PVA TePlasma cleaner IoN 200

IoN 200, yomwe idayambitsidwa ndi PVA TePla, ndi makina a plasma a RF (Radio Frequency) omwe adapangidwira makamaka kusintha pamwamba, kuyeretsa, ndi kugwiritsa ntchito phulusa. Mphamvu yake yayikulu ili mu kusinthasintha kwake kwapadera: sikuti imangokwaniritsa zofunikira za ma laboratories a R&D kuti afufuze bwino njira komanso imagwirizana bwino ndi malo opangira zinthu zambiri, zomwe zimathandiza kukonza zinthu zazikulu komanso kuthandizira kupanga zinthu zambiri.

**Mfundo Yogwirira Ntchito**

IoN 200 imagwiritsa ntchito ukadaulo wa RF plasma kuti isonkhezere mpweya mkati mwa malo opanda mpweya, motero imapanga plasma. Ma plasma radicals amphamvu kwambiri amayambitsa kuphulika kwa thupi komanso kusintha kwa mankhwala pamwamba pa zinthuzo, motero amakwaniritsa ntchito monga kuyeretsa, kuyambitsa, kapena kupukuta. Kuphatikiza apo, PVA TePla imapereka gawo laukadaulo wa microwave plasma wosankha; ukadaulo uwu umagwiritsa ntchito mphamvu yamagetsi yamagetsi kuti isonkhezere mpweya ndikupanga ma radicals osinthika. Izi zimatsimikizira njira yoyeretsera yomwe imagwira ntchito bwino kwambiri, yofanana, komanso ya isotropic, pomwe imaletsa kuwonongeka komwe kumachitika chifukwa cha ma ion komanso kuchulukana kwa magetsi.

**Maluso Apakati**

IoN 200 ili ndi luso lonse la njira:

**Kuyeretsa Malo:** Kuchotsa zotsalira zosasinthasintha, monga zinthu zodetsa zachilengedwe ndi ma oxide.

**Kuyambitsa Kumtunda:** Kuyambitsa magulu ogwira ntchito a polar kuti awonjezere kunyowa ndi kumamatira pamwamba, potero kukonzekera pamwamba kuti pakhale njira zina monga kugawa ndi kulumikiza.

**Kupukuta/Kuchotsa Matupi:** Pakupanga ndi kulongedza ma wafer, izi zimaphatikizapo kuchotsa molondola photoresist—kapena kuchotsa zotsalira zomwe zatsala pambuyo pochotsa mawonekedwe (monga, descum)—kudzera mu njira yothandiza kwambiri yochotsera matupi pogwiritsa ntchito photoresist ashes; izi zimatsimikizira kuti palibe kuwonongeka komanso kukonza molondola.

**Ubwino ndi Makhalidwe**

Gome ili m'munsimu likuwonetsa ubwino waukadaulo ndi mawonekedwe a IoN 200 m'magawo osiyanasiyana:

**Mlingo** | **Kufotokozera Kwatsatanetsatane**

**Kusinthasintha Kwapadera** | Yokhoza kukonza ma wafers okwana 200 mm m'mimba mwake, komanso mitundu yosiyanasiyana ya ma substrates akuluakulu. Dongosololi limapereka njira zosiyanasiyana zamagetsi a RF ndipo limathandizira kasinthidwe ka zipinda ndi ma electrode amitundu yosiyanasiyana kuti agwirizane ndendende ndi zofunikira zinazake za njira ndi njira zopangira; makamaka, njira yayikulu kwambiri ya chipinda imakhala ndi mphamvu yokwana malita 1,200, zomwe zimapereka malo okwanira oti makinawo akule komanso kukonzedwanso mtsogolo.

**Kugwira Ntchito Kolimba** | Pogwiritsa ntchito ukadaulo wa RF plasma—ndipo amapereka gawo la plasma la microwave losankha—dongosololi limasonyeza kusinthasintha kwakukulu kwa njira. Cholinga chake chachikulu ndikuwonetsetsa kuti zotsatira zake zimakhala zokhazikika komanso zogwirizana pa substrates zokwana 200 mm. Mwachitsanzo, panthawi yochotsa photoresist, dongosololi limapeza kuchuluka kwapadera kochotsa ndi kufanana.

**Ukhondo Wapamwamba ndi Ubwino Wachilengedwe:** Dongosololi limagwiritsa ntchito njira yotsukira "youma" - yosiyana kwambiri ndi njira zachikhalidwe zotsukira mankhwala onyowa - motero limachotsa kufunikira kogwiritsa ntchito zinyalala zamadzimadzi zoopsa ndikuzipanga ngati ukadaulo "wobiriwira" wosawononga chilengedwe.

**Ukadaulo Wotsogola & Ubwino Wodalirika:** Pogwiritsa ntchito zaka zoposa 25 zaukadaulo wozama pa ntchito yokonza plasma, PVA TePla imadziwika bwino mumakampani chifukwa cha moyo wa zida zake zomwe zimapitilira zaka 20—umboni wa khalidwe lake labwino komanso kudalirika kwake. Ukadaulo wake wapadera wa microwave plasma umalola kuyeretsa zitsanzo bwino komanso popanda kuwonongeka.

**Kugwiritsa Ntchito Bwino & Kutsata Deta:** Kapangidwe ka dongosololi kamayang'ana kwambiri kuwongolera mapulogalamu osiyanasiyana, machitidwe a alamu osalephera, ndi mapulogalamu opezera deta. Izi sizimangopatsa ogwiritsa ntchito chidziwitso chapamwamba komanso chosavuta kugwiritsa ntchito komanso zimawonetsetsa kuti njira zotsatirira zikuyenda bwino, motero zimakwaniritsa zofunikira zolimba zamakampani kuti azilamulira khalidwe. **Zofunikira Zaukadaulo**

Ngakhale kuti ma specifications enaake a hardware angasiyane malinga ndi kasinthidwe kake, zinthu zofunika kwambiri za IoN 200 zalembedwa kutengera zomwe zikupezeka pagulu:

**Paramita** | **Zambiri**

**Mtundu wa Chipangizo** | RF (Radio Frequency) Plasma Processing System (Makina a Microwave Plasma omwe mungasankhe alipo)

**Wafer/Substrate Kukula** | Imathandizira mpaka 200 mm (mainchesi 8)

**Njira Yokonzera** | Imathandizira njira zonse ziwiri zokonzera zinthu za Batch ndi njira imodzi yokonzera zinthu za wafer/substrate kuti ikwaniritse zofunikira zosiyanasiyana zokhudzana ndi kufanana ndi kugwiritsa ntchito bwino ndalama.

**Kukhazikitsa kwa Zipinda** | Kapangidwe ka modular, kogwirizana ndi mitundu yosiyanasiyana ya ma electrode ndi kapangidwe ka zipinda

**Mapulogalamu Ofunika** | Kuchotsa Photoresist (Kuchotsa Ashes/Kuchotsa), Kuchotsa zodetsa zachilengedwe/Zopanda chilengedwe, Kuyambitsa pamwamba

**Magesi Oyendetsera** | Mpweya wa Oxygen (O₂), Argon (Ar), Mpweya wokhala ndi Fluorine, ndi zina zotero.

**RF Power** | Imapereka njira zosiyanasiyana zosinthira mphamvu ndi ma frequency kuti zigwirizane ndi zofunikira zinazake (monga, 13.56 MHz kapena 2.45 GHz [Maikrowevu])

**Malo Ogwiritsira Ntchito**

Pogwiritsa ntchito magwiridwe antchito ake abwino komanso kusinthasintha kwake, IoN 200 imagwira ntchito yofunika kwambiri m'magawo osiyanasiyana opanga zinthu zapamwamba.

**Kupanga Ma Semiconductor (Kutsogolo):** Amagwiritsidwa ntchito popanga wafer pochotsa ashes/stripping ya photoresist; pochotsa photoresist pambuyo pa njira monga kuyika ma ion; komanso pochotsa zodetsa zachilengedwe ndi zosapangidwa kuchokera pamwamba pa wafer.

**Kupaka Kwapamwamba (Kumbuyo):** Amagwiritsidwa ntchito kuyambitsa ndikuyeretsa malo osungiramo zinthu ndi zipilala musanamange waya, kuyikamo, ndi kudzaza pansi, potero kuonetsetsa kuti zinthuzo zimamatira bwino komanso kudzaza bwino.

**MEMS ndi Zipangizo Zamagetsi:** Amagwiritsidwa ntchito popanga MEMS ndi zida zamagetsi kuti achotse zigawo zotsalira za kuwala kapena zotsalira za kuwala—monga kuchotsa SU-8 photoresist.

**Makampani Ena:** Mfundo zake zaukadaulo zimagwiritsidwanso ntchito m'magawo monga sayansi ya moyo, ukadaulo wazachipatala, zamagetsi zamagalimoto, ndi ndege, komwe zimathandiza kulimbitsa kudalirika kwa zinthu ndi magwiridwe antchito.

**Chidule**

Mwachidule, PVA TePla IoN 200 ndi njira yamphamvu yopangira plasma yomwe imapereka kusinthasintha kwapadera kwa njira. Imapereka magwiridwe antchito abwino kwambiri pakuyeretsa kwapamwamba, kuchotsa kuwala kwa dzuwa, komanso kuyambitsa pamwamba, zomwe zimapangitsa kuti ikhale yoyenera kwambiri pa kafukufuku ndi chitukuko cha labotale komanso malo opangira apakatikati okhala ndi magawo apakati a 200mm kapena ocheperako. Kapangidwe kake kosinthasintha komanso magwiridwe antchito olimba zimapangitsa kuti ikhale yankho lodalirika mkati mwa magawo a semiconductor, microelectronics, ndi ma phukusi apamwamba.