Isicoci seplasma sikaNordson MARCH AP-300

I-Nordson MARCH AP-300 yinkqubo yeplasma ye-vacuum edibeneyo nengabizi kakhulu. Amandla ayo angundoqo akwinhlanganisela yombane we-13.56 MHz RF kunye nenethiwekhi yokufanisa i-impedance ezenzekelayo, evumela ukuba inikeze iziphumo ezibalaseleyo, ezizinzileyo, nezifanayo zokucubungula iplasma ngaphakathi kwe-compact footprint.

**Umgaqo Wokusebenza**

I-AP-300 isebenza ngokusebenzisa ipompo ye-vacuum ukukhupha igumbi liye kwimeko ye-vacuum ephezulu, emva koko kungeniswa iigesi zenkqubo ethile. Ngokusebenzisa amandla e-RF e-13.56 MHz, igesi ifakwa kwi-ion ukuze yenze i-plasma. Amasuntswana anamandla aphezulu kunye neentlobo ezisabelayo kwi-plasma zenza ii-bombardment ezibonakalayo okanye ii-chemical reactions kumphezulu wezinto, ngaloo ndlela zifezekisa ukucoca umphezulu, ukusebenza, okanye ukugrumba.

**Imisebenzi Ephambili kunye neeNkqubo**

Umsebenzi oyintloko we-AP-300 kukubonelela ngendawo yeplasma ezinzileyo nelawulekayo. Ngokuyintloko iphucula umgangatho kunye nokuthembeka kweemveliso zokugqibela ngokusebenzisa iindlela ezintathu eziphambili:

**Udidi lomsebenzi** | **Indlela yokuphumeza kunye nesiphumo**

**Ukucocwa kwePlasma** | Isusa ungcoliseko lwezinto eziphilayo kunye nee-oxides kumphezulu wezinto, ifezekisa ucoceko olukumgangatho weathomu.

**Ukusebenza Komphezulu** | Ingenisa amaqela asebenzayo e-polar—afana namaqela e-hydroxyl kunye ne-carboxyl—kumphezulu wezinto, ngaloo ndlela inyusa amandla omphezulu kunye nokufuma ukuze kuphuculwe ukunamathelana nezinye izinto.

**Ukukrola / Ukuhla** | Isebenzisa iigesi zenkqubo ezine-fluorine (umz., i-CF₄) ukwenza ukukrola okuchanekileyo kwe-anisotropic okanye i-isotropic kwizikali ze-micron okanye ze-nanometer; iyakwazi ukususa iintsalela ze-photoresist kwii-wafers.

**Iingenelo eziphambili kunye neempawu**

Uyilo lwe-AP-300 lubonakalisa ulungelelwano oluhle phakathi kokusebenza kunye nokuguquguquka kwindawo encinci. Iimpawu zayo eziphambili zichazwe ngezantsi:

**Udidi** | **Uphawu oluPhambili** | **Inkcazo eKhethekileyo**

**Iingenelo** | **Ukufana Okuphezulu Nokuphinda-phinda** | Ijenereyitha ye-RF ye-13.56 MHz, edityaniswe nenethiwekhi yokufanisa i-impedance ezenzekelayo, iqinisekisa ukuphindaphindeka okungenakuthelekiswa nanto kweziphumo zenkqubo.

**Ukusebenza okulula nokuthembekileyo** | Inenkqubo yolawulo lwesikrini sokuchukumisa esisekelwe kwi-PLC enikezela ngembonakalo yemizobo enobuchule kunye nokujonga inkqubo ngexesha langempela; ulwakhiwo oluqinileyo, olusebenzisa isinyithi kuphela luqinisekisa uzinzo lwexesha elide.

**Ukuguquguquka Nokwanda** | Ixhasa ukuya kuthi ga kwimigca yegesi emine, ilungele iimfuno zenkqubo yeegesi ezifana ne-O₂, i-Ar, i-H₂, i-He, kunye ne-CF₄. **Ixabiso Eliphantsi** | Inikezela ngokusebenza okugqwesileyo kunye nokuguquguquka ngexabiso eliphantsi, okwenza kube lukhetho olufanelekileyo kwi-R&D kunye nemveliso yovavanyo encinci.

**Iimpawu eziphambili** | **Uyilo lweDesktop oluncinci** | Izimele ngokwayo; ifuna kuphela uqhagamshelo lwepompo ye-vacuum yangaphandle kwaye ingena lula kwibhentshi yelebhu eqhelekileyo okanye kwibhentshi yokusebenzela.

**Ulungelelwaniso lweGumbi eliGuqukayo** | Igumbi lenziwe nge-aluminium eqinileyo kwaye lithwala ukuya kuthi ga kwiitreyi ze-electrode ezisuswayo nezihlengahlengiswayo ezisi-7.

**Ixhasa iiModeli zeNkqubo ezininzi** | Ixhasa zombini iiModeli zePlasma eziNgqo (ngokuyintloko ukuqhushumba okubonakalayo) kunye neeModeli zePlasma eziNgqo (ngokuyintloko iiKhemikhali eziDibeneyo), inika ukuguquguquka kokuhlangabezana neemfuno ezahlukeneyo zenkqubo.

**Iinkcukacha ezineenkcukacha**

**Udidi lweParamitha** | **Iinkcukacha ezithile**

**Ubukhulu obupheleleyo (Ububanzi obupheleleyo)** | 569 × 869 × 704 mm

**Ubunzima obupheleleyo** | 221 kg (487 lbs)

**Umthamo weGumbi** | Iilitha ezingama-33.1

**Inani lee-Electrode** | Ukuya kuthi ga kwi-7

**Isithuba se-Electrode** | 25.4 mm (1 intshi)

**Amandla eRF aqhelekileyo** | 300 W @ 13.56 MHz

**Ulawulo Lokuhamba Kwegesi (MFC)** | 2 zibandakanyiwe njengomgangatho; zinokundiswa ukuya kuthi ga kwi-4

**Iigesi Ezihambelanayo** | Ar, O₂, H₂, He, CF₄, njl.

**Iindawo eziBanzi zoSetyenziso**

I-AP-300 ineendlela ezahlukeneyo zokusetyenziswa, idlala indima ebalulekileyo—ingakumbi kula macandelo alandelayo aphambili kwezoshishino:

**IiSemiconductors kunye neeMicroelectronics:** Zisetyenziswa kakhulu ekucoceni i-activation ngaphambi kokuba i-die bonding, i-wire bonding, kunye ne-flip-chip underfilling; kunye ne-post-lithography resist stripping kunye ne-plasma treatment ngaphambi kokuba i-wafer-level packaging ibekwe.

**Iibhodi zeSekethe eziPrintiweyo kunye neNdibano ye-elektroniki:** Isusa ngokufanelekileyo izinto ezingcolisayo—ezifana nokugeleza okushiyekileyo—kwaye iphucula ukufuma komphezulu ngaphambi kweenkqubo ezifana nokugquma okufana nokugcina kunye nokuzalisa ngaphantsi.

**IiSayensi zezeMpilo nezoBomi:** Ibonelela ngokusebenza okuthembekileyo kokucoca kwiinkqubo zokubopha kunye nokwenza izakhiwo ezintsonkothileyo, ezifana neetships ze-microfluidic.

**Isishwankathelo**

Ngamafutshane, iNordson MARCH AP-300 yinkqubo yeplasma yedeskithophu edibanisa ngokumangalisayo ukuchaneka kophando, ukuthembeka komgangatho wemizi-mveliso, kunye nobulula bokusebenza obulula ukuyisebenzisa. Ixabiso layo eliphambili likwindawo yokugcina amandla anamandla ngaphakathi kwento encinci, okwenza ukuba ibe lukhetho olufanelekileyo kuzo zombini izicelo ze-R&D kunye nezicelo zemveliso ezincinci kuzo zonke ii-semiconductor, microelectronics, kunye nezonyango.