tukanga** | Hāora (O₂), Ākona (Ar), Ngā hau kei roto he wheori, me ētahi atu.

**Mana RF** | E tuku ana i ngā kōwhiringa whirihoranga mana me te auau hei whakatutuki i ngā whakaritenga tukanga motuhake (hei tauira, 13.56 MHz, 2.45 GHz rānei [Ngaruiti])

**Ngā Wāhi Whakamahi**

Mā te whakamahi i tōna mahi tino pai me tōna ngāwari, he mea nui te mahi a te IoN 200 puta noa i ngā rāngai hangahanga papai.

**Te Hanganga Ārahi-Haumaru (Mua):** Whakamahia i te wā o te tukanga hanga wafer mō te tango/whakakore i te pungarehu photoresist; mō te tango i ngā photoresist whai muri i ngā tukanga pēnei i te whakaurunga katote; me te whakakore i ngā poke waro me ngā poke kore-waro mai i ngā mata wafer.

**Mōkihi Matatau (Pikitia o muri):** Whakamahia hei whakahohe me te horoi i ngā mata o te papa me ngā maramara i mua i te herea o te waea, te tāpiri i te mate, me te whakakī iti, kia pai ai te piri me te hua whakakī.

**Ngā MEMS me ngā Pūrere Optoelectronic:** Whakamahia i roto i te hanga MEMS me ngā wāhanga optoelectronic hei tango i ngā paparanga patunga tapu, i ngā toenga photoresist rānei—hei tauira, te tango i te SU-8 photoresist.

**Ētahi Atu Ahumahi:** Ka taea hoki te whakamahi i ōna mātāpono hangarau matua ki ngā mara pēnei i te pūtaiao koiora, te hangarau hauora, te hikohiko motuka, me te rererangi, hei whakarei ake i te pono me te mahi o te hua.

**Whakarāpopototanga**

Hei whakarāpopototanga, he pūnaha tukatuka plasma kaha te PVA TePla IoN 200 e tuku ana i te ngāwari o te tukanga. Ka tukuna e ia he mahi tino pai i roto i te horoi kounga teitei, te tango i te photoresist, me te whakahohenga mata, he mea tino pai mō te R&D taiwhanga me ngā taiao whakaputa tauine-waenga e uru ana ki ngā papa 200mm, iti iho rānei. Nā tōna hoahoa modular ngāwari me te mahi pakari ka whakatūria hei otinga pono i roto i ngā rāngai semiconductor, microelectronics, me te takai matatau.