Makina oyeretsera plasma a Panasonic PSX307

Panasonic PSX307 ndi njira yodziyeretsera ya plasma yokhazikika yokha yopangidwira ma substrates ndi ma wafers, yopangidwa makamaka kuti ikwaniritse zofunikira kwambiri za opanga ma semiconductor amakono. Pogwiritsa ntchito ukadaulo wamakono wa electrode wa parallel-plate, dongosololi limawonjezera mphamvu yopangira ndi nthawi 1.5 pomwe nthawi yomweyo likuwonetsetsa kuti njirayo ndi yabwino; limapereka yankho labwino kwambiri lopangidwira kuthana ndi mavuto ovuta kwambiri okhudzana ndi kukonza pamwamba omwe amakumana nawo pantchito yokonza ma phukusi apamwamba.

**Mfundo Yogwirira Ntchito**

PSX307 imagwiritsa ntchito mphamvu ya 13.56 MHz Radio Frequency (RF) kuti ipange munda wa plasma wofanana kudzera mu kapangidwe ka electrode yofanana. Pamene mpweya wa process—monga argon—umasinthidwa kukhala ionized, tinthu tamphamvu kwambiri tomwe timatuluka timayeretsa ndi kuyambitsa pamwamba kudzera mu mgwirizano wa bombardment ndi chemical reactions. Ponena za magwiridwe antchito komanso kufanana, kapangidwe kameneka kamapereka ubwino waukulu kuposa machitidwe achikhalidwe a plasma. **Ma Modeli Ofunika ndi Malo Ogulitsira**

Mndandanda wa PSX307 uli ndi mitundu yosiyanasiyana, yopangidwa kuti ikwaniritse zofunikira zosiyanasiyana za mizere yosiyanasiyana yopanga. Kuyerekeza kwa zinthu zazikulu za mtundu uliwonse kwaperekedwa pansipa:

**Mbali** | **Mtundu wa S** | **Mtundu wa M** | **PSX307A**

**Kuyika Zipangizo** | Yoyenera ma substrate ang'onoang'ono mpaka apakatikati | Yoyenera ma substrate apakati mpaka akuluakulu | Yoyenera Ma Wafer-Level Packaging (WLP)

**Cholinga Chokonzera** | Ma Substrate (monga, PCBs) | Ma Substrate (monga, PCBs) | Ma Wafers mpaka 300 mm (okhala ndi mafelemu kapena opanda)

**Kukula kwa Substrate** | L 50 x W 20 mpaka L 250 x W 75 mm | L 50 x W 20 mpaka L 330 x W 120 mm | Imatha kukonza zinthu zinayi nthawi imodzi zokhala ndi m'lifupi wa 77.5 mm

**Miyeso Yakunja (kuphatikiza Conveyor)** | W 2113 × D 1100 × H 1450 mm | W 2266 × D 1100 × H 1450 mm | Chonde onani pepala la ukadaulo kuti mudziwe zambiri

**Kulemera kwa Zipangizo** | Pafupifupi 850 kg | Pafupifupi 725 kg | -

**Kukhuthala kwa Substrate** | 0.5 mm mpaka 2.0 mm (monga chitsanzo chokha) | 0.5 mm mpaka 2.0 mm | -

**Zofotokozera Zatsatanetsatane (PSX307 Base Model)**

**Gulu la Ma Parameter** | **Mafotokozedwe Atsatanetsatane**

**Chitsanzo cha Zipangizo** | NM-EFP1A

**Njira Yoyeretsera** | Kutulutsa kwa RF kumbuyo kwa parallel-plate

**Gasi Wotulutsa** | Argon (Ar) [Oxygen (O₂) yosankha]

**Miyeso Yakunja (Chigawo Chachikulu)** | W 930 × D 1100 × H 1450 mm

**Kulemera kwa Zipangizo (Chigawo Chachikulu)** | Pafupifupi 555 kg

**Mafotokozedwe a Mphamvu** | AC ya gawo limodzi 200 V, 2.00 kVA (Peak 5.00 kVA)

**Zofunikira pa Kupereka Gasi** | 0.49 MPa ...kapena kupitirira apo; 6.5 L/min (ANR)

**Ntchito Zazikulu ndi Zinthu Zaukadaulo**

PSX307, yodziwika ndi luso lake lapamwamba komanso luso lochita zinthu zokha, imasonyeza kupambana kwake paukadaulo makamaka kudzera m'mbali zotsatirazi:

**Kulinganiza Kapangidwe ka Chipinda ndi Kuchuluka kwa Etch:** Kumatsimikizira kuti gulu lililonse lokonza limapereka zotsatira zofanana kwambiri zokongoletsa—chinthu chofunikira kwambiri kuti njira ikhale yokhazikika komanso yopindulitsa.

**Ntchito Yowunikira Magazi a Panasonic:** Kuyang'anira nthawi yeniyeni ndikuletsa zolakwika zotulutsa madzi a m'magazi kuti apewe kuwonongeka kwa Electrostatic Discharge (ESD), potero kuonetsetsa kuti zinthu "sizikuwonongeka" sizikuwonongeka.

**Ntchito Yotsatira:** Imapereka mphamvu zonse zotsatirira deta pakupanga, kukwaniritsa zofunikira zowongolera khalidwe la gawo lopanga zinthu za semiconductor.

**Kuyendetsa Komwe Kuli Pamzere ndi Kodziyendetsa Kokha:** Kumathandizira kukonza makina olowetsa/otsitsa ndi mafotokozedwe amkati, zomwe zimathandiza kuti zigwirizane mwachindunji ndi mizere yopangira yokha popanda kufunikira kulowererapo pamanja.

**Ubwino Waukulu ndi Minda Yogwiritsira Ntchito**

Pogwiritsa ntchito ukadaulo wofunikira womwe watchulidwa pamwambapa, PSX307 ikuwonetsa zabwino zazikulu pakukweza mtundu wa kupanga ndikuchepetsa ndalama, makamaka m'magawo otsatirawa:

**Kugwiritsa Ntchito Ndalama Mwachangu:** Pogwiritsa ntchito ukadaulo wa Argon (Ar) plasma processing kuti muchotse zinthu za nickel pamwamba, zimathandiza kugwiritsa ntchito njira yotsika mtengo yopangira "Flash Gold". Nthawi yomweyo, imachepetsa bwino mavuto monga delamination, voids, ndi ming'alu yomwe ingabuke panthawi yopangira. **Kusintha Kwambiri Kugwiritsa Ntchito Bwino:** Chifukwa cha kapangidwe kake kogwirizana ndi makina oyendetsera okha, zidazi zimapeza liwiro lokonza mpaka magawo 360/zidutswa pa ola limodzi—zomwe zikuyimira kuwonjezeka kwa 50% kwa magwiridwe antchito poyerekeza ndi zida wamba.

Kusintha kwa Malo Kuti Kukwaniritse Zofunikira Zosiyanasiyana za Njira:

**Kugwirizana Kwabwino kwa Chitsulo:** Musanayambe kulumikiza waya kapena kuyika chipu, kuchotsa zinthu zodetsa zachilengedwe kumawonjezera mphamvu yodula ndi kudalirika kwa kulumikiza.

**Kumatira kwa Resin Kowonjezereka:** Kusintha kwa pamwamba pogwiritsa ntchito oxygen plasma (O₂) kumawirikiza kawiri mphamvu yomatira ya epoxy molding compounds ndi zinthu zomwe sizikudzazidwa, zomwe zimathandiza kupewa delamination.

**Njira Zabwino Zogwiritsira Ntchito Kudzaza Madzi:** Zimathandiza kuti magazi aziyenda bwino, kuchepetsa nthawi yogwiritsira ntchito madzi ndi 40%—ubwino wofunika kwambiri kwa ma chips akuluakulu komanso omwe ali ndi I/O densities yambiri.

**Malo Ofunikira Ogwiritsira Ntchito**

Chifukwa cha luso lake lapamwamba, PSX307 imagwiritsidwa ntchito kwambiri popanga zinthu zapamwamba kwambiri:

**Kupaka Pang'onopang'ono kwa Wafer:** Kusintha kwa pamwamba pa Wafer musanayike bonding; kutsuka ma solder bumps musanayike bonding; ndi kuchotsa zotsalira (kuchotsa matope) mkati mwa TSV (Through-Silicon Via).

**Kupaka Pang'onopang'ono:** Kuyeretsa ndi kuyambitsa pamwamba pa PCB substrates musanayambe kulumikiza waya, kudzaza pansi, ndi kukonza zinthu.

**Njira ndi Zipangizo Zapadera:** Kuchotsa zotsalira za resin kuchokera ku ma wafer solder bumps; kukonza kuthekera kwa soldering kwa zigawo zotchingira golide zotsika mtengo; ndi ntchito zina zofanana.

**Zida Zowonjezera**

Monga gawo lofunika kwambiri la mapulogalamu a Panasonic a semiconductor solutions, PSX307 nthawi zambiri imagwira ntchito limodzi ndi ma bond a Panasonic a high-precision MD-P series flip-chip bonders. Mgwirizanowu umatsimikizira kusintha kosalekeza kuchokera ku kuyeretsa kupita ku malo oyika, zomwe zimapangitsa kuti zinthu zonse zikhale bwino kwambiri.

**Chidule**

Pomaliza, Panasonic PSX307 ndi njira yoyeretsera plasma yopangidwa mwaukadaulo makamaka kuti igwiritsidwe ntchito popanga zinthu zambiri. Kudzera mu kuphatikiza ukadaulo watsopano wa parallel-plate ndi njira yowunikira yodziwika bwino, imapeza phindu lalikulu pakupanga bwino komanso kuchepetsa bwino ndalama zopangira, zonse ndikuwonetsetsa kuti njira yosawononga ndi yofanana kwambiri. Pa ntchito zokhudzana ndi ma substrates akuluakulu kapena ma wafer a 300mm—ndipo komwe njira zofunika monga kulumikiza waya ndi kudzaza pansi zimafuna kudalirika kwakukulu—PSX307 imadziwika ngati yankho loyenera kuganiziridwa mozama.