Nordson MARCH AP-300 ekyuma ekiyonja pulasima

Nordson MARCH AP-300 nkola ya benchtop vacuum plasma system entono, etali ya ssente nnyingi. Amaanyi gaayo amakulu gali mu kugatta amasannyalaze ga RF aga 13.56 MHz n’omukutu ogukwatagana n’obuziyiza obw’otoma, ekigisobozesa okutuusa ebivudde mu kukola kwa pulasima eby’enjawulo, ebinywevu, era ebifaanagana mu kigere ekitono.

**Omusingi gw'emirimu**

AP-300 ekola nga ekozesa ppampu ya vacuum okufulumya ekisenge mu mbeera ya vacuum enkulu, oluvannyuma ggaasi ez’enkola ezenjawulo ziyingizibwa. Nga tukozesa amasoboza ga RF aga 13.56 MHz, ggaasi efuuka ionize okukola pulasima. Obutundutundu obw’amasoboza amangi n’ebika ebikola mu pulasima byenyigira mu kukuba bbomu ez’omubiri oba enzirukanya y’eddagala n’okungulu kw’ekintu, bwe kityo ne bituuka ku kwoza kungulu, okukola oba okukuba.

**Emirimu emikulu n'Enkozesa**

Omulimu omukulu ogwa AP-300 kwe kuwa embeera ya pulasima enywevu era efugibwa. Okusinga elongoosa omutindo n’obwesigwa bw’ebintu ebisembayo ng’eyita mu nkola ssatu enkulu:

**Ekika ky'emirimu** | **Enkola y'okussa mu nkola n'engeri gye bivaamu**

**Okuyonja Plasma** | Eggyawo obucaafu obuva mu biramu ne okisayidi okuva ku ngulu w’ebintu, okutuuka ku buyonjo obw’omutindo gwa atomu.

**Okukola ku ngulu** | Eyingiza ebibinja ebikola eby’enjuba (polar functional groups) —nga ebibinja bya haidrokisi ne kabokisi —ku ngulu w’ekintu, bwe kityo n’eyongera ku maanyi g’okungulu n’okufukirira okutumbula okunywerera n’ebintu ebirala.

**Okukuba ebifaananyi / Descum** | Ekozesa ggaasi z’enkola ezirimu fluorine (okugeza, CF4) okukola etching entuufu eya anisotropic oba isotropic ku minzaani ya micron oba wadde nanometer; asobola okuggya ebisigalira bya photoresist mu wafers.

**Ebirungi ebikulu n'ebirimu**

Dizayini ya AP-300 ekola bbalansi ennungi wakati w’omutindo n’okukyukakyuka mu kifo ekitono. Ebintu byayo ebikulu birambikiddwa wansi:

**Ekika** | **Ekitundu Ekikulu** | **Ennyonnyola Entongole**

**Ebirungi** | **Obumu obw'amaanyi n'okuddiŋŋana** | Jenereta ya RF eya 13.56 MHz, nga egattibwa wamu n’omukutu ogukwatagana ne impedance mu ngeri ey’otoma, ekakasa nti ebivudde mu nkola biddibwamu okutaliiko kye bifaanana.

**Emirimu egyangu era egyesigika** | Erimu enkola y’okufuga touchscreen eyesigamiziddwa ku PLC ng’ewa enkola ey’ebifaananyi ennyangu n’okulondoola enkola mu kiseera ekituufu; okuzimba okunywevu, nga kukoleddwa mu byuma byonna, kukakasa nti ejja kutebenkera okumala ebbanga eddene.

**Okukyukakyuka n'okugaziwa** | Ewagira layini za ggaasi eziwera nnya, nga ekwatagana n’ebyetaago by’enkola ya ggaasi nga O2, Ar, H2, He, ne CF4. **Ekikendeeza ku ssente** | Etuwa omulimu ogw’enjawulo n’okukyukakyuka ku ssente entono, ekigifuula ekifo ekirungi ennyo mu R&D n’okufulumya okugezesa okutono.

**Ebikulu Ebirimu** | **Okukola ku Desktop okukwatagana** | Yeefuga mu bujjuvu; yeetaaga okuyungibwa kwa ppampu ya vacuum ey’ebweru yokka era ekwata mangu ku ntebe ya laboratory eya standard oba workbench.

**Ensengeka y'Ekisenge Ekyukakyuka** | Ekisenge kino kikoleddwa mu aluminiyamu awangaala era nga kisuzaamu ttaayi za electrode eziwera 7 eziggyibwamu, ezitereezebwa.

**Ewagira Emitendera gy'Enkola Emingi** | Awagira zombi Direct Plasma (okusinga okukuba bbomu mu mubiri) ne Downstream Plasma (okusinga chemical radicals) modes, okuwa obusobozi okutuukiriza ebyetaago by’enkola ez’enjawulo.

**Ebikwata ku nsonga eno mu bujjuvu**

**Ekika kya Parameter** | **Ebikwata ku nsonga ebitongole**

**Ebipimo Okutwalira awamu (WxDxH)** | 569 × 869 × 704 mm

**Obuzito obutuufu** | Kkiro 221 (487 lbs) .

**Omuzingo gw'ekisenge** | Liita 33.1

**Omuwendo gwa Busannyalazo** | Okutuuka ku 7

**Ebanga ly'obusannyalazo** | 25.4 mm (1 yinsi) .

**Amaanyi ga RF aga mutindo** | 300 W @ 13.56 MHz

**Okufuga okutambula kwa ggaasi (MFC)** | 2 nga zirimu nga omutindo; egaziyizibwa okutuuka ku 4

**Gaasi ezikwatagana** | Ar, O2, H2, Ye, CF4, n’ebirala.

**Ebitundu ebigazi eby'okusaba**

AP-300 yeewaanira ku ngeri nnyingi gye zikozesebwamu, ng’ekola kinene nnyo —naddala mu bitundu by’amakolero ebikulu bino wammanga:

**Semiconductors & Microelectronics:** Ekozesebwa nnyo mu kuyonja activation nga tebannaba kukwata die, okusiba waya, n'okujjuza wansi mu flip-chip; nga kwotadde n’okukola post-lithography resist stripping n’okujjanjaba plasma okukulembera wafer-level okupakinga.

**Printed Circuit Boards & Electronic Assembly:** Eggyawo bulungi obucaafu-nga residual flux-era eyongera ku bunnyogovu bw’okungulu nga tebannaba kukola mirimu nga conformal coating ne underfilling.

**Medical & Life Sciences:** Etuwa omulimu ogw’okwoza ogwesigika mu nkola z’okusiba n’omu kiseera ky’okukola ebizimbe ebizibu, nga microfluidic chips.

**Okubumbako**

Mu bufunze, Nordson MARCH AP-300 nkola ya pulasima ey’oku mmeeza egatta mu ngeri eyeewuunyisa obutuufu obw’omutindo gw’okunoonyereza, obwesigwa obw’omutindo gw’amakolero, n’obwangu bw’emirimu obwangu okukozesa. Omugaso gwayo omukulu guli mu kuzimba obusobozi obw’amaanyi mu kifo ekitono, ekigifuula okulonda okulungi eri byombi R&D n’okukozesa okufulumya ebintu ebitonotono mu bitundu bya semiconductor, microelectronics, n’eby’obujjanjabi.