Choyikapo cha wafer cha semiconductor cha Nitto DR3000III

Iyi ndi njira yofotokozera mwatsatanetsatane za NEL SYSTEM™ DR3000III yochokera ku Nitto Denko. Ndi makina odziyimira pawokha oteteza tepi ya wafer omwe amagwira ntchito yofunika kwambiri popanga semiconductor.

Kapangidwe ka Core ndi Mafotokozedwe Aukadaulo

Mafotokozedwe akuluakulu aukadaulo a DR3000III ndi awa:

Zofotokozera za Chinthu/Magawo

Mtundu wa Zida: Chojambulira tepi chodzitetezera chokha cha ma wafer a 300mm

Kukula kwa Wafer Koyenera: 300mm (mainchesi 12) / 200mm (mainchesi 8)

Makulidwe Oyenera a Wafer: 400μm kapena okhuthala

Kuchuluka kwa ma wafers: 68 pa ola limodzi

Ukadaulo Wogwiritsa Ntchito Tepi: Njira yolumikizirana yogwiritsira ntchito yopanda kupsinjika

Miyezo Yogwirizana: Imakwaniritsa chizindikiro cha CE ndi zofunikira za SEMI S2/S8

Dziwani: Zomwe zili pamwambapa zitha kusintha kutengera wafer, tepi, ndi zina, ndipo zitha kuphatikizapo zinthu zina zomwe mungasankhe.

Zofunika Kwambiri ndi Ubwino

Mbali zamphamvu za DR3000III zimasiyanitsa izi ndi zina mwa zinthu zomwe zimapangidwa molondola:

Ukadaulo Wogwiritsa Ntchito Wopanda Kupsinjika: Uwu ndi umodzi mwa ubwino wake waukulu waukadaulo. Kuchepetsa kupsinjika kwa tepi musanagwiritse ntchito lamination kumawongolera bwino kupotoza kwa wafer pambuyo popera kumbuyo, zomwe ndizofunikira kwambiri pogwira ma wafer akuluakulu komanso owonda kwambiri.

Kuwongolera kuuma kwa lamination kotsika: Zipangizozi zimakhala ndi kuuma kwa lamination kotsika komanso kuuma kwa lamination, zomwe zimachepetsa kwambiri chiopsezo cha kuwonongeka kwa mawonekedwe a wafer panthawi ya kuuma.

Kugwirizana kwa Wafer: Ngakhale kuti idapangidwira ma wafer a 300mm, imagwirizana ndi ma wafer a 200mm kumbuyo ndipo imathandizira njira zapadera zokhala ndi zinthu zina monga tebulo lotenthetsera (Max 100°C) ndi ma heated rollers (Max 60°C). Kuphatikiza apo, imasamalira bwino ma wafers ndi ma wafers omwe ali ndi bumped ndi warpage inayake.

Makina odzichitira okha komanso anzeru kwambiri: Zipangizozi zili ndi:

Kusamalira zinthu zokha: Kumathandizira makaseti otsegulira kutsogolo (FOUP) / makaseti otseguka, okhala ndi mkono wa robotic womangidwa mkati kuti uzitha kunyamula ndi kutsitsa zinthu zokha.

Kulinganiza bwino: Kumagwiritsa ntchito njira yolumikizira ya CCD yosakhudzana ndi kukhudzana kuti zitsimikizire kulondola kwa lamination.

Kuwunika Mwanzeru: Ili ndi ntchito yowunikira deta ya log kuti itsatire deta; kuzindikira kutsika kwa tepi kumateteza ku mavuto. Chojambulira cha wafer chomwe chingagwiritsidwe ntchito chimathandiza kuyang'ana zinthu zomwe zikubwera zokha.

Zikugwirizana ndi Miyezo Yapamwamba ya Makampani: Zipangizozi zikutsatira miyezo ya chitetezo ndi chilengedwe ya SEMI S2/S8 ndipo zimapezeka ndi njira zolumikizirana za SECS/GEM zomwe mungasankhe kuti zigwirizane bwino ndi machitidwe amakono oyendetsera mafakitale a semiconductor.

Kugwiritsa Ntchito Kosavuta: Chophimba chachikulu cholumikizira ndi ntchito yophikira chimapangitsa kuti ntchito ikhale yosavuta komanso yosavuta kugwiritsa ntchito. Ogwiritsa ntchito amangofunika kuyimbira njira yophikira kuti amalize zokha makonda onse a parameter.

Mfundo Yogwirira Ntchito: Musanayambe kupukuta kumbuyo, DR3000III imamatira tepi yoteteza mbali yokonzedwa ya wafer pogwiritsa ntchito njira yopanda kupsinjika kuti ipewe kuwonongeka kwa makina kapena kuipitsidwa ndi mankhwala kumbali yakutsogolo ya wafer panthawi yopukuta mofulumira kwambiri.

Malo Ogwiritsira Ntchito: DR3000III imagwiritsidwa ntchito makamaka m'magawo ofunikira awa:

Kupanga Ma Semiconductor: Ma chips a Logic ndi ma memory chips (DRAM, NAND Flash, ndi zina zotero): Kuteteza kapangidwe ka dera lofewa kutsogolo kwa wafer mu njira zamakono. Kupaka Kwapamwamba: Kumapereka chitetezo cha wafer panthawi yopaka ma wafer a 300mm (Fan-In WLP, Fan-Out WLP, ndi zina zotero).

MEMS ndi Masensa: Amateteza kapangidwe ka micromechanical ndi malo a masensa panthawi yochepetsera kumbuyo.

Zipangizo Zopangira Mphamvu: Zimapanga ma wafer a zipangizo zamagetsi monga ma IGBT ndi ma MOSFET, kuchepetsa kukana kwa kutentha komanso kukonza kutentha komwe kumataya chifukwa cha kuonda.

Mgwirizano ndi Zida Zina: Pa mizere yopangira ya semiconductor, DR3000III nthawi zambiri imagwira ntchito limodzi ndi zida zotsatirazi:

Kugwirizana ndi Zida Zogwiritsira Ntchito Filimu: Kumagwira ntchito limodzi ndi zida zochotsera tepi za Nitto NEL-MA3000-III musanayambe komanso mutamaliza njira yochepetsera. DR3000III imayika tepi yoteteza poyamba kuti iteteze wafer kuti isawonongeke panthawi yochepetsera; pambuyo pochepetsera, NEL-MA3000-III imachotsa tepi yotetezayo molondola, kuonetsetsa kuti wafer woonda kwambiri ndi wotetezeka panthawi yonseyi.

Kugwirizana ndi Zipangizo Zopukutira: Kugwira ntchito limodzi ndi makina opukutira ngati njira yotetezera. Ma wafer akapakidwa ndi mafilimu oteteza ndi DR3000III, amalowetsedwa mu makina opukutira kuti achepetse kumbuyo, ndikutsimikizira kuti njira yopukutira ndi yotetezeka.

Ponseponse, Nitto DR3000III ndi njira yodzitetezera ya wafer yapadera kwambiri, yodziyimira yokha, komanso yogwira ntchito bwino kwambiri. Kudzera muukadaulo wake wopanda kupsinjika kwa filimu, imathetsa mavuto omwe amakumana nawo pakupotoza ndi kupotoza ma wafer akuluakulu panthawi yochepetsa kumbuyo. Imagwira ntchito yofunika kwambiri mumakampani opanga ma semiconductor, imagwira ntchito ngati chida chofunikira kwambiri pakuwonetsetsa kuti kupanga ma chip apamwamba kukuyenda bwino komanso kudalirika. Kuti mudziwe zambiri kapena mafunso aukadaulo, chonde funsani oimira boma a Nitto kapena ogulitsa ovomerezeka ku China mwachindunji.