Ekyuma ekirongoosa plasma ekya PVA TePla IoN 200

IoN 200, eyatongozebwa PVA TePla, nkola ya plasma eya RF (Radio Frequency) eyakolebwa mu ngeri ey’enjawulo okukyusa kungulu, okuyonja, n’okukozesa evvu. Amaanyi gaayo amakulu gali mu kukyukakyuka kwayo okw’enjawulo: tekoma ku kutuukiriza byetaago bya laboratory za R&D okunoonyereza ku nkola entuufu naye era ekwatagana bulungi mu mbeera z’okufulumya ebintu mu bungi, okusobozesa okulongoosa ebikozesebwa ebinene n’okuwagira okukola ebintu mu bungi.

**Omusingi gw'emirimu**

IoN 200 ekozesa tekinologiya wa RF plasma okucamula ggaasi mu mbeera ya vacuum, bwe kityo n’ekola plasma. Ebiwujjo bya pulasima eby’amasoboza amangi bitandika okukuba bbomu ez’omubiri n’ensengekera z’eddagala ku ngulu w’ekintu, bwe kityo ne bituukiriza emirimu gy’enkola ng’okuyonja, okukola, oba okukuba. Ekirala, PVA TePla egaba modulo ya tekinologiya wa microwave plasma ey’okwesalirawo; tekinologiya ono akozesa amasoboza g’amayengo ag’amasannyalaze okucamula ggaasi n’okukola ebiwujjo ebikola (reactive radicals). Kino kikakasa enkola y’okuyonja ekola obulungi ennyo, eya kimu, era nga ya isotropic, ate nga eziyiza bulungi okwonooneka okuleetebwa ion n’okukuŋŋaanyizibwa kw’ekisannyalazo ky’amasannyalaze.

**Obusobozi Obukulu**

IoN 200 erina obusobozi bw’enkola obujjuvu:

**Okwoza kungulu:** Okuggyawo ebisigadde ebitali biwunya, gamba ng’obucaafu obuva mu biramu ne oxides.

**Okukola ku ngulu:** Okuyingiza ebibinja ebikola eby’enjuba okutumbula okufukirira kw’okungulu n’okunywerera, bwe kityo ne kiteekateeka kungulu okukola enkola eziddako ng’okugaba n’okusiba.

**Ashing / Descum:** Mu nkola z’okukola wafer n’okupakinga, kino kizingiramu okuggyawo obulungi photoresist —oba okugogola ebisigadde ebisigaddewo oluvannyuma lw’okukuba pattern etching (kwe kugamba, descum)—nga tuyita mu nkola ennungi ennyo ey’okusiiga evvu mu photoresist; kino kikakasa nti tewali kwonooneka, okukola mu ngeri entuufu.

**Ebirungi n'Ebirimu**

Omulongooti wansi gulaga ebirungi eby’ekikugu eby’enjawulo n’ebintu ebikolebwa mu dizayini ya IoN 200 mu bipimo eby’enjawulo:

**Ekipimo** | **Ennyonyola enzijuvu**

**Okukyukakyuka okw'enjawulo** | Esobola okulongoosa wafers ezituuka ku mm 200 mu buwanvu, wamu n’ebika eby’enjawulo ebya substrates ennene. Enkola eno egaba enkola ez’enjawulo ez’okugabira amasannyalaze ga RF era ewagira ensengeka y’ebisenge n’obusannyalazo mu sayizi ez’enjawulo okukwatagana obulungi n’ebyetaago by’enkola ebitongole n’ebiyita mu kukola; okusingira ddala, eky’ekisenge ekisinga obunene kyewaanira ku busobozi bwa liita 1,200, nga kiwa ekifo ekimala okugaziya enkola n’okulongoosa mu biseera eby’omu maaso.

**Enkola y'enkola ennywevu** | Nga tukozesa tekinologiya wa RF plasma —n’okuwaayo modulo ya microwave plasma ey’okwesalirawo —enkola eno eraga okukyusakyusa enkola empanvu. Ekigendererwa kyayo ekikulu kwe kulaba ng’ebiva mu nkola ebinywevu era ebikwatagana ku substrates ezipima okutuuka ku mm 200. Okugeza, mu kiseera ky’okuggyawo photoresist, enkola etuuka ku miwendo egy’enjawulo egy’okuggyawo n’obumu.

**High Cleanliness & Environmental Friendliness:** Enkola eno ekozesa enkola y'okwoza "enkalu"-eyawukana nnyo ku nkola ez'ennono ez'okwoza eddagala eribisi-bwe kityo ne kimalawo obwetaavu bw'okukwata kasasiro ow'amazzi ow'obulabe era ne yeenyweza nga tekinologiya "green" atakuuma butonde.

**Leading Technology & Reliable Quality:** Nga twesigama ku myaka egisukka mu 25 egy’obukugu obw’amaanyi mu kisaawe ky’okukola plasma, PVA TePla emanyiddwa nnyo mu mulimu guno olw’obulamu bw’ebyuma obusukka mu myaka 20-obujulizi ku mutindo gwayo ogw’enjawulo n’okwesigamizibwa kwayo. Tekinologiya waayo ow’enjawulo owa pulasima eya microwave asobozesa okuyonja sampuli mu ngeri yonna era nga tewali kwonooneka.

**User-Friendly Operation & Data Traceability:** Enkola y’enkola eno essa essira ddene ku kufuga pulogulaamu mu ngeri ez’enjawulo, enkola za alamu ezitalemererwa, ne pulogulaamu y’okufunira data. Kino tekikoma ku kuwa bakozesa bumanyirivu bwa mulembe era obutegeerekeka mu mirimu wabula era kikakasa nti enkola elondoolebwa, bwe kityo ne kituukiriza ebisaanyizo ebikakali eby’amakolero ku kulondoola omutindo. **Ebikwata ku by'ekikugu**

Wadde nga ebikwata ku hardware ebitongole biyinza okwawukana okusinziira ku nsengeka entuufu, ebintu bino wammanga ebikulu ebya IoN 200 biwandiikiddwa okusinziira ku mawulire agasangibwa mu lujjudde:

**Ekipimo** | **Ebisingawo**

**Ekika ky'Ekyuma** | Enkola ya RF (Radio Frequency) Plasma Processing System (Enkola ya Microwave Plasma ey’okwesalirawo eriwo)

**Obunene bwa Wafer/Substrate** | Ewagira okutuuka ku mm 200 (yinsi 8) .

**Engeri y'okukola** | Awagira byombi Batch processing ne Single-wafer/substrate processing modes okutuukiriza ebyetaago by’enkola eby’enjawulo ebikwata ku bumu n’okukendeeza ku nsimbi

**Okusengeka Ekisenge** | Dizayini ya modulo, ekwatagana n’ebika by’obusannyalazo eby’enjawulo n’ensengekera z’ekisenge

**Ebikulu Ebikozesebwa** | Okuggyawo photoresist (Ashing/Stripping), Okuggyawo obucaafu mu Organic/Inorganic, Okukola ku ngulu

**Gaasi z'enkola** | Oxygen (O2), Argon (Ar), Gaasi ezirimu Fluorine n’ebirala.

**Amaanyi ga RF** | Ewa enkola ez’enjawulo ez’okusengeka amaanyi ne frequency okutuukana n’ebyetaago by’enkola ebitongole (okugeza, 13.56 MHz oba 2.45 GHz [Microwave])

**Ebitundu by'okusaba**

Nga ekozesa omulimu gwayo ogw’enjawulo n’okukyukakyuka, IoN 200 ekola kinene mu bitundu eby’enjawulo eby’amakolero eby’omulembe.

**Okukola Semiconductor (Front-end):** Ekozesebwa mu nkola y’okukola wafer okukola photoresist ashing/stripping; olw’okuggyawo photoresist nga tugoberera enkola nga ion implantation; n’okumalawo obucaafu obuva ku bimera n’ebitali biramu okuva ku ngulu wa wafer.

**Advanced Packaging (Back-end):** Ekozesebwa okukola n’okuyonja substrate ne chip surfaces nga tebannaba kusiba waya, die attach, n’okujjuza wansi, bwe kityo ne kikakasa nti okunyweza n’okujjuza ebivaamu ebirungi.

**MEMS ne Optoelectronic Devices:** Ekozesebwa mu kukola MEMS ne optoelectronic components okuggyawo layers ezisaddaaka oba photoresist residues-okugeza, okuggyawo SU-8 photoresist.

**Amakolero amalala:** Emisingi gyayo egya tekinologiya era gikwata ku bintu nga ssaayansi w’obulamu, tekinologiya w’obusawo, ebyuma by’emmotoka, n’eby’omu bwengula, gy’ekola okutumbula obwesigwa bw’ebintu n’okukola obulungi.

**Okubumbako**

Mu bufunze, PVA TePla IoN 200 nkola ya maanyi ey’okulongoosa pulasima egaba enkyukakyuka ey’enjawulo mu nkola. Ewa omulimu ogw’enjawulo mu kuyonja okw’omutindo ogwa waggulu, okuggyawo photoresist, n’okukola kungulu, ekigifuula esaanira nnyo naddala mu laboratory R&D n’embeera z’okufulumya ez’omutindo ogwa wakati ezirimu substrates za mm 200 oba obutono. Dizayini yaayo eya modulo ekyukakyuka n’enkola yaayo ennywevu bigiteekawo ng’eky’okugonjoola ekyesigika mu bitundu bya semiconductor, microelectronics, n’okupakinga eby’omulembe.