Chotsukira cha plasma cha Nordson MARCH AP-600

Nordson MARCH AP-600 ndi njira yakale yopangira ma plasma pogwiritsa ntchito vacuum plasma. Yodziwika bwino chifukwa cha kudalirika kwake komanso kugwiritsa ntchito mosavuta, njira iyi imagwira ntchito yofunika kwambiri m'magawo osiyanasiyana, kuphatikizapo kupanga ma semiconductor, ma microelectronics, ndi kupanga zida zamankhwala.

**Mafotokozedwe Aukadaulo Ofunika**

Izi ndi mfundo zazikulu zaukadaulo za AP-600, zomwe zapangidwa kuti zikupatseni chithunzithunzi chachidule cha ntchito zake zazikulu komanso momwe zimagwirira ntchito.

**Chinthu Chofotokozera** | **Chinthu Chodziwikiratu**

**Mtundu wa Zipangizo** | Benchtop, Dongosolo Lokonza Plasma Lopangidwa ndi Vacuum Yodzipangira Yokha

**Miyeso (W × D × H)** | 569 × 869 × 704 mm

**Kulemera Konse** | 221 kg (487 lbs)

**Zinthu Zopangira Chipinda** | Aluminiyamu ndi Aluminiyamu Zapamwamba Kwambiri

**Kuchuluka kwa Chipinda** | Malita 50.4

**RF Power Supply** | Yokhazikika: 600W @ 13.56 MHz (Yokhala ndi Automatic Impedance Matching Network)

**Kukonza Ma Electrode** | Imathandizira ma electrode tray okwana 7 ochotsedwa, osinthika pamalo (Imathandizira Ma Plasma Mode Olunjika ndi Otsika)

**Kulamulira Gasi** | Standard: Ma Channel awiri; Amakonzedwa ndi Ma Mass Flow Controllers (MFCs) okwana 4

**Dongosolo Lolamulira** | Kulamulira kwa PLC + Chiyankhulo cha Anthu ndi Makina Ogwira Ntchito pa Chinsalu Chokhudza (HMI); Kumathandizira Kuwunika Njira mu Nthawi Yeniyeni ndi Kutsata Deta

**Zinthu Zofunika ndi Mapindu**

Kugwira ntchito kwapadera kwa AP-600 kumachokera ku zinthu zofunika izi:

**Kufanana Kwambiri Pakupanga:** Cholinga chachikulu cha kapangidwe ka AP-600 ndikukwaniritsa zotsatira "zofanana kwambiri" zoyeretsera ndi kukonza plasma. Cholinga ichi chimakwaniritsidwa kudzera mu kuphatikiza kosalekeza kwa magetsi ake a 13.56 MHz RF ndi netiweki yofananira yokha ya impedance, kuonetsetsa kuti zotsatira zake zitha kubwerezedwanso nthawi iliyonse yomwe ikuchitika.

**Njira Zosinthira Zosinthasintha Komanso Zosiyanasiyana:** Kapangidwe ka thireyi yosinthasintha ka dongosololi kamathandizira njira zitatu zosiyana zosinthira ma electrode: Yoyendetsedwa ndi Mphamvu-Kuyambira-Pansi, Yoyendetsedwa ndi Mphamvu-Kuyambira-Pansi, ndi Yoyendetsedwa ndi Mphamvu-Kuyambira-Pansi. **Njira Yolunjika ya Plasma:** Imagwiritsa ntchito ma ion amphamvu kwambiri kuti igwire ntchito nthawi imodzi yophulitsa thupi ndi zochita za mankhwala pamwamba pa chitsanzo; chisankho chabwino kwambiri choyatsira pamwamba ndi ntchito zoyeretsera kwambiri. **Njira Yotsika (Yakutali) ya Plasma:** Imayika chitsanzocho patali kuchokera ku gwero la plasma, ndikuchiwonetsa kokha ku ma free radicals omwe amakhalapo kwa nthawi yayitali. Njira yotsukira munjira iyi ndi yofewa, zomwe zimapangitsa kuti ikhale yoyenera kwambiri pokonza zida zolondola zomwe zimakhudzidwa ndi ion bombardment kapena kuwonongeka kwa electrostatic discharge (ESD). **Ntchito Yosavuta Komanso Yotetezeka:** Ili ndi mawonekedwe olumikizirana a PLC omwe ndi osavuta kugwiritsa ntchito komanso osavuta kugwiritsa ntchito, omwe amapereka chiwonetsero cha nthawi yeniyeni cha magawo a njira ndi zambiri za momwe zinthu zilili. Chitseko chotetezeka cholumikizidwa mkati ndi kapangidwe ka panel yochotseka chimatsimikizira chitetezo chogwira ntchito pomwe chimapangitsa kuti kukonza nthawi zonse ndi njira zogwirira ntchito zamkati zikhale zosavuta.

**Kugwirizana kwa Mpweya wa Njira Yonse:** Imathandizira mitundu yosiyanasiyana ya mpweya wa njira, kuphatikizapo Argon (Ar), Oxygen (O₂), Hydrogen (H₂), Helium (He), ndi mpweya wokhala ndi fluorine (monga, CF₄).

**Maulumikizano Osavuta a Utility:** Amapereka ma interface osavuta kugwiritsa ntchito kuti akwaniritse zofunikira zosiyanasiyana, monga kuwerengera nthawi ndi nthawi ndi kutsimikizira.

**Malo Ogwiritsira Ntchito Ambiri**

Kutengera ndi zinthu zomwe zatchulidwa pamwambapa, dongosolo la AP-600 limagwiritsidwa ntchito kwambiri m'magawo ambiri:

**Munda Wofunsira** | **Zitsanzo Zapadera Zofunsira**

**Semiconductor & Microelectronics Manufacturing** | - **Die Attach Pre-treatment:** Imalimbitsa kumatirira kwa die.

- **Kulumikiza Waya Kukonza chithandizo chisanachitike:** Kumalimbitsa mphamvu yolumikizirana.

- **Kuumba Pre-treatment:** Kumachepetsa kusweka kwa phukusi.

- **Flip-Chip Underfill Pre-treatment:** Imawongolera kuthamanga kwa madzi pansi pa underfill, imachepetsa mipata, komanso imalimbitsa kumamatira.

- **Kuchotsa Photoresist / Descum:** Kuchotsa zotsalira zomwe zatsala pambuyo pochotsa.

- **Kuchotsa Zoipitsa Zosiyanasiyana:** mwachitsanzo, zoipitsa zachilengedwe, mafuta, fumbi, ma oxide, ndi zotsalira za nanoparticle. **Zachipatala & Sayansi ya Moyo** | - Kuyeretsa ndi kukonza zoipitsa zida zachipatala monga ma stents ndi ma catheter; kulola kuti zinthu zosiyanasiyana zikhale zovuta kuzilumikiza; kuchepetsa kulimba kwa pamwamba pa zinthu za silicone zopangidwa ndi jakisoni.

- Chithandizo cha pamwamba pa biochips ndi zipangizo za microfluidic.

**Magawo Ena Opanga Zinthu Zapamwamba** | - **Kupanga PCB:** Kuchotsa zotsalira pamwamba ndi kuyambitsa pamwamba kuti pakhale kudalirika kwa njira zophikira pambuyo pake.

- **Optoelectronics & Advanced Packaging:** Kukonza kunyowa kwa pamwamba musanagwiritse ntchito njira zosiyanasiyana zopakira, motero kumawonjezera mphamvu ya ntchito zopaka ndi kudzaza.

**Mfundo Yogwirira Ntchito**

Kuyeretsa plasma makamaka kumaphatikizapo mitundu iwiri ya njira: zakuthupi ndi zamankhwala.

**Kuchitapo Kanthu:** Ma ayoni amphamvu kwambiri ochokera ku mpweya wopanda mphamvu—monga Argon (Ar)—amagwiritsidwa ntchito "kuponya" pamwamba, kuchotsa bwino zinthu zodetsa zomwe zimamatira.

**Kuchitapo Kanthu:** Mpweya wa okosijeni (O₂) kapena fluorine umayambitsidwa; ma free radicals omwe ali mu plasma yomwe imachokera amakumana ndi zinthu zachilengedwe pamwamba kuti apange zinthu zina za gasi, zomwe zimachotsedwa ndi pampu ya vacuum.

Njira ziwiri zogwirira ntchito za AP-600 zapangidwa kuti zigwirizane pakati pa njira ziwirizi, zomwe zapangidwa kuti zikwaniritse zofunikira za njira inayake.

**Malo Ogwirizana**

Mu mzere wonse wopangira, AP-600 nthawi zambiri imagwira ntchito limodzi ndi zida zozungulira:

**Ndi Zida Zina za Nordson:** Mu SMT kapena mizere yolongedza, AP-600 imatha kugwira ntchito mogwirizana ndi machitidwe ogawa/kuphimba a Nordson a ASYMTEK kapena ma valavu ogawa olondola kwambiri a EFD. Njirayi imayamba ndi kuyeretsa plasma kuti iyambe kugwira ntchito pamwamba ndikuwonjezera mphamvu pamwamba, kutsatiridwa ndi kugawa molondola kuti pamapeto pake pakhale zotsatira zabwino kwambiri zomangira kapena zokutira.

**Ndi Zida Zina Zopangira:** Mu njira zopangira IC, AP-600 nthawi zambiri imagwiritsidwa ntchito limodzi ndi zida monga lithography systems, ion implanters, plasma etchers, scanning electron microscopes (SEM), ndi zida zoyesera zida, zomwe zimapangitsa kuti pamwamba pakhale malo abwino kwambiri panthawi yofunika kwambiri yopangira.

**Chidule**

Mwachidule, Nordson MARCH AP-600 ndi njira yofufuzira yogwiritsira ntchito plasma ya pakompyuta yomwe imaphatikiza kulondola kwambiri, kusinthasintha kwapadera, komanso kugwiritsa ntchito bwino ndalama. Imakwaniritsa bwino zofunikira zoyera pamwamba ndi kumatira zomwe zimapezeka m'magawo monga ma semiconductors, ma microelectronics, ndi zida zamankhwala, zomwe zimapangitsa kuti ikhale chisankho chabwino kwambiri pa kafukufuku ndi chitukuko cha njira kapena kupanga zinthu zazing'ono.