Chopukusira cha DISCO wafer DFG8541

DISCO DFG8541 ndi makina opukusira okha omwe adapangidwa kuti akwaniritse zosowa za kupukuta ma wafer a mainchesi 8 ndi ang'onoang'ono. Monga kukweza kuchokera ku DFG8540 yomwe idagulitsidwa kwambiri, ikhoza kuyikidwa ngati "chitsanzo chachikulu cha kupukuta ma wafer a mainchesi 8," chodziwika bwino chifukwa cha kulondola kwake, ukhondo wake, komanso kukhazikika kwake, makamaka koyenera kukonza zinthu zolimba komanso zofooka monga silicon carbide (SiC).

Zotsatirazi ndi chiyambi chatsatanetsatane cha mfundo yake yogwirira ntchito, ntchito zake zazikulu, zofunikira, ndi mtengo wake pamsika.

Mfundo Yogwirira Ntchito: Kugwirizana Kwapakati Pawiri kwa Kuchita Bwino ndi Kulondola

DFG8541 imagwiritsa ntchito kapangidwe ka "kawiri-kawiri, katatu-kapu koyamwa".

Gawo Loyera la Ntchito: Chopondera chimodzi chimakhala ndi gudumu lophwanyika kuti chichotse mwachangu zinthu zazikulu kumbuyo kwa chopondera; chopondera china chimakhala ndi gudumu lophwanyika bwino kuti chimalize bwino pamwamba pake, zomwe zimapangitsa kuti pakhale zotsatira zosalala, zathyathyathya, komanso zopanda kuwonongeka.

Njira Yogwira Ntchito Kwambiri: Wafer imayikidwa patebulo logwirira ntchito. Kudzera mu kukonzekera bwino kwa njira, njira yogwirira ntchito yokhazikika ya "kulumikiza kamodzi kokha, kupitilizabe" imatheka, kupewa zoopsa za kuipitsidwa ndi kuwonongeka komwe kumachitika chifukwa chosuntha zinthu pakati pa zipangizo zosiyanasiyana.

Ntchito ndi Maudindo: Kupitirira Silicon

Monga chipangizo chogwiritsidwa ntchito nthawi zonse, chimagwira ntchito yofunika kwambiri m'munda wa semiconductor wa m'badwo wachitatu.

Ntchito Yaikulu: Kuchepetsa ma wafer ang'onoang'ono a mainchesi 8 (Si/SiC) kuti akhale ndi makulidwe oyenera, kuonetsetsa kuti makulidwe awo ndi ofanana bwino (TTV), ndikuchotsa zigawo zomwe zawonongeka pamwamba zomwe zachitika kale.

Emerging Mainstay: Posankha spindle yokhala ndi torque yayitali, DFG8541 imatha kukonza zinthu zolimba kwambiri monga SiC. Ichi ndiye chifukwa chachikulu chomwe imakondedwa kwambiri pamsika wamagetsi amagetsi omwe alipo.

Chidule cha Magawo Ofunika

Gulu la Ma Parameter | Mafotokozedwe Apadera

Zogwirira Ntchito Zogwiritsidwa Ntchito: Φ8 mainchesi (200mm) ndi pansi; zimagwirizana ndi ma wafer a Φ4, 5, 6, ndi 8-inch pogwiritsa ntchito chuck ya universal

Njira Yopera: Kupera kozungulira kwa nthawi yayitali mkati mwa chakudya

Kapangidwe ka Spindle: Ma spindle awiri (ma axes awiri), spindle yonyamula mpweya ya hydrostatic (yokhazikika)

Liwiro la spindle: 1,000 - 7,000 rpm

Mphamvu ya Spindle: Standard 4.2 kW

Makonzedwe a Ntchito: Matebulo atatu ogwirira ntchito (matebulo atatu a chuck)

Zofotokozera za Wheel Yopukutira: Wheel yopukutira ya diamondi ya Φ200 mm

Miyeso ya Zipangizo (Kutalika x Kuchuluka x Kuchuluka): Pafupifupi 1,100 × 2,800 × 1,800 mm

Kulemera kwa Zipangizo: Pafupifupi 3,000 kg

Ntchito ndi Makhalidwe Ofunika

DFG8541 ikuyimira kukweza kwakukulu kuchokera ku DFG8540.

Makhalidwe/Ntchito Kufotokozera Kwatsatanetsatane

Kuyeretsera Kwabwino Kwambiri: Ma nozzle amadzimadzi awiri okhala ndi malo ambiri: Poyerekeza ndi kuyeretsa kwachikhalidwe kwa madzi ampweya, izi zimachotsa mwamphamvu tinthu tating'onoting'ono ta fumbi tomwe timamatira ku wafer mutapera. Ukadaulo uwu umagwiritsidwa ntchito kwambiri m'malo ogwirira ntchito monga makapu okoka ndi zinthu zina, zomwe zimathandiza kuchepetsa chiopsezo cha kusweka kwa wafer woonda.

Kugwirizanitsa Kosakhudzana: Imagwiritsa ntchito kamera kuti ipeze malo olumikizirana, kusintha kukhudzana kwakuthupi ndikuchotsa mikwingwirima kapena kuwonongeka kwa m'mphepete panthawi yolumikizirana.

Kupanga Mwanzeru: Chinsinsi cha Pa Wafer: Chimalola ma wafer osiyanasiyana mkati mwa kaseti imodzi ya wafer kuti azikonzedwa okha malinga ndi maphikidwe awo okonzedweratu (kukhuthala, liwiro, ndi zina zotero), zomwe zimagwirizana bwino ndi kupanga kwamitundu yosiyanasiyana, kochepa.

Ntchito Zoteteza Ma Wafer: Zimaphatikiza njira zosiyanasiyana zotetezera, kuphatikizapo kujambula ma wafer (anti-misalignment/empty wafer), kuyang'anira makulidwe asanayambe (anti-double tape), ndi vacuum holding (alamu yodzidzimutsa yamagetsi), kuonetsetsa kuti ma wafers okwera mtengo kwambiri ndi otetezeka.

Kukonza Kupindika Kosinthika ndi Magetsi: Kupindika kwa chikho chokokera kumatha kusinthidwa ndi magetsi pogwiritsa ntchito ma values ​​omwe ali pazenera, kukonza mawonekedwe ake ndikuchepetsa nthawi yogwira ntchito pamanja kuti ikonzedwe.

Kugwiritsa Ntchito Kowonjezereka Kwambiri: Chithunzi Chokulungira cha mainchesi 19: Poyerekeza ndi chophimba cha mainchesi 15 cha DFG8540, chiwonetserochi sichimangokhala chachikulu komanso chili ndi mawonekedwe osavuta kugwiritsa ntchito.

Kukonza Bwino: Kapangidwe koyeretsa mkati mwa nyumba kamapangitsa kuti kukonza kukhale kosavuta.

Kusunga Mphamvu ndi Kapangidwe Kakang'ono: Spindle yatsopano ya mpweya imachepetsa kugwiritsa ntchito mpweya ndi 50%; kapangidwe ka pampu ya vacuum yomwe ili mkati mwake imachepetsa malo ake ndi 15% poyerekeza ndi yomwe idagwiritsidwa ntchito kale, zomwe zimapangitsa kuti zinthu zisunge ndalama zambiri pazida ndi ntchito.

Kuyika Mtengo ndi Kuyika Msika: Poyerekeza ndi DGP8761 yodziwika bwino yomwe imayang'ana msika wa mainchesi 12, DFG8541 imayang'ana kwambiri pamsika wa mainchesi 8, zomwe zimapangitsa kuti ikhale makina odziwika bwino "ogwira ntchito bwino komanso osawononga ndalama zambiri":

Kuyika Magwiridwe Antchito: DFG8541 ndiye muyezo wa magwiridwe antchito a makina opukusira a mainchesi 8. Mwa kusankha spindle yokhala ndi mphamvu zambiri, imapambana bwino zovuta zochepetsera zovuta za zipangizo zolimba komanso zofooka monga SiC, zomwe zimapangitsa kuti ikhale yabwino kwambiri pamsika wa mainchesi 8.

Mtengo Wogulira: Monga kukweza kokhazikika kukhala nsanja yokhwima, ndi yodalirika pankhani yogwira ntchito yokhazikika kwa nthawi yayitali komanso kutulutsa kosalekeza, zomwe zimapangitsa kuti ikhale chisankho chogwira ntchito bwino, chopanda chiopsezo, komanso chodalirika cha ndalama zopangira zida za mainchesi 8. Mayunivesite apamwamba akunyumba (monga Xi'an Jiaotong University) agula kale zida izi kuti zifufuzidwe kwambiri.

Zofunikira pa Kukonza ndi Kuyika: Kuti muwonetsetse kuti DFG8541 ikugwira ntchito bwino komanso mokhazikika kwa nthawi yayitali, kutsatira kwambiri zofunikira za DISCO pa malo oyika ndikofunikira:

Ukhondo wa Malo Ozungulira: Iyenera kuyikidwa m'chipinda choyera kwambiri. Kutentha kwa malo ozungulira kuyenera kukhala kokhazikika pa 20-25℃, ndipo kusinthasintha kwa kutentha kuyenera kuyendetsedwa mkati mwa ±1℃. Chinyezi nthawi zambiri chimayenera kukhala pansi pa 55%.

Magetsi:

Mpweya Wopanikizika: Mpweya wopanikizika woyera, wouma, komanso wopanda mafuta komanso woyera kwambiri umafunika pa mphamvu ya 0.5 MPa kapena kupitirira apo.

Magetsi: Pakufunika magetsi a magawo atatu ofanana ndi zomwe zida zimafunikira.

Madzi Oziziritsa: Madzi osungunuka (madzi a DI) okhala ndi kayendedwe kokhazikika komanso kutentha kosasinthasintha amafunika kuti kuziziritsa kwa spindle kuziziritse. Kutentha kwa madzi kuyenera kufanana ndi kutentha kwa chipinda ndi kutentha kochepa.

Kuyang'ana ndikusintha mawilo opukutira nthawi zonse, kutsuka ma vacuum chucks, ndi kusamalira spindle ya mpweya ndikofunikira kwambiri kuti zida zizikhala nthawi yayitali komanso kuonetsetsa kuti ntchito yokonza zinthu ikuyenda bwino.

Mwachidule, DISCO DFG8541 ndi njira yodalirika komanso yokhwima yochepetsera ma wafer ya mainchesi 8. Imakwaniritsa magwiridwe antchito otsogola m'magawo ake ofunikira ndipo imakonzedwa bwino kuti igwiritsidwe ntchito paokha, ikhale yoyera, komanso yosavuta kugwiritsa ntchito kuti ikwaniritse zosowa za opanga amakono.