Imashini isukura plasma ya Panasonic PSX307

Panasonic PSX307 ni sisitemu yo gusukura plasma ikora mu buryo bwikora yagenewe substrates na wafers, yakozwe by'umwihariko kugira ngo ihuze n'ibikenewe cyane mu nganda zigezweho za semiconductor. Ikoresheje ikoranabuhanga rigezweho rya electrode parallel-plate, iyi sisitemu yongera umusaruro inshuro 1.5 mu gihe icyarimwe igenzura ireme ry'imikorere; itanga igisubizo cy'imikorere myiza cyagenewe gukemura ibibazo bikomeye byo gutunganya ubuso bihura nabyo mu rwego rwo gupakira ibintu bigezweho.

**Ihame ry'imikorere**

PSX307 ikoresha isoko y'ingufu ya Radio Frequency ya 13.56 MHz (RF) kugira ngo ikore umurima wa plasma uhuye binyuze mu buryo bwa electrode ya parallel-plate. Iyo imyuka ikoreshwa—nka argon—ishyizwemo iyoni, uduce duto tw'ingufu nyinshi tuvamo dukora isuku ya nanoscale no gukora ku buso binyuze mu guhuza kwa bombardment physique na chemical reactions. Ku bijyanye n'imikorere myiza no guhuza, iyi miterere itanga inyungu z'ibanze ugereranije na sisitemu za plasma zisanzwe zo mu bwoko bwa batch. **Ibintu by'ingenzi n'aho ibicuruzwa biherereye**

Uruhererekane rwa PSX307 rugizwe n'ubwoko butandukanye bw'ibipimo, byagenewe kuzuza ibisabwa bitandukanye by'imirongo itandukanye y'ibipimo. Igereranya ry'ibintu by'ingenzi kuri buri gipimo riratangwa hano hepfo:

**Ikiranga** | **Ubwoko bwa S** | **Ubwoko bwa M** | **PSX307A**

**Ishyirwa ry'ibikoresho** | Bikwiriye ibikoresho bito kugeza ku binini | Bikwiriye ibikoresho biciriritse kugeza ku binini | Bikwiriye gupakira mu buryo bwa Wafer (WLP)

**Intego yo gutunganya** | Ibice bito (urugero, PCB) | Ibice bito (urugero, PCB) | Ibice bito bito kugeza kuri mm 300 (harimo cyangwa nta bicuri)

**Ingano y'ibice** | L 50 x Ubwinshi 20 kugeza L 250 x Ubwinshi 75 mm | L 50 x Ubwinshi 20 kugeza L 330 x Ubwinshi 120 mm | Ishobora gutunganya icyarimwe ibice bine bifite ubugari bwa mm 77.5

**Ingano zo hanze (harimo n'iy'imodoka itwara ibinyabiziga)** | W 2113 × D 1100 × H 1450 mm | W 2266 × D 1100 × H 1450 mm | Reba urupapuro rw'ibisobanuro bya tekiniki kugira ngo umenye ibisobanuro birambuye

**Uburemere bw'ibikoresho** | Hafi 850 kg | Hafi 725 kg | -

**Ubunini bwa substrate** | 0.5 mm kugeza 2.0 mm (ku buryo bwo kwifashisha gusa) | 0.5 mm kugeza 2.0 mm | -

**Ibisobanuro birambuye (PSX307 Base Model)**

**Icyiciro cya Parametero** | **Ibisobanuro birambuye**

**Icyitegererezo cy'ibikoresho** | NM-EFP1A

**Uburyo bwo gusukura** | Gukoresha RF mu buryo bwa parallel-plate

**Gazi yo Gusohora** | Argon (Ar) [Ogisijeni (O₂) ni ngombwa]

**Ingano zo hanze (Igice cy'ingenzi)** | Ubugari 930 × D 1100 × H 1450 mm

**Uburemere bw'ibikoresho (Igice cy'ingenzi)** | Hafi 555 kg

**Ibisobanuro by'Umuyoboro w'Ingufu** | AC ifite icyerekezo kimwe 200 V, 2.00 kVA (Umubare munini 5.00 kVA)

**Ibisabwa ku itangwa rya gazi** | 0.49 MPa ... cyangwa hejuru yayo; 6.5 L/umunota (ANR)

**Imirimo y'ingenzi n'ibiranga tekiniki**

PSX307, irangwa n'urwego rwo hejuru rw'imikorere n'ubuhanga, igaragaza ubuhanga bwayo mu bya tekiniki binyuze cyane cyane mu ngingo zikurikira:

**Kuringaniza Imiterere y'Icyumba Kugereranya Ubumwe n'Igipimo cy'Uburyo bwo Gutunganya:** Bituma buri cyiciro cyo gutunganya gitanga umusaruro uhoraho wo gushushanya—ikintu cy'ingenzi kugira ngo inzira ikomeze kandi irusheho kuba nziza.

**Imikorere yo Gukurikirana Amaraso y'Ubwishingizi bwa Panasonic:** Gukurikirana no gukumira ibibazo byo gusohora amaraso mu buryo bwihuse kugira ngo hirindwe ko habaho kwangirika kw'amaraso akoresha amashanyarazi (ESD), bityo bigatuma ibicuruzwa "bitunganywa nta kwangirika" bitunganywa.

**Imikorere yo Gukurikirana:** Itanga ubushobozi bwo gukurikirana amakuru mu buryo bwuzuye mu gikorwa cyo kuyakora, ihuye n'ibisabwa mu kugenzura ubuziranenge bw'urwego rw'inganda zikora ibikoresho bya semiconductor.

**Gutwara abantu mu buryo bwikora kandi bwikora:** Ishyigikira imiterere y'ibikoresho byo gushyiramo ibikoresho (loader/downloader) hamwe n'ibipimo byabyo mu buryo bwikora, bigatuma habaho guhuza mu buryo butaziguye imiyoboro y'ibikoresho byikora (automated lines) hatabayeho gukoresha intoki.

**Ibyiza by'ingenzi n'amashami yo gukoresha**

Ikoresheje ikoranabuhanga ry'ingenzi ryavuzwe haruguru, PSX307 igaragaza inyungu zikomeye mu kongera ireme ry'umusaruro no kugabanya ikiguzi, cyane cyane muri ibi bikurikira:

**Gukoresha ikoranabuhanga rya Argon (Ar) mu gutunganya plasma kugira ngo ikureho ibintu bya nikeli biri hejuru, bituma habaho uburyo bwo gushyiramo "Flash Gold" buhendutse. Muri icyo gihe, bigabanya ibibazo nko gutandukanya, gupfuka, no kwangirika bishobora kuvuka mu gihe cyo gupakira. **Kunoza imikorere myiza:** Kubera imiterere yabyo ihujwe na sisitemu yo gutwara ibintu yikora, ibikoresho bigira umuvuduko wo gutunganya ibintu bigera kuri 360 ku isaha—bigaragaza ko imikorere y’ibikoresho izamukaho 50% ugereranije n’ibikoresho bisanzwe.

Guhindura ubuso kugira ngo buhuze n'ibisabwa mu buryo butandukanye:

**Kurushaho Guhuza Icyuma:** Mbere yo guhuza insinga cyangwa guteranya uduce duto, gukuraho imyanda y’umwimerere byongera imbaraga zo gukata no kwizerana.

**Gufata neza Resin:** Guhindura ubuso hakoreshejwe plasma ya ogisijeni (O₂) bikubye kabiri imbaraga zo gufatana kw'ibintu bya epoxy molding n'ibikoresho byo kuzura, bikarinda gutandukana kw'ibintu.

**Inzira nziza zo gusohora amazi mu miyoboro y'amaraso:** Inoza imiterere y'imiyoboro y'amaraso mu miyoboro y'amaraso, igabanya igihe cyo gusohora amazi mu miyoboro y'amaraso ku kigero kirenga 40%—akamaro k'agaciro cyane cyane ku tunyangingo tunini n'utwo dufite ubucucike bwinshi bwa I/O.

**Ibice by'ingenzi byo Gukoresha**

Kubera ubushobozi bwayo bwo gukora neza, PSX307 ikoreshwa cyane mu bikorwa byo gukora semiconductor byo ku rwego rwo hejuru:

**Gupfunyika ku rwego rwa Wafer:** Guhindura ubuso bwa Wafer mbere yo gupfunyika; gusukura uduce twa solder mbere yo gupfunyika; no gukuraho ibisigazwa (gukuraho ifu) mu nyubako za TSV (Through-Silicon Via).

**Gupakira mu buryo bugezweho:** Gusukura no gukoresha ubuso bwa PCB mbere yo gufatanya insinga, kuzishyira munsi yazo, no kuzishyiraho.

**Inzira n'Ibikoresho byihariye:** Gukuraho ibisigazwa bya resin mu dupfundikizo twa wafer solder; kunoza ubushobozi bwo gusoda kw'ibice bya zahabu bihendutse; n'ibindi bisa nabyo.

**Ibikoresho by'inyongera**

Nk'igice cy'ingenzi cya Panasonic mu gutanga ibisubizo bya semiconductor, PSX307 isanzwe ikorana na Panasonic's high-precision MD-P series flip-chip bonders. Ubu buryo butuma habaho impinduka nziza kuva ku gusukura kugera ku gushyira ibintu mu mwanya wabyo, bigatuma habaho iterambere rikomeye mu buryo rusange bwo kwizera ibicuruzwa.

**Incamake**

Mu gusoza, Panasonic PSX307 ni sisitemu yo gusukura plasma iteye imbere mu ikoranabuhanga yagenewe umwihariko mu bikorwa byinshi. Binyuze mu guhuza ikoranabuhanga rigezweho rya parallel-plate hamwe na sisitemu yo kugenzura yihariye, igera ku ntera ikomeye mu musaruro no kugabanya neza ikiguzi cyo gukora, byose hamwe bigamije inzira idasenya kandi ifite imiterere imwe idasanzwe. Ku bikorwa birimo substrates nini cyangwa wafers za 300mm—kandi aho ibikorwa by'ingenzi nko guhuza insinga no kuzuza ibisabwa ku rwego rwo hejuru bisaba urwego rwo hejuru rwo kwizerwa—PSX307 igaragara nk'igisubizo gikwiye kwitabwaho cyane.