sitasiyo ya CCRETECH UF200R yo gupima semiconductor

ACCRETECH UF200R ni igikoresho cy’ikoranabuhanga cyikora kandi gihendutse cya ACCRETECH (Ubuyapani) gipima uduce twa wafer twa mm 120–200 (inchi 5–8). Gikoreshwa mu gupima amashanyarazi (CP) uduce twa wafer mbere yo gukata uduce.

Bikora iki?

Mu magambo make: Mbere yuko wafer icibwamo uduce duto, imashini zikora isuzuma ry’amashanyarazi/imikorere, zitandukanya uduce twiza n’utw’ibinure. Icyiciro: Gupima Wafer (CP)

Intego: Mbere na mbere 200mm (8-inch), ikwiriye kandi gukaraba imigati ya santimetero 5/6

Udupira dusanzwe: Logike, Analog, Ibikoresho by'Ingufu, Ibikoresho Bitandukanye, MEMS

II. Ibisobanuro by'ingenzi (Muri make)

Ingano ya Wafer: 120/150/200mm (5–8-inch)

Ubuziranenge bw'aho uherereye: ± 1.5μm (XY)

Umuvuduko wo kugenda:

XY: Kugeza kuri mm 300/s

Z: Kugeza kuri mm 30/s

Ingano y'ubushyuhe: -40℃ ～ +150℃ (Uburyo bwo kugenzura ubushyuhe)

Icyiciro: Platifomu ya Z/θ ikomeye cyane, ijyanye n'udupira tw'inka tworoshye cyane/dufite ibara ry'umuhondo

Imikorere: Gupakira no gupakurura byuzuye mu buryo bwikora, guhuza mu buryo bwikora, kugenzura icyuma gipima

III. Imirimo y'ingenzi

Uburyo bwo Gupima Bwikora ku buryo bwuzuye

Gupakira Wafer mu buryo bwikora → Guhuza Ishusho → Guhuza na Probe → Gupima amashanyarazi → Gutandukanya no gufata amajwi → Gupakurura mu buryo bwikora

Guhuza Ibyiciro Binini

Isuzumabumenyi risanzwe, Analog, Ingufu, MOSFET, Diode, Transistor, MEMS Byose bishobora gupimwa. Ingano y'ubushyuhe bwinshi n'ibizamini byihariye. Amahitamo yuzuye yo gupima ubushyuhe buri hasi/hejuru, micro-current, high-voltage, nibindi. Gutunganya wafer yoroshye cyane/igoranye. Gukoresha umuyoboro w'inyuma + uburyo bwihariye bwo kuyikoresha, bushyigikira wafer yoroshye cyane (≤50μm) n'iyoroshye cyane.

IV. Ibyiza (Ugereranije n'ibicuruzwa bisa)

Igipimo cy'ibiciro n'imikorere biri hejuru: Hafi y'ubuziranenge n'urutonde rwa UF2000 yo mu rwego rwo hejuru (kimwe na MMI), ariko ku giciro gito.

Ikoreshwa ry'ikoranabuhanga rigezweho: XY yihuta cyane + ikarita yo guhindura pin vuba, ikwiriye imiyoboro minini ya santimetero 20.

Ihamye kandi yizewe: Platifomu ya ACCRETECH ikuze, idakorerwaho isuku cyane, kandi iramba.

Kwagura byoroshye: Igishushanyo mbonera cya modular, gishobora kongerwamo nyuma hakoreshejwe uburyo bwo kugenzura ubushyuhe, voltage nyinshi, micro-current, dual-bin, nibindi.

V. Igereranya risanzwe (rigufasha kubona vuba ibicuruzwa bikwiye)

UF200R: Ishyirwa imbere muri rusange mu gukora ibintu bya santimetero 8, logique/power/discrete, kandi igiciro cyabyo kikaba cyiza.

UF190R: Ifite ubushobozi bwo gukora ibintu bito, byo mu rwego rwo hejuru, ibogamiye ku bikoresho bitandukanye/udutsiko duto.

UF2000: Ifite ubushobozi bwo hejuru bwa santimetero 8, ifite ikoranabuhanga rigezweho, ifite ubushobozi bwo kugenzura ubushyuhe bwagutse, MEMS/ Ikoranabuhanga rigezweho

Muri make: UF200R ni "ikigo cy'ingenzi gipima gihendutse kandi gihendutse" ku isoko rya santimetero 8 hagati mu igeragezwa - itanga ubuziranenge buhagije, umuvuduko wo hejuru, ituze, iramba, kandi ishobora kwaguka, bigatuma ikoreshwa mu gukora imirongo myinshi ya santimetero 8.