Isukura plasma ya Nordson WERURWE AP-600

Nordson MARCH AP-600 ni sisitemu isanzwe yo gutunganya plasma ikoresha umwuka uvamo umwuka. Izwiho kuba yizewe cyane kandi yoroshye kuyikoresha, iyi sisitemu igira uruhare runini mu nzego zitandukanye, harimo inganda zikora ibikoresho bya semiconductor, microelectronics, n'ikorwa ry'ibikoresho by'ubuvuzi.

**Ibisobanuro by'ingenzi bya tekiniki**

Ibi bikurikira ni ibipimo by'ingenzi bya tekiniki bya AP-600, byagenewe kuguha incamake y'imikorere yayo y'ingenzi n'ubushobozi bwayo mu mikorere.

**Ikintu gisobanuwe** | **Ikimenyetso cyihariye**

**Ubwoko bw'ibikoresho** | Benchtop, Sisitemu yo gutunganya plasma ikoresha ikoranabuhanga ryikora ku buryo bwikora

**Ingano (Ubugari × Ubwiza × Ubwiza)** | 569 × 869 × 704 mm

**Uburemere bwuzuye** | 221 kg (ibiro 487)

**Ibikoresho byo mu cyumba** | Ibikoresho bya aluminiyumu n'ibya aluminiyumu byiza cyane

**Ubunini bw'icyumba** | Litiro 50.4

**Umuyoboro w'amashanyarazi wa RF** | Ibisanzwe: 600W @ 13.56 MHz (Ifite umuyoboro uhuza impedance wikora)

**Imiterere ya Electrode** | Ifasha amashanyarazi agera kuri 7 ashobora guhindurwa, ashobora guhindurwa mu mwanya (Ifasha uburyo bwa Plasma buziguye n'ubutambitse)

**Kugenzura Gazi** | Ibisanzwe: Imiyoboro 2; Ishobora gushyirwaho hamwe n'ibikoresho bigenzura ubwinshi bw'amazi (MFCs) bigera kuri 4

**Sisitemu yo Kugenzura** | Igenzura rya PLC + Interface ya Touchscreen y'abantu n'imashini (HMI); Ishyigikira Igenzura ry'Imikorere mu Gihe Nyacyo no Gukurikirana Amakuru

**Ibiranga by'ingenzi n'inyungu**

Imikorere idasanzwe ya AP-600 ikomoka ku bintu by'ingenzi bikurikira:

**Uburyo bwo Gutunganya Ingano Ikomeye:** Intego y'ibanze ya AP-600 ni ukugera ku musaruro "uhwanye cyane" wo gusukura no gutunganya plasma. Iyi ntego igerwaho binyuze mu guhuza neza umuriro wayo wa 13.56 MHz RF n'umuyoboro uhuza impedance wikora, bigatuma habaho ibisubizo bisubirwamo cyane muri buri gikorwa.

**Uburyo bwo Gutunganya Buhindagurika kandi Bukoresha Uburyo Butandukanye:** Imiterere y'agasanduku k'ibikoresho byoroshye muri sisitemu ishyigikira uburyo butatu butandukanye bwo gushyiraho electrode: Ikoresha imbaraga zijya hasi, Ikoresha imbaraga zijya hasi, n'Ikoresha imbaraga zijya hasi. **Uburyo bwa Plasma Butaziguye:** Ikoresha izoni zifite ingufu nyinshi kugira ngo icyarimwe ikore ibikorwa byo gusasa no gukora ibisasu ku buso bw'icyitegererezo; ni amahitamo meza yo gukoresha mu gukora ubuso no gusukura cyane. **Uburyo bwa Plasma bwo mu gice cya kure (cya kure):** Ishyira icyitegererezo ku ntera runaka uvuye ku isoko ya plasma, ikagishyira gusa ku binyabutabire bimara igihe kirekire. Uburyo bwo gusukura muri ubu buryo ni bworoshye, bigatuma kiba cyiza cyane mu gutunganya ibikoresho bigezweho bishobora kwangirika cyangwa bishobora kwangirika hakoreshejwe amashanyarazi (ESD). **Imikorere yoroshye kandi yizewe:** Ifite uburyo bworoshye bwo gukoresha mu buryo bworoshye, butanga uburyo bwo kwerekana ibipimo by'imikorere n'amakuru ajyanye n'imiterere y'ibikoresho. Urugi rw'umutekano rwubatswemo hamwe n'igishushanyo mbonera cy'aho ibintu bikurwaho bitanga umutekano mu mikorere mu gihe cyoroshye kubungabunga no gukora ibikorwa by'imbere.

**Guhuza Gazi mu buryo bwagutse:** Ishyigikira ubwoko bwinshi bw'imyuka ikoreshwa mu buryo bwagutse, harimo Argon (Ar), Oxygen (O₂), Hydrogen (H₂), Helium (He), na gaze irimo fluorine (urugero, CF₄).

**Imiyoboro y'Ibikorwa Yoroshye:** Itanga uburyo bworoshye bwo gukoresha kugira ngo ihuze n'ibikenewe bitandukanye, nko gupima no kugenzura buri gihe.

**Imiterere y'Uburyo Burambuye bwo Gukoresha**

Hashingiwe ku bintu byavuzwe haruguru, sisitemu ya AP-600 ikoreshwa cyane mu nzego nyinshi:

**Akazu ko Gukoresha** | **Ingero Zihariye zo Gukoresha**

**Gukora Semiconductor na Microelectronics** | - **Die Attach Mbere yo kuvurwa:** Yongera uburyo die ifatana.

- **Guhuza insinga mbere yo kuvura:** Byongera imbaraga zo guhuza.

- **Gutegura mbere yo kubikora:** Bigabanya gutandukana kw'ibipaki.

- **Flip-Chip Underfill Mbere yo kuvura:** Yongera umuvuduko w'amazi anyura munsi y'amazi, igabanya imyanda, kandi ikongera gufatana.

- **Gukuraho Photoresist / Descum:** Gukuraho ibisigazwa bisigaye nyuma yo gukata.

- **Gukuraho ibintu bitandukanye byanduye:** urugero, ibintu byanduye by’umwimerere, amavuta, umukungugu, okiside, n’ibisigazwa bya nanoparticle. **Ubuvuzi n’Ubumenyi bw’Ubuzima** | - Gusukura no gufatanya ibikoresho by’ubuvuzi nka stent na catheters mbere yo gufatanya; gutuma ibintu bitandukanye bifatanya n’ibindi bigorana gufatanya; kugabanya ubukana bw’ibice bya silikoni byakozwe mu inshinge.

- Gutunganya ubuso bw'ibinyabutabire n'ibikoresho bya microfluidic.

**Izindi Nganda Zigezweho** | - **Gukora PCB:** Gukuraho ibisigazwa by'ubuso no gukoresha ubuso kugira ngo hongerwe icyizere cy'ibikorwa bikurikira byo gusiga.

- **Ubuhanga mu by'ikoranabuhanga no gupakira mu buryo bugezweho:** Kunoza ubushobozi bwo gutonyanga ku buso mbere y'intambwe zitandukanye zo gupakira, bityo bikanongera imikorere myiza yo gushyiramo no kuzuza ibikoresho.

**Ihame ry'imikorere**

Gusukura plasma ahanini bikubiyemo ubwoko bubiri bw'imikorere: physique na chemical.

**Ibikorwa by'umubiri:** Iyoni zifite ingufu nyinshi ziva mu myuka idakora—nka Argon (Ar)—zikoreshwa mu "gutera" hejuru y'ubutaka, bigakuraho neza imyanda ifata.

**Ibikorwa bya Chimique:** Ogisijeni (O₂) cyangwa imyuka irimo fluorine irashyirwa; radicals yigenga iri muri plasma ivamo ikorana n'ibintu bikomoka ku bimera ku buso kugira ngo ikore ibintu bivamo imyuka, hanyuma ikavanwamo n'ipompo ikoresha amashanyarazi.

Uburyo bubiri bw'imikorere bwa AP-600 bwagenewe guhuza ubu buryo bubiri, bukozwe mu buryo bwihariye kugira ngo buhuze n'ibisabwa mu buryo runaka.

**Ubufatanye mu by'ibidukikije**

Mu murongo wuzuye w’ibikorwa, AP-600 ikunze gukorana n’ibikoresho biyikikije:

**Hamwe n'ibindi bikoresho bya Nordson:** Mu miyoboro ya SMT cyangwa ipakiye, AP-600 ishobora gukorana na sisitemu zo gusiga/gusiga za Nordson za ASYMTEK cyangwa valve zo gusiga zikora neza cyane za EFD. Igikorwa gitangirana no gusukura plasma kugira ngo hakoreshwe ubuso no kongera ingufu z'ubuso, hagakurikiraho gutanga neza kugira ngo amaherezo haboneke umusaruro mwiza wo guhuza cyangwa gusiga.

**Hamwe n'ibindi bikoresho byo gutunganya:** Mu mikorere y'inganda za IC, AP-600 ikunze gukoreshwa hamwe n'ibikoresho nka sisitemu za lithography, imashini zitera ion, plasma etchers, mikorosikopi za electron scanning (SEM), na sisitemu zo gupima ibikoresho, bitanga ibidukikije byiza ku buso mu gihe cy'ibikorwa by'ingenzi.

**Incamake**

Muri make, Nordson MARCH AP-600 ni sisitemu yo gutunganya plasma yo ku meza ikoresha ubushakashatsi ihuza ubwiza bwo hejuru, ubworoherane budasanzwe, hamwe n'uburyo bworoshye bwo kugabanya ikiguzi. Ikemura neza ibisabwa bikomeye byo gusukura ubuso no gufata neza biboneka mu nzego nka semiconductors, microelectronics, n'ibikoresho by'ubuvuzi, bigatuma iba amahitamo meza yo gukora ubushakashatsi n'iterambere cyangwa gukora ibintu bito.