Isicoci seplasma saseNordson MARCH AP-600

I-Nordson MARCH AP-600 yinkqubo yokulungisa i-vacuum plasma eqhelekileyo. Idume ngokuthembeka kwayo okugqwesileyo kunye nokulula ukuyisebenzisa, le nkqubo idlala indima ebalulekileyo kumacandelo amaninzi, kuquka ukwenziwa kwee-semiconductor, ii-microelectronics, kunye nokuveliswa kwezixhobo zonyango.

**Iinkcukacha zoBugcisa eziPhambili**

Ezi zilandelayo ziinkcukacha zobugcisa eziphambili ze-AP-600, ezenzelwe ukukunika umbono omfutshane wemisebenzi yayo ephambili kunye nobuchule bokusebenza.

**Into ecacileyo** | **Ipharamitha ecacileyo**

**Uhlobo lweZixhobo** | I-Benchtop, Inkqubo yokuCwangcisa iPlasma ye-Vacuum yeBatch ezenzekelayo ngokupheleleyo

**Ubukhulu (Ububanzi × Ububanzi)** | 569 × 869 × 704 mm

**Ubunzima obupheleleyo** | 221 kg (487 lbs)

**Izinto zegumbi** | Izixhobo ze-Aluminium kunye ne-Aluminium ezikumgangatho ophezulu

**Umthamo weGumbi** | Iilitha ezingama-50.4

**Ubonelelo lwaMandla eRF** | Umgangatho: 600W @ 13.56 MHz (Ixhotyiswe ngeNethiwekhi yokuHlanganisa i-Impedance eZenzekelayo)

**Uqwalaselo lwe-Electrode** | Ixhasa ukuya kuthi ga kwiitreyi ze-electrode ezisuswayo ezilungisekayo kwindawo ezisi-7 (Ixhasa iiModi zePlasma ezithe ngqo nezisezantsi)

**Ulawulo lweGesi** | Umgangatho: Iitshaneli ezi-2; Inokulungiselelwa ngabalawuli bokuhamba kombane ukuya kuthi ga kwi-4 (ii-MFC)

**Inkqubo yoLawulo** | Ulawulo lwe-PLC + Ujongano lwe-Touchscreen Human-Machine (HMI); Ixhasa ukuBekwa kweliso kwenkqubo ngexesha langempela kunye nokuFumaneka kwedatha

**Iimpawu eziphambili kunye neenzuzo**

Ukusebenza okugqwesileyo kwe-AP-600 kuvela kwezi mpawu zilandelayo ziphambili:

**Ukulingana Kokusebenza Okugqwesileyo:** Injongo ephambili yoyilo lwe-AP-600 kukufezekisa iziphumo "ezifana kakhulu" zokucoca nokucubungula i-plasma. Le njongo ifezekiswa ngokudityaniswa okungenamthungo kombane wayo we-13.56 MHz RF kunye nenethiwekhi yokufanisa i-impedance ezenzekelayo, ukuqinisekisa iziphumo eziphindaphindwayo kakhulu kuyo yonke inkqubo.

**Iindlela zokuSebenza eziGuquguqukayo neziSebenza ngeendlela ezahlukeneyo:** Uyilo lwetreyi eguquguqukayo yenkqubo luxhasa iindlela ezintathu ezahlukeneyo zokumisela i-electrode: Isebenza ukusuka emhlabeni, iyasebenza ukusuka emhlabeni ukuya kumandla, kunye nesebenza ukusuka emhlabeni ukuya kumandla. **Indlela yePlasma ethe ngqo:** Isebenzisa ii-ion ezinamandla aphezulu ukwenza ngaxeshanye ukuqhushumba kunye neempendulo zeekhemikhali kumphezulu wesampuli; lukhetho olufanelekileyo lokusebenza komphezulu kunye nokusetyenziswa kokucoca okunzulu. **Indlela yePlasma esezantsi (ekude):** Ibeka isampuli kumgama othile ukusuka kumthombo weplasma, iyibeka kuphela kwi-free radicals ehlala ixesha elide. Inkqubo yokucoca kule ndlela ithambile, okwenza ifaneleke ngakumbi kwizixhobo ezichanekileyo zokucubungula ezibuthathaka kwi-ion bombardment okanye ezisengozini yomonakalo we-electrostatic discharge (ESD). **Ukusebenza okulula nokukhuselekileyo:** Inesibonisi sesikrini esilawulwa yi-PLC esibonakalayo kwaye sisebenziseka lula, sibonelela ngomboniso wexesha langempela weeparameter zenkqubo kunye nolwazi lwesimo. Ucango lokhuseleko oludibeneyo kunye noyilo lwephaneli olususwayo luqinisekisa ukhuseleko lokusebenza ngelixa lulula ukugcinwa kwesiqhelo kunye neenkqubo zokusebenza zangaphakathi.

**Ukuhambelana kweGesi yeNkqubo eBanzi:** Ixhasa uluhlu olubanzi lweegesi zenkqubo, kuquka iArgon (Ar), iOksijini (O₂), iHydrogen (H₂), iHelium (He), kunye neegesi ezinefluorine (umz., iCF₄).

**Uqhagamshelo lweZixhobo oluLula:** Ibonelela ngeendawo zonxibelelwano zezixhobo ezifikelelekayo ngokulula ukuze zilungele iimfuno ezahlukeneyo ezincedisayo, ezinje ngokulinganisa rhoqo kunye nokuqinisekisa.

**IiNdawo zeSicelo eziBanzi**

Ngokusekelwe kwiimpawu ezikhankanyiweyo apha ngasentla, inkqubo ye-AP-600 isebenza ngokubanzi kwiinkalo ezininzi:

**Intsimi yesicelo** | **Imizekelo ethile yesicelo**

**Ukwenziwa kweSemiconductor kunye neMicroelectronics** | - **I-Die Attach Ngaphambi konyango:** Iphucula ukunamathela kwe-die.

- **Ukubopha ngentambo Ngaphambi konyango:** Kuphucula amandla okubopha.

- **Ukubumba Ngaphambi konyango:** Kunciphisa ukwahlukana kweepakethe.

- **Flip-Chip Underfill Ngaphambi konyango:** Iphucula izinga lokuhamba kwamanzi angaphantsi komhlaba, inciphisa izithuba, kwaye iphucula ukunamathela.

- **Ukususwa kwePhotoresist / Descum:** Isusa iintsalela eziseleyo emva kweenkqubo zokugrumba.

- **Ukususwa kweeNgcoliso ezahlukeneyo:** umz., ii-organic contaminants, i-grease, uthuli, ii-oxides, kunye nee-nanoparticle residues. **IiSayensi zezeMpilo nezoBomi** | - Ukucoca kunye nonyango lokubopha izixhobo zonyango ezifana nee-stents kunye nee-catheters; ukuvumela ukubopha kwezinto ezahlukeneyo ezinokuba nzima ukuzidibanisa; ukunciphisa ukunamathela komphezulu wezinto ze-silicone ezibunjwe ngenaliti.

- Unyango lomphezulu we-biochips kunye nezixhobo ze-microfluidic.

**Amanye Amacandelo Okuvelisa Aphucukileyo** | - **Ukuvelisa iiPCB:** Ukususwa kweentsalela zomphezulu kunye nokusebenza komphezulu ukuphucula ukuthembeka kweenkqubo zokugquma ezilandelayo.

- **I-Optoelectronics kunye ne-Advanced Packaging:** Ukuphucula ukufuma komphezulu ngaphambi kokuba kwenziwe amanyathelo ahlukeneyo okupakisha, ngaloo ndlela kuphucula ukusebenza kakuhle kwemisebenzi yokufaka izitya kunye nokugcwalisa.

**Umgaqo Wokusebenza**

Ukucoca i-plasma kubandakanya iintlobo ezimbini zeendlela: ezomzimba nezekhemikhali.

**Impendulo Yomzimba:** Ii-ion ezinamandla aphezulu ezivela kwiigesi ezingasebenziyo—ezifana ne-Argon (Ar)—zisetyenziselwa "ukuqhushumba" umphezulu, zisusa ngempumelelo izinto ezincamathelayo.

**Impendulo Yekhemikhali:** Iigesi ze-oksijini (O₂) okanye ezine-fluorine ziyangeniswa; ii-free radicals ezikwi-plasma ephumayo zisabela kwizinto eziphilayo kumphezulu ukuze zenze ii-byproducts zegesi, ezithi emva koko zikhutshwe yipompo ye-vacuum.

Iindlela ezimbini zokusebenza ze-AP-600 zenzelwe ukulinganisela phakathi kwezi ndlela zimbini, ezenzelwe ngokukodwa ukuhlangabezana neemfuno zenkqubo ethile.

**Inkqubo yeNtlalo eSebenzisanayo**

Ngaphakathi komgca opheleleyo wemveliso, i-AP-600 isebenza rhoqo kunye nezixhobo ezingqongileyo:

**Ngezinye Izixhobo zeNordson:** Kwimigca ye-SMT okanye yokupakisha, i-AP-600 ingasebenza ngokubambisana neenkqubo zokukhupha/zokufaka i-ASYMTEK zeNordson okanye iivalvu zokukhupha ezichanekileyo ze-EFD. Inkqubo iqala ngokucoca i-plasma ukuze kusebenze umphezulu kwaye kuphuculwe amandla omphezulu, kulandele ukukhupha ngokuchanekileyo ukuze ekugqibeleni kufezekiswe iziphumo zokubopha okanye zokufaka ezikumgangatho ophezulu.

**Ngezinye Izixhobo Zenkqubo:** Kwimisebenzi yokwenziwa kwe-IC, i-AP-600 idla ngokusetyenziswa kunye nezixhobo ezifana neenkqubo ze-lithography, ii-ion implanters, ii-plasma etchers, ii-scanning electron microscopes (SEM), kunye neenkqubo zokuvavanya izixhobo, ezibonelela ngendawo yomphezulu ecocekileyo kwiindawo ezibalulekileyo zenkqubo.

**Isishwankathelo**

Ngamafutshane, i-Nordson MARCH AP-600 yinkqubo yokucubungula i-plasma yedesktop ekumgangatho wophando edibanisa ukuchaneka okuphezulu, ukuguquguquka okugqwesileyo, kunye nokusebenza kakuhle kweendleko. Ijongana ngempumelelo neemfuno ezingqongqo zokucoceka komphezulu kunye nokunamathela okufumaneka kwiindawo ezifana nee-semiconductors, ii-microelectronics, kunye nezixhobo zonyango, okwenza ukuba ibe lukhetho olufanelekileyo lwenkqubo yophando kunye nophuhliso okanye imveliso encinci.