TEL CELLESTA™ -i MD wafer cleaner

TEL CELLESTA™ -i MD ni sisitemu yo gusukura ya Tokyo Electron (TEL) ifite uburebure bwa mm 300 yo gukoresha 10nm ndetse n'uduce duto two gukora. Yagenewe by'umwihariko gukemura ibibazo by'ingenzi nko kwangirika kw'inyubako zifite imiterere mito mu gihe cyo gusukura no kumisha mu buryo bugezweho, kandi ni igikoresho cy'ingenzi gifasha mu kunoza umusaruro w'udupira tw'igiciro cyo hejuru.

Imikorere y'ingenzi: Isesengura ry'ikoranabuhanga n'inkunga y'amakuru

Kugira ngo dutange ubumenyi bwihuse, ibintu by'ingenzi bya tekiniki byayo ni ibi bikurikira:

Ibiranga by'ingenzi Ibipimo by'imikorere n'ibisobanuro bya tekiniki

Gushyira mu bikorwa icyerekezo cy’imirongo ya 10nm n’izindi mashini zigezweho, zihariye mu gusukura no gukuraho utunyangingo tw’ubuso bw’imashini zifite ishusho.

Ikoranabuhanga ry'ingenzi: Gusukura no kumisha bitanga imiterere yo kumisha idasenyuka binyuze mu kugenzura ikirere cyo mu cyumba no kunoza imikorere y'iminwa ya IPA (isopropyl alcohol); bishobora gukoresha imiti nka SC-1 na DHF mu gukata amazi; kandi bishobora guhuza imirimo yo gusukura umubiri nko koza no gutera amazi abiri.

Umusaruro n'imikorere myiza: Ishobora gushyirwa mu buryo bufite ibyumba 20 byo gusukura, ikaba ifite ubushobozi bwo gukaraba 1000 ku isaha (WPH), kandi igafasha kwagura ibikoresho byo gusukura byoroheje.

Gukoresha ku giciro gito: Sisitemu yo kongera gukoresha imiti ikoreshwa mu buryo bwa "Chemical Recycle" igabanya cyane ikiguzi cy'imikorere (CoO) kandi ikagabanya ikoreshwa rya aside sulfurike.

Kwizerwa: Sisitemu yayo yo gutwara abantu imaze gukora ibyuma bya wafer inshuro miliyoni 750 nta makosa igenzura, bituma umusaruro wayo uhora uhindagurika cyane.

Porogaramu: Kubera ikoranabuhanga ryayo rikomeye n'imikorere yayo ihamye, CELLESTA™ -i MD ikoreshwa cyane mu gukora ibikoresho bya semiconductor bigezweho, igira uruhare runini muri ibi bikurikira:

Udupira twa Logic: Dutanga ubuso bwiza bwa wafer bwo gukora utupira twa logic dufite imikorere myiza nka CPU, GPU, na poroseseri za AI.

Udupira two kwibuka: Dukoreshwa mu gukora utupira two kwibuka nka DRAM na 3D NAND Flash, tugenzura ko uturemangingo tw’ububiko bw’amakuru ari ingirakamaro kandi ko ari ingirakamaro.

Gupakira bigezweho: Bikoreshwa cyane mu ntambwe zo gusukura ibikorwa byo gupakira bigezweho nka BSI (back-illuminated), 3D stacking, back-power, na SoIC (system-on-chip).

Isuzuma ry'Inganda n'Imyanya Iboneka ku Isoko

Nk'icyitegererezo cyo ku rwego rwo hejuru muri CELLESTA, -i MD ihagarariye urwego rwo hejuru rwa TEL mu isuku ya single-wafer. Kubera imikorere yayo myiza yo gusukura no kwizerwa cyane, uru ruhererekane rw'ibikoresho byo gusukura hamwe na SCREEN, rufite umwanya ukomeye ku isoko mpuzamahanga ry'ibikoresho byo gusukura bya semiconductor, bigatuma iba igikoresho cy'ingenzi gishyigikira ikorwa ry'ibikoresho bigezweho.