Nordson MARCH AP-300 plasma cleaner

Nordson MARCH AP-300 ni sisitemu nto kandi ihendutse ya plasma ikoresha amashanyarazi ya benchtop vacuum plasma. Imbaraga zayo z'ibanze zishingiye ku guhuza ingufu za 13.56 MHz RF n'umuyoboro uhuza impedance wikora, bigatuma itanga umusaruro udasanzwe, uhamye kandi uhuye mu gutunganya plasma mu buryo buciriritse.

**Ihame ry'imikorere**

AP-300 ikora ikoresheje pompe y'umwuka uvamo umwuka kugira ngo ijyane mu cyumba kirimo umwuka mwinshi, hanyuma imyuka yihariye ikoreshwe. Iyo ikoresheje ingufu za 13.56 MHz RF, iyo myuka ishyirwamo iyoni kugira ngo ikore plasma. Uduce dufite ingufu nyinshi n'ubwoko bukora imihindagurikire y'ikirere muri plasma bigira uruhare mu gutera ibisasu cyangwa gukora imikorere ya shimi ku buso bw'ibintu, bityo bigasukura ubuso, bigakoresha, cyangwa bigahindura imiterere y'ibintu.

**Imikorere y'ingenzi na Porogaramu**

Inshingano y'ibanze ya AP-300 ni ugutanga ibidukikije bya plasma bihamye kandi bishobora kugenzurwa. Irushaho kunoza ubwiza n'ubudahemuka bw'ibicuruzwa bya nyuma binyuze mu buryo butatu bw'ingenzi:

**Icyiciro cy'Imikorere** | **Uburyo bwo gushyira mu bikorwa n'Ingaruka**

**Gusukura plasma** | Bikuraho imyanda na okiside by’umwimerere ku buso bw’ibintu, bigatanga isuku ku rwego rwa atome.

**Gukora ku Buso** | Bwinjiza amatsinda y'imikorere y'impande zombi—nk'amatsinda ya hydroxyl na carboxyl—ku buso bw'ibikoresho, bityo byongera ingufu z'ubuso n'ubushobozi bwo gutoha kugira ngo byongere gufatana n'ibindi bikoresho.

**Gucukura / Gucukura** | Ikoresha imyuka irimo fluorine (urugero, CF₄) kugira ngo ikore icukura neza cyangwa isotropic ku gipimo cya micron cyangwa nanometer; ishobora gukuraho ibisigazwa bya photoresist muri wafers.

**Ibyiza by'ingenzi n'ibiranga**

Igishushanyo cya AP-300 gitanga uburinganire bwiza hagati y’imikorere n’ubworoherane mu mwanya muto. Ibiranga byayo by’ingenzi biravugwa hano hasi:

**Icyiciro** | **Ikintu cy'ingenzi** | **Ibisobanuro byihariye**

**Ibyiza** | **Uburyo bwo Gusubiramo no Kugaragara neza** | Imashini ikora RF ya 13.56 MHz, hamwe n'umuyoboro uhuza impedance wikora, ituma ibisubizo by'ibikorwa bisubiramo neza mu buryo budasanzwe.

**Imikorere Yoroshye kandi Yizewe** | Ifite sisitemu yo kugenzura ikoresha ecran ya PLC itanga uburyo bworoshye bwo kureba amashusho no gukurikirana ibikorwa mu buryo butunguranye; ubwubatswe buhamye, bw'icyuma cyose butanga umutekano urambye.

**Guhindagurika no Kwaguka** | Ishyigikira imiyoboro ya gazi igera kuri ine, ijyanye n'ibisabwa mu mikorere ya gazi nka O₂, Ar, H₂, He, na CF₄. **Ihendutse** | Itanga imikorere myiza kandi yoroshye ku giciro gito, bigatuma iba amahitamo meza ku bushakashatsi no guteza imbere ibikorwa by'ubushakashatsi n'iterambere ndetse n'umusaruro muto w'igerageza.

**Ibiranga by'ingenzi** | **Igishushanyo mbonera cya mudasobwa nto** | Ifite ubushobozi bwo kwiyinjizamo; isaba gusa guhuza pompe yo hanze kandi ikwira ku ntebe isanzwe ya laboratwari cyangwa ku ntebe yo gukoreramo.

**Imiterere y'Icyumba Ihindagurika** | Icyumba cyubatswe muri aluminiyumu iramba kandi gishobora kwakira amasahani 7 y'amashanyarazi ashobora gukurwaho kandi ashobora guhindurwa.

**Ishyigikira Uburyo Bunini bwo Gutunganya** | Ishyigikira uburyo bwa Plasma Igororotse (cyane cyane uburyo bwo guturika bufatika) na Plasma Inyura mu Buso (cyane cyane uburyo bwa radicals za shimi), itanga uburyo bworoshye bwo kuzuza ibisabwa bitandukanye byo gutunganya.

**Ibisobanuro birambuye**

**Icyiciro cya Parametero** | **Ibisobanuro byihariye**

**Ingano Rusange (Uburebure x Ubunini)** | 569 × 869 × 704 mm

**Uburemere bwuzuye** | 221 kg (ibiro 487)

**Ubunini bw'icyumba** | Litiro 33.1

**Umubare wa Electrode** | Kugeza kuri 7

**Intera y'amashanyarazi** | mm 25.4 (inchi 1)

**Ingufu zisanzwe za RF** | 300 W @ 13.56 MHz

**Gucunga Umuvuduko wa Gazi (MFC)** | 2 zirimo nk'ibisanzwe; zishobora kwaguka kugeza kuri 4

**Gaze Zihuye** | Ar, O₂, H₂, He, CF₄, n'ibindi.

**Ahantu hagari ho gukorerwamo**

AP-300 ifite uburyo bwinshi bwo kuyikoresha, ikagira uruhare runini—cyane cyane mu nzego z'ingenzi z'inganda zikurikira:

**Semiconductors & Microelectronics:** Ikoreshwa cyane mu gusukura mbere yo gukoresha icyuma gifunga, gukoresha insinga, no gushyiramo underfill; ndetse no mu gukora isuzuma rya post-lithography ririnda gusimburwa no kuvurwa na plasma mbere yo gupakira ku rwego rwa wafer.

**Amabati ya Circuit yacapwe n'Iteraniro rya elegitoroniki:** Ikuraho neza imyanda—nk'amazi asigaye—kandi yongera ubushobozi bwo kumena ku buso mbere y'uko ibikorwa nk'ipamba rishyirwa mu buryo bw'umwuka no kuzura utwuzu.

**Ubuvuzi n'Ubumenyi bw'Ubuzima:** Itanga imikorere myiza yo gusukura mu buryo bwo guhuza no mu gihe cyo gukora inyubako zigoye, nka microfluidic chips.

**Incamake**

Muri make, Nordson MARCH AP-300 ni sisitemu ya plasma yo kuri mudasobwa ihuza neza cyane ubuhanga mu bushakashatsi, uburyo bwo kwizerwa mu nganda, no koroshya imikorere. Agaciro kayo k'ingenzi ni ugushyiramo ubushobozi bukomeye mu gice gito, bigatuma iba amahitamo meza haba mu bushakashatsi no mu iterambere ndetse no mu bikorwa bito mu nzego za semiconductor, microelectronics, no mu buvuzi.