Chotsukira cha wafer cha SCREEN SU-3200

SCREEN SU-3200 ndi njira yodziwika bwino yoyeretsera ya 300mm imodzi mumakampani opanga ma semiconductor. Ndi luso lake lapamwamba komanso ukadaulo wapamwamba waukhondo, yakhala chitsanzo chachikulu cha SCREEN kwa nthawi yayitali, kuthandizira kupanga ma logic ndi ma memory chips kuyambira 32nm mpaka 7nm komanso ma node apamwamba kwambiri, zomwe zimagwira ntchito yofunika kwambiri pamsika wa zida zoyeretsera.

Chidule cha Kuyika Pakati ndi Ukadaulo: Kuyika pakati pa SU-3200 ndikowonjezera kwambiri kuchuluka kwa kuyeretsa kwa chotsukira chimodzi pomwe kumasunga ukhondo wambiri, kukwaniritsa zofunikira kwambiri pakugwira ntchito bwino kwa njira zapamwamba.

Kapangidwe kake kapamwamba kwambiri: Kudzera mu kapangidwe katsopano ka zigawo zinayi, dongosolo limodzi likhoza kukhazikitsidwa ndi zipinda zodziyimira pawokha zokwana 12, zomwe zimatha kukonza ma wafer 800 pa ola limodzi (WPH), zomwe zinali zotsogola padziko lonse lapansi pakati pa makina oyeretsera ma wafer amodzi panthawiyo.

Malo Oyeretsera Kwambiri: Kuti akwaniritse zofunikira zolimba za 22nm ndi ma node apamwamba kwambiri, SU-3200 ili ndi ukadaulo wa SCREEN wa APAC (Advanced Process Atmosphere Control). Mwa kukonza bwino malo oyeretsera m'zipinda zosiyanasiyana, imatsimikizira ukhondo wabwino kwambiri wa njira yoyeretsera.

Tsatanetsatane Waukadaulo Wofunika: Kuti tikwaniritse zolinga ziwiri za kufalikira ndi ukhondo, SU-3200 imagwiritsa ntchito mapangidwe atsopano, omwe afotokozedwa mu tebulo ili m'munsimu:

Kukula kwa Ukadaulo | Dzina la Ukadaulo | Ntchito Yaikulu ndi Njira Yogwiritsira Ntchito

Kupititsa patsogolo Mphamvu | Compact Chamber | Kumachepetsa kuchuluka kwa chipinda chimodzi chogwirira ntchito kufika theka la chipinda choyambirira, zomwe zimapangitsa kuti zikhale zotheka kuyika zipinda zambiri mkati mwa malo omwewo, motero kumawonjezera kuchuluka kwa ntchito pa dera lililonse.

Dongosolo Losamutsa Liwiro Lalikulu | Limakonza njira yosamutsira ndi liwiro la ma wafer pakati pa zipinda, chithandizo chofunikira kwambiri kuti mupeze ma wafer 800 pa ola limodzi (WPH).

Chitsimikizo cha Ukhondo | Ukadaulo wa APAC | Ukadaulo wa chipinda choyera kwambiri ndi mawu ogwiritsidwa ntchito pofotokoza mndandanda wa ukadaulo. Maukadaulo ake akuluakulu ndi awa:

Chipinda cha AMC Micro-chamber: Kuchepetsa kuchuluka kwa mkati mwa chipinda kufika pa gawo limodzi mwa magawo atatu a chipinda choyambirira, zomwe zimathandiza kusintha mpweya mwachangu komanso kukonza bwino ukhondo wa chilengedwe.

ABG Airflow Balancing Baffle: Imagwiritsidwa ntchito kufananiza mpweya woyera womwe umatsitsidwa ndi fyuluta yapamwamba kwambiri (FFU), kuletsa ma eddies kapena malo akufa mkati mwa chipinda ndikuwonetsetsa kuti tinthu tating'onoting'ono timachotsedwa bwino.

Chitetezo Chotsogola cha ASP: Kudzera mu kapangidwe kolondola, kuchepetsa kupopera mankhwala panthawi yopopera mankhwala, ndikuwonetsetsa kuti malo opangira ma wafer ndi oyera.

Nozzle Yoteteza Mpweya ya APN: Kugwiritsa ntchito "nsalu yotchinga mpweya" panthawi youma kuti muteteze pamwamba pa wafer ndikuletsa madontho a madzi omwe amayambitsidwa ndi zotsalira zamadzimadzi.

Kupereka Mankhwala Osinthasintha: Magwero a mankhwala amatha kukonzedwa mosavuta. Makina onse a Dynamic Direct Injection (DDI) ndi a kabati alipo, zomwe zimathandiza makasitomala kusankha mosavuta malinga ndi zofunikira pa njira inayake.

Kukonza Kosavuta: Kapangidwe kotulutsira: Chipinda chogwirira ntchito chikhoza kutulutsidwa ngati chotsegulira kuti chiyeretsedwe mosavuta, kusinthidwa kwa zigawo, ndi ntchito zina zokonzanso, zomwe zimachepetsa nthawi yogwira ntchito ya zida. Madera Ogwiritsira Ntchito: Kuyambira Kafukufuku Wapamwamba ndi Kukonzanso mpaka Kupanga Kwachikulire

SU-3200 ili ndi ntchito zosiyanasiyana, zomwe zimaphatikizapo magawo ambiri ofunikira popanga semiconductor.

Ma Chips Otsogola ndi Okumbukira: SU-3200 imagwiritsidwa ntchito mu kafukufuku ndi chitukuko ndi kupanga ma chips, kuphatikizapo 7nm ndi ma node apamwamba kwambiri, mu njira zonse ziwiri za front-end (FEOL) ndi back-end (BEOL).

Zipangizo ndi Njira Zofunikira za Semiconductor: Pakati pa njira zambiri zomwe imathandizira ndi kuyeretsa zipangizo za semiconductor za m'badwo wachitatu monga SiC (Silicon Carbide) ndi GaN (Gallium Nitride).

Kafukufuku Wapamwamba ndi Mgwirizano wa Zachilengedwe: Kugwira ntchito kwamphamvu kwa SU-3200 kumapangitsa kuti ikhale chisankho cha mabungwe otsogola pa kafukufuku ndi chitukuko padziko lonse lapansi. Mwachitsanzo, IBM yakhazikitsa SU-3200 pamalo ake ofufuzira a semiconductor ku Albany, New York. Kuphatikiza apo, SCREEN yagwirizana ndi Applied Materials, ndikuyika SU-3200 ku META Center yake kuti ipange njira zamakono kwambiri za chip.

Udindo wa Msika ndi Zopereka Zakale

SU-3200 si chinthu chopambana chokha komanso chinthu chofunikira kwambiri pakukhazikitsa udindo wa SCREEN pamsika.

Kulamulira kwa Msika: Pambuyo pa kupambana kwa SU-3200, SCREEN inalimbitsanso malo ake otsogola pa ntchito yoyeretsa zida. Malinga ndi deta yovomerezeka ya SCREEN, kuyambira mu Julayi 2025, katundu wake wonse wotumizidwa wa zida zoyeretsera za semiconductor unapitirira mayunitsi 15,000, zomwe zinali ndi gawo la msika wapadziko lonse lapansi m'magawo angapo kuphatikizapo kuyeretsa kwa single-wafer, kuyeretsa batch, ndi kuyeretsa spin.

Ndalama Zopezeka: Kwa nthawi yayitali, SU-3200 inali chinthu chodziwika kwambiri cha SCREEN, ndipo ndalama zomwe bizinesi yake inkapeza pa zipangizo zoyeretsera zidadalira kwambiri chitsanzo ichi.