Ekyuma ekirongoosa plasma ekya Nordson MARCH AP-600

Nordson MARCH AP-600 nkola ya kikula kya waggulu ey’okukola pulasima ey’obuziba (vacuum plasma processing) ku ntebe. Enkola eno emanyiddwa olw’obwesigwa bwayo obw’enjawulo n’obwangu okukozesa, ekola kinene nnyo mu bitundu bingi, omuli okukola semikondokita, ebyuma ebitonotono, n’okukola ebyuma eby’obujjanjabi.

**Ebikulu ebikwata ku by'ekikugu**

Wammanga bye bikulu ebikwata ku by’ekikugu ku AP-600, ebikoleddwa okukuwa okulambika okw’amangu ku mirimu gyayo emikulu n’obusobozi bwayo obw’okukola.

**Ekintu ekitegeeza** | **Parameter Entongole**

**Ekika ky'Ebyuma** | Benchtop, Enkola y’okukola ku plasma eya Batch Vacuum ekola mu bujjuvu

**Ebipimo (W × D × H)** | 569 × 869 × 704 mm

**Obuzito obutuufu** | Kkiro 221 (487 lbs) .

**Ebikozesebwa mu kisenge** | Ebikozesebwa mu Aluminiyamu ne Aluminiyamu eby’omutindo ogwa waggulu

**Omuzingo gw'ekisenge** | Liita 50.4

**Amasannyalaze ga RF** | Omutindo: 600W @ 13.56 MHz (Erimu omukutu ogukwatagana ne impedance mu ngeri ey’obwengula)

**Ensengeka y'obusannyalazo** | Ewagira okutuuka ku 7 eziggyibwamu, ezitereezebwa mu kifo kya electrode trays (Ewagira Direct ne Downstream Plasma Modes)

**Okufuga ggaasi** | Omutindo: Emikutu 2; Esobola okutegekebwa n’ebifuga okutambula kw’amasasi (MFCs) ebituuka ku 4 .

**Enkola y'okufuga** | PLC Control + Touchscreen Enkolagana y’omuntu n’ekyuma (HMI); Awagira Okulondoola Enkola mu kiseera Ekituufu n’Okulondoola Data

**Ebikulu Ebirimu n'Emigaso**

Omulimu ogw’enjawulo ogwa AP-600 guva ku bintu bino ebikulu:

**Superior Processing Uniformity:** Ekigendererwa ekikulu eky'okukola dizayini ya AP-600 kwe kutuuka ku bivudde mu kwoza n'okulongoosa pulasima "ezifaanagana ennyo". Ekigendererwa kino kituukirira nga tuyita mu kugatta awatali kusoomoozebwa kw’amasannyalaze gaayo aga 13.56 MHz RF n’omukutu ogukwatagana n’obuziyiza obw’otoma, okukakasa ebivaamu ebiddibwamu ennyo buli nkola eddukanyizibwa.

**Engeri z’okukola ezikyukakyuka n’ezikola emirimu mingi:** Enkola ya tray eno ekyukakyuka ewagira engeri ssatu ez’enjawulo ez’okusengeka ebyuma: Powered-to-Ground, Ground-to-Powered, ne Powered-to-Powered. **Direct Plasma Mode:** Ekozesa ion ez’amasoboza amangi okukola omulundi gumu okukuba bbomu ez’omubiri n’ensengekera z’eddagala ku ngulu wa sampuli; okulonda okulungi ennyo okukola ku ngulu n’okukozesa okuyonja mu buziba. **Downstream (Remote) Plasma Mode:** Eteeka sampuli mu bbanga erigere okuva ku nsibuko ya pulasima, n’agiteeka ku free radicals zokka eziwangaala. Enkola y’okuyonja mu ngeri eno esingako mpola, ekigifuula esaanira naddala okukola ku byuma ebituufu ebikwatibwako okukuba bbomu za ion oba ebiyinza okwonooneka kw’amasannyalaze (ESD). **Emirimu egyangu era egy’obukuumi:** Erimu enkola ya touchscreen efugirwa PLC enyangu era enyangu okukozesa, egaba okulaga mu kiseera ekituufu ebipimo by’enkola n’amawulire agakwata ku mbeera. Omulyango ogw’obukuumi ogwa interlock oguzimbibwamu ne dizayini ya panel eggyibwamu bikakasa obukuumi bw’emirimu ate nga byanguyira okuddaabiriza okwa bulijjo n’enkola z’okukola munda.

**Okukwatagana kwa ggaasi z’enkola empanvu:** Kuwagira ggaasi ez’enkola ez’enjawulo, omuli Argon (Ar), Oxygen (O2), Hydrogen (H2), Helium (He), ne ggaasi ezirimu fluorine (okugeza, CF4).

**Convenient Utility Connections:** Ewa utility interfaces ennyangu okutuukako okusobola okusikiriza ebyetaago eby’enjawulo ebiyambako, gamba nga periodic calibration and validation.

**Ennimiro z'okusaba mu bujjuvu**

Okusinziira ku bintu ebyogeddwako waggulu, enkola ya AP-600 ekozesebwa nnyo mu bintu bingi:

**Ekisaawe ky'Okusaba** | **Ebyokulabirako eby'enjawulo eby'okukozesa**

**Okukola Semiconductor & Microelectronics** | - **Die Attach Nga tonnaba kujjanjaba:** Eyamba okunyweza die.

- **Okusiba waya Nga tonnaba kujjanjaba:** Alongoosa amaanyi g'okusiba.

- **Okubumba Pre-treatment:** Kikendeeza ku delamination ya package.

- **Flip-Chip Underfill Pre-treatment:** Elongoosa omuwendo gw’amazzi agakulukuta wansi, ekendeeza ku buziba, n’okutumbula okunywerera.

- **Photoresist Removal / Descum:** Egogola ebisigadde ebisigaddewo oluvannyuma lw'enkola z'okukuba etching.

- **Okuggyawo Obucaafu obw’enjawulo:** okugeza, obucaafu obw’obutonde, giriisi, enfuufu, okisayidi, n’ebisigadde mu nanoparticle. **Eby'obusawo & Sayansi w'Obulamu** | - Okwoza n’okusiba nga tebannaba kujjanjaba byuma bya bujjanjabi nga stents ne catheters; okusobozesa okusiba ebintu ebitali bimu ebizibu okugatta; okukendeeza ku tackiness kungulu kw’ebitundu bya silicone ebibumbe empiso.

- Okulongoosa kungulu ku biwuka ebiyitibwa biochips ne microfluidic devices.

**Ebitundu ebirala eby'amakolero eby'omulembe** | - **Okukola PCB:** Okuggyawo ebisigadde ku ngulu n’okukola ku ngulu okutumbula obwesigwa bw’enkola z’okusiiga eziddako.

- **Optoelectronics & Advanced Packaging:** Okulongoosa okufukirira kungulu nga tebannaba kukola mitendera egy’enjawulo egy’okupakinga, bwe kityo ne kyongera ku bulungibwansi bw’emirimu gy’okuteeka ebiyungu n’okujjuza.

**Omusingi gw'emirimu**

Okwoza pulasima okusinga kuzingiramu enkola ez’ebika bibiri: eby’omubiri n’eby’eddagala.

**Enkola y'omubiri:** Ayoni ez'amasoboza amangi okuva mu ggaasi ezitakola—nga Argon (Ar)—zikozesebwa "okukuba bbomu" ku ngulu, mu ngeri ennungi ne ziggyawo obucaafu obunywerera.

**Enkola y’eddagala:** Gaasi ezirimu okisigyeni (O2) oba fluorine ziyingizibwa; ebiwujjo eby’eddembe munda mu pulasima evuddemu bikolagana n’ebintu ebiramu ku ngulu ne bikola ebiva mu ggaasi, oluvannyuma ne bifulumizibwa ppampu ya vacuum.

Enkola zombi eza AP-600 zikoleddwa okusobola okuteeka bbalansi wakati w’enkola zino ebbiri, ezikoleddwa mu ngeri ey’enjawulo okutuukiriza ebyetaago by’enkola eweereddwa.

**Enkola y'obutonde bw'ensi ey'enkolagana**

Mu layini y’okufulumya enzijuvu, AP-600 etera okukola ng’ekwataganye n’ebyuma ebigyetoolodde:

**N’Ebyuma ebirala ebya Nordson:** Mu layini za SMT oba ezipakinga, AP-600 esobola okukola mu ngeri ey’okukwatagana n’enkola za Nordson ez’okugaba/okusiiga oba EFD high-precision dispensing valves. Enkola eno etandika n’okuyonja pulasima okukola ku ngulu n’okutumbula amaanyi g’okungulu, oluvannyuma n’okugabanya mu ngeri entuufu okukkakkana ng’ofunye ebivudde mu kusiba oba okusiiga eby’omutindo ogwa waggulu.

**N’ebyuma ebirala eby’enkola:** Mu nkola y’emirimu gy’okukola IC, AP-600 etera okukozesebwa ng’egatta wamu n’ebyuma nga enkola za lithography, ion implanters, plasma etchers, scanning electron microscopes (SEM), n’enkola z’okugezesa ebyuma, okuwa embeera ennongoofu ey’okungulu mu biseera ebikulu eby’enkola.

**Okubumbako**

Mu bufunze, Nordson MARCH AP-600 nkola ya ddaala lya kunoonyereza ku desktop plasma processing system egatta obutuufu obw’amaanyi, okukyukakyuka okw’enjawulo, n’okukendeeza ku nsimbi ez’enjawulo. Ekola bulungi ku byetaago ebikakali eby’obuyonjo bw’okungulu n’okunyweza ebisangibwa mu nnimiro nga semiconductors, microelectronics, n’ebyuma eby’obujjanjabi, ekigifuula okulonda okulungi ennyo mu nkola R&D oba okufulumya mu bitundu ebitono.