Imashini yo gushyira ikimenyetso cya laser ya ThinkLaser HM300 wafer

ThinkLaser HM300 ni imashini ikora ikimenyetso cya laser yikora ku buryo bwikora, yakozwe by’umwihariko kugira ngo ihuze n’ibisabwa mu buryo bukomeye bwo gushyira ikimenyetso mu buryo bwimbitse—bizwi nka “gushyiraho ikimenyetso gikomeye”—ikomoka mu gukora wafer ya semiconductor. Agaciro kayo k’ingenzi kari mu bushobozi bwayo bwo kwandika kode zihoraho zo kumenyekanisha kuri wafer binyuze mu buryo bwo kugenzura ubujyakuzimu bushoboka; izi kode zirakomeye bihagije kugira ngo zihangane n’imihangayiko iterwa n’ibikorwa byo gukora ibintu bikomeye, bityo bigatuma ibicuruzwa bikurikiranwa neza mu buzima bwabyo bwose—kuva mu gukora no gupakira chips kugeza ku igeragezwa rya nyuma.

**Ikoranabuhanga ry'ingenzi n'ibisobanuro by'ingenzi**

Ishingiro ry'ikoranabuhanga rya HM300 rishingira ku bintu bitatu by'ingenzi: ubujyakuzimu, ubushishozi, no gukora ku buryo bwikora. Ibisobanuro byayo bya tekiniki byihariye ni ibi bikurikira:

**Igikoresho** | **Ibisobanuro / Ibisobanuro**

**Ubwoko bw'Ibikoresho** | Sisitemu yo Gushyira Ikimenyetso cya Laser Ikomeye Yikora Yonyine

**Ikoreshwa ry'intego** | Yagenewe by'umwihariko gukoresha ikimenyetso gikomeye cya semiconductor wafer, ikurikije ibisabwa n'ibipimo bya SEMI

**Imikorere y'ingenzi** | Igenzura ry'ubujyakuzimu rishobora gutegurwa: Ubujyakuzimu bushobora guhindurwa, bugera ku bujyakuzimu ntarengwa bwa mikoroni 110 (µm), hamwe n'ubujyakuzimu bungana na ± 10%

**Ikoranabuhanga ry'ibanze** | Dual-Spot Optics™: Ikoresha igishushanyo cy'urumuri rw'amatara rubiri rutuma porogaramu ihinduranya hagati y'ingano ebyiri zitandukanye z'amatara ya laser (kuva kuri 50 µm kugeza 110 µm) muri sisitemu imwe.

**Gukurikirana Sisitemu** | Gukurikirana Sisitemu Byuzuye: Yandika neza amakuru yose y'imikorere ya laser

**Ikoranabuhanga rya Automation** | Ifasha imiyoboro ya SECS II/GEM kugira ngo yorohereze imicungire y'imikorere y'uruganda

**Guhuza Wafer** | Ifite ingano ya wafer ya 100mm kugeza 200mm (ubufasha bwo kuyikoresha ku mapane ya 300mm/310mm burahari; ubushobozi bwo kuyikoresha bwemezwa binyuze mu makuru asanzwe)

**Imikorere, Ibyiza, n'Imiterere**

Ikoresheje ikoranabuhanga rigezweho, HM300 ikemura neza ibibazo by'ingenzi mu bijyanye no gushyira ibimenyetso bya wafer:

**Ubushobozi bwo "Gushyiraho Ikimenyetso Gikomeye" mu Mikorere Ikomeye:** Bitandukanye na "Gushyiraho Ikimenyetso Gikomeye", ubushobozi bwa HM300 bwo "Gushyiraho Ikimenyetso Gikomeye" butanga ibimenyetso by'ubujyakuzimu buhagije. Ibi byemeza ko ibimenyetso bigumaho - nta kwangirika cyangwa gushwanyagurika - mu mikorere ikurikiraho ikomeye (nk'isukura ubushyuhe bwinshi, gusukura imiti, no gusya imashini), bityo bigakomeza gukurikirana neza ibikorwa byose. **Uburyo bworoshye kandi bworoshye:**

**Ubujyakuzimu bugenzurwa:** Uburyo bwo kugenzura ubujyakuzimu bushobora gukorwa (butanga ubuziranenge bwa ± 10% n'uburebure bwa 110 µm) buha abakiriya ubushobozi bwo kunoza neza ubujyakuzimu bw'ikimenyetso, bugatuma gihura neza n'ibisabwa byihariye. **Ingano y'ahantu hashobora guhindurwa:** Ikoranabuhanga ryayo rya Dual-Spot Optics™ rifite uburenganzira bwo guhinduranya porogaramu hagati y'ingano ebyiri z'ahantu hashobora guhindurwamo laser (50 µm na 110 µm) nta guhindura ibikoresho, bityo bigahuza ubwoko butandukanye bw'ibikoresho byo gushyiramo ikimenyetso n'ibisabwa byihariye by'ubwiza.

**Ikoranabuhanga n'Imicungire y'Ubwenge:**

**Imikorere Yikora:** Itanga ubushobozi bwo gukoresha ibikoresho byikora, ikagabanya ibikorwa by'abantu kandi ikagabanya ubushobozi bwo gukora amakosa.

**Inkunga ya Porotokole ya SECS/GEM:** Ishyigikira protocole zisanzwe zo gukora ikoranabuhanga (SECS II/GEM), zemerera guhuza neza na sisitemu zo gukora (MES) z'ibikoresho bigezweho bya semiconductor kugira ngo habeho kugenzura imiterere y'ibikoresho mu gihe nyacyo no gucunga ibipimo by'imikorere mu buryo bwa kure.

**Kubika amakuru mu buryo bwuzuye:** Sisitemu yandika neza amakuru yose y’imikorere ya laser, itanga ishingiro rikomeye ryo gusesengura inzira no gukurikirana ubuziranenge.

**Ibikoresho byagutse n'uburyo bihura:**

Iyi sisitemu yagenewe by’umwihariko abakiriya bakora mu bijyanye na semiconductors zivanze, node zigezweho zo gupakira, ndetse n’ibipfunyika bigezweho, ikemura neza imbogamizi zijyanye no gushyira ibimenyetso ku bikoresho bya semiconductor byo mu gisekuru gitaha nka SiC, GaN, na GaAs.

Filozofiya yayo yo gushushanya irenze kure imirimo y'ibanze yo gushyira ikimenyetso; ishyirwa mu mwanya wa "igisubizo cyuzuye cyo gushyira ikimenyetso ku mugozi," gishobora gusuzumwa no kuvugururwa mu buryo bwihariye—bujyanye n'ibikoresho byihariye bya wafer n'ingano—kugira ngo ihuze n'ibisabwa byihariye.

**Aho Gukoresha**

HM300 ni ibikoresho by'ingenzi mu bijyanye n'inganda za semiconductor no gupakira ibintu bigezweho, bikoreshwa cyane cyane mu nzego zikurikira:

**Gukora Semiconductors (Front-end na Back-end):** Itanga indangamuntu zihoraho zihamye ku bikoresho bya substrate wafers—harimo silicon, SiC, na GaN—bityo igafasha gucunga umurongo wikora no gukurikirana ubuziranenge mu nganda zikora (Fabs) no mu nganda zikora/zipima.

**Pakingi igezweho:** Itanga ikimenyetso cyizewe ku mapaki cyangwa pani zakozwe bundi bushya muri gahunda yo gupakira ku rwego rwa Wafer (WLP) na Panel-Level Pakingi (PLP).

**Gukorana n'ibindi bicuruzwa bya ThinkLaser**

ThinkLaser itanga uburyo bwinshi bwo gushyira ibimenyetso ku ibara rya wafer, aho HM300 igira uruhare runini:

**Guhuza Ibikoresho byo Gushyiramo Ibimenyetso Byoroshye:** Kuri uwo murongo umwe wo gukora, HM300 ishobora gukorana na SC300 ya ThinkLaser (uburyo bworoshye bwo gushyiramo ibishushanyo ku mavuta ya 300mm) cyangwa SigmaClean (uburyo bworoshye bwo gushyiramo ibishushanyo ku mavuta ya 100–200mm). Abakora bashobora guhitamo mu buryo bworoshye ikoranabuhanga ryo gushyiramo ibishushanyo rikwiye hashingiwe ku ngingo runaka z’imikorere cyangwa ibyo abakiriya bakeneye.

**Incamake**

Muri make, ThinkLaser HM300 ni sisitemu yihariye, yo mu rwego rw'inganda yagenewe gutanga ikimenyetso cy'ubujyakuzimu gihoraho kandi gicungwa neza, kandi cyujuje ibisabwa mu nganda. Binyuze mu kugenzura ubujyakuzimu, ikoranabuhanga ryayo ry'ubujyakuzimu bubiri, hamwe n'ubushobozi buhanitse bwo kwikora, ikemura neza ikibazo gikomeye kiri mu nganda za semiconductor cyo gukomeza gukurikirana ibicuruzwa mu miyoboro y'ubujyakuzimu ikoresha imbaraga nyinshi; ni igikoresho cy'ingenzi mu gukora no gupakira wafer igezweho. Uwayikoze, ThinkLaser, afite uburambe bw'imyaka irenga 80 mu itsinda muri uru rwego kandi afite umugabane ugera kuri 80% ku isoko muri Leta Zunze Ubumwe za Amerika.