IoN 200 yo gusukura plasma ya PVA TePla

IoN 200, yatangijwe na PVA TePla, ni sisitemu ya plasma ya RF (Radio Frequency) yagenewe by'umwihariko guhindura ubuso, gusukura no gukoresha ivu. Imbaraga zayo z'ingenzi zishingiye ku buryo bworoshye bworoshye: ntiyujuje gusa ibyo laboratwari z'ubushakashatsi n'iterambere zisaba kugira ngo hakorwe ubushakashatsi nyabwo, ahubwo inahuzwa neza n'ahantu hakorerwa ibintu byinshi, bigatuma habaho gutunganya ibintu binini kandi bigatera inkunga inganda nini.

**Ihame ry'imikorere**

IoN 200 ikoresha ikoranabuhanga rya RF plasma kugira ngo ikurure imyuka mu kirere cyuzuyemo umwuka, bityo igakora plasma. Radicals za plasma zifite ingufu nyinshi zitangira ibikorwa byo gutemba no gukoresha imiti ku buso bw'ibikoresho, bityo zigasohoza imirimo yo gukora nko gusukura, gukora, cyangwa gukata. Byongeye kandi, PVA TePla itanga uburyo bwo gukoresha ikoranabuhanga rya microwave plasma; iri koranabuhanga rikoresha ingufu z'amashanyarazi kugira ngo ikurure imyuka kandi ikore reactive radicals. Ibi byemeza ko isuku ikorwa neza cyane, ijyanye kandi ikanakora isotropic, mu gihe birinda kwangirika guterwa na iyoni no kwigwizaho electrostatic charge.

**Ubushobozi bw'ibanze**

IoN 200 ifite ubushobozi bwose bwo gukora:

**Gusukura ubuso:** Gukuraho ibisigazwa bidahinduka, nk'imyanda y'umwimerere na okiside.

**Gukoresha Ubuso:** Gushyiramo amatsinda y'imikorere y'ibice by'impande kugira ngo byongere ubushobozi bwo kumena no gufatana kw'ibice, bityo bigategura ubuso ku bikorwa bikurikira nko gusohora no gufatana.

**Kuvubura/Kuvubura:** Mu gukora no gupakira wafer, ibi bisaba gukuraho neza photoresist—cyangwa gukuraho ibisigazwa byasigaye nyuma yo gukata ibishushanyo (ni ukuvuga descum)—binyuze mu buryo bwiza cyane bwo gucukura photoresist ashe; ibi bituma hatangirika kandi hatavugururwa neza.

**Ibyiza n'Ibiranga**

Imbonerahamwe iri hepfo igaragaza ibyiza by’ikoranabuhanga bidasanzwe n’imiterere ya IoN 200 mu ngano zitandukanye:

**Ingano** | **Ibisobanuro birambuye**

**Uburyo bworoshye cyane** | Ishobora gutunganya wafers zifite umurambararo wa mm 200, ndetse n'ubwoko butandukanye bw'ibikoresho binini. Sisitemu itanga amahitamo atandukanye yo gutanga ingufu za RF kandi ishyigikira imiterere y'ibyumba na electrodes mu bunini butandukanye kugira ngo bihuze neza n'ibisabwa mu buryo bwihariye n'umusaruro uva mu gukora; cyane cyane, icyumba kinini gifite ubushobozi bwa litiro zigera ku 1.200, gitanga umwanya uhagije wo kwagura no kuvugurura sisitemu mu gihe kizaza.

**Imikorere Ikomeye** | Ikoresheje ikoranabuhanga rya RF plasma—kandi itanga module ya microwave plasma y’uburyo bwo kuyikoresha—iyi sisitemu igaragaza uburyo bwo kuyikoresha mu buryo burambuye. Intego yayo nyamukuru ni ukureba ko ibisubizo bihamye kandi bihoraho ku bintu bifite ubugari bwa mm 200. Urugero, mu gihe cyo gukuraho photoresist, iyi sisitemu igera ku gipimo cyo kuyikuramo no kuyikoresha mu buryo bumwe.

**Isuku yo mu rwego rwo hejuru no kubungabunga ibidukikije:** Ubu buryo bukoresha uburyo bwo gusukura "bumutse" - bitandukanye cyane n'uburyo bwa gakondo bwo gusukura imiti ikoreshwa mu mazi - bityo bigakuraho ikibazo cyo gucunga imyanda y'amazi yangiza kandi bukigaragaza nk'ikoranabuhanga "ritangiza ibidukikije".

**Ikoranabuhanga Rikuru n'Ubwiza Bwiza:** Ishingiye ku buhanga bwimbitse bw'imyaka irenga 25 mu bijyanye no gutunganya plasma, PVA TePla izwi cyane mu nganda kubera igihe cy'ibikoresho birenga imyaka 20—ikimenyetso cy'ubwiza bwayo budasanzwe n'uburyo yizewe. Ikoranabuhanga ryayo ryihariye rya microwave plasma rituma ingero zisukurwa neza kandi zitangiritse.

**Imikorere Yoroshye Gukoresha No Gukurikirana Amakuru:** Igishushanyo mbonera cya sisitemu gishyira imbere cyane igenzura rya porogaramu rikoresha uburyo butandukanye, sisitemu z'ubutabazi zirinda kwangirika, na porogaramu yo gufata amakuru. Ibi ntibiha abakoresha ubunararibonye buhanitse kandi bwihuse mu mikorere, ahubwo binatuma bakurikirana neza ibikorwa, bityo bakaba bujuje ibisabwa bikomeye mu rwego rwo kugenzura ubuziranenge. **Ibisobanuro bya tekiniki**

Nubwo ibisobanuro byihariye bya hardware bishobora gutandukana bitewe n'imiterere nyayo, ibi bikurikira by'ingenzi bya IoN 200 byashyizwe ku rutonde hashingiwe ku makuru aboneka ku mugaragaro:

**Ibipimo** | **Ibisobanuro birambuye**

**Ubwoko bw'igikoresho** | Sisitemu yo gutunganya plasma ya RF (Radio Frequency) (Sisitemu ya plasma ya Microwave irahari)

**Ingano ya Wafer/Substrate** | Ifasha kugeza kuri mm 200 (inchi 8)

**Uburyo bwo Gutunganya** | Ishyigikira uburyo bwo gutunganya bwa Batch na Single-wafer/substrate kugira ngo yuzuze ibisabwa bitandukanye bijyanye no guhuza no gukoresha neza ikiguzi

**Imiterere y'Icyumba** | Igishushanyo mbonera cy'imashini, gihuye n'ubwoko butandukanye bwa electrodes n'imiterere y'icyumba

**Ibikorwa by'ingenzi** | Gukuraho Photoresist (Kuvubura/Gukuraho), Gukuraho umwanda ukomoka ku bimera/ibitari umwimerere, Gukoresha ubuso

**Imyuka itunganya** | Ogisijeni (O₂), Argon (Ar), Imyuka irimo fluorine, nibindi.

**RF Power** | Itanga uburyo butandukanye bwo gushyiraho ingufu n'ingufu kugira ngo ihuze n'ibisabwa mu buryo bwihariye (urugero, 13.56 MHz cyangwa 2.45 GHz [Mikoroonde])

**Aho Gukoresha**

Ikoresheje imikorere yayo idasanzwe n'uburyo bworoshye bwo gukora, IoN 200 igira uruhare runini mu nzego zitandukanye z'inganda zigezweho.

**Gukora Semiconductor (Imbere):** Ikoreshwa mu gihe cyo gukora wafer mu gukurura/gukuraho ivu rya photoresist; mu gukuraho photoresist nyuma y’ibikorwa nko gutera ion; no mu gukuraho imyanda ya organic na inorganic ku buso bwa wafer.

**Gupakira mu buryo bugezweho (Inyuma):** Bikoreshwa mu gukora no gusukura ubuso bw'icyuma n'udupira mbere yo gufatanya insinga, kuzishyiraho, no kuzishyira munsi yazo, bityo bigatuma zifatana neza kandi zigashyirwamo umusaruro mwiza.

**MEMS na Optoelectronic Devices:** Ikoreshwa mu gukora MEMS na optoelectronic components kugira ngo ikureho ibice by’ibisigazwa cyangwa ibisigazwa bya photoresist—urugero, gukuraho SU-8 photoresist.

**Inganda Zindi:** Amahame y’ikoranabuhanga ashingiyeho akoreshwa no mu nzego nka siyansi y’ubuzima, ikoranabuhanga ry’ubuvuzi, ikoranabuhanga ry’imodoka, n’indege, aho afasha mu kunoza imikorere n’icyizere cy’ibicuruzwa.

**Incamake**

Muri make, PVA TePla IoN 200 ni sisitemu ikomeye yo gutunganya plasma itanga uburyo bworoshye bwo gukora. Itanga imikorere myiza mu gusukura neza, gukuraho photoresist, no gukoresha ubuso, bigatuma ikoreshwa neza cyane mu bushakashatsi no guteza imbere ubushakashatsi mu bya laboratwari ndetse no mu bikorwa biciriritse birimo substrates za mm 200 cyangwa ntoya. Imiterere yayo yoroshye ya modular hamwe n'imikorere yayo ikomeye bigaragaza ko ari igisubizo cyizewe mu bijyanye na semiconductor, microelectronics, ndetse n'ibicuruzwa bigezweho.