Imashini isya wafer ya DISCO DFG8541

DISCO DFG8541 ni imashini isya yuzuye ikora mu buryo bwikora yakozwe kugira ngo ihuze n'ibikenewe mu gusya wafer ku duce duto twa santimetero 20. Mu rwego rwo kuvugurura ugereranije n'iyabanjirije, DFG8540 yagurishijwe cyane, ishobora gushyirwa mu mwanya wa "model y'ingenzi mu gusya wafer ya santimetero 20," izwiho ubuhanga bwayo bwo hejuru, isuku nyinshi, no kudahungabana cyane, cyane cyane ikwiriye gutunganya ibikoresho bikomeye kandi byoroshye nko muri silicon carbide (SiC).

Ibi bikurikira ni intangiriro irambuye ku ihame ry'imikorere yaryo, imikorere y'ingenzi, ibipimo, n'agaciro k'isoko.

Ihame ry'imikorere: Ihuriro ry'imikorere myiza n'ubuziranenge mu buryo bubiri

DFG8541 ikoresha imiterere ya "dual-spindle, three-suction-cup".

Itsinda ry’Umurimo Risobanutse: Ipine imwe ikoresha ipine risya cyane kugira ngo ikurweho vuba ibikoresho by’ingenzi inyuma y’ipine; indi ipine ikoresha ipine risya neza kugira ngo isohoze neza ubuso, bigere ku musaruro mwiza, ugororotse kandi utangiritse.

Uburyo Bunoze Cyane: Agace k'umugati gashyirwa ku meza yo gukoreramo. Binyuze mu igenamigambi ryimbitse ry'uburyo bwo gukora, inzira y'imikorere yikora "ifata rimwe gusa, ikomeza gutunganywa" iragerwaho, hirindwa ibyago byo kwandura no kwangirika guterwa no kwimura ibikoresho hagati y'ibikoresho bitandukanye.

Porogaramu n'inshingano: Uretse Silicon

Nk'igikoresho gikoreshwa muri rusange, kigira uruhare runini mu ishami rya semiconductor ry'igisekuru cya gatatu.

Inshingano y'ingenzi: Gukata uduce twa santimetero 2.5 n'utundi duto (Si/SiC) kugira ngo tugire ubunini, kugira ngo ubunini bube bwiza cyane (TTV), no gukuraho ibice byangiritse ku buso byatewe n'ibikorwa byakozwe mbere.

Emerging Mainstay: Mu guhitamo spindle ifite torque nyinshi, DFG8541 ishobora gutunganya neza ibikoresho bikomeye cyane nka SiC. Iyi ni yo mpamvu nyamukuru ituma ikunzwe cyane ku isoko ry’ibikoresho by’amashanyarazi muri iki gihe.

Incamake y'ibipimo by'ingenzi

Icyiciro cya Parametero | Ibisobanuro byihariye

Ibikoresho bikoreshwa: santimetero 200 no munsi yabyo; bihuye na wafers za santimetero 4, 5, 6, na 8 zikoresha agace k'ubugari

Uburyo bwo gusya: Gusya mu buryo bwo kuzenguruka mu buryo bworoshye

Imiterere y'umugozi: Imigozi ibiri (imigozi ibiri), umugozi ufata umwuka ukoresheje amazi (usanzwe)

Umuvuduko w'uruziga: 1,000 - 7,000 rpm

Ingufu z'umugozi: Isanzwe 4.2 kW

Imiterere y'imbonerahamwe y'akazi: Imbonerahamwe eshatu z'akazi (imbonerahamwe 3 z'amacupa)

Ibisobanuro by'uruziga rwo gusya: Uruziga rwo gusya rwa Φ200 mm rwa diyama

Ingano z'ibikoresho (Uburebure x Ubwinshi x Ubwinshi): Hafi 1.100 × 2.800 × 1.800 mm

Uburemere bw'ibikoresho: Hafi 3.000 kg

Imikorere n'Ibiranga by'ingenzi

DFG8541 iragaragaza iterambere rikomeye ugereranije na DFG8540.

Ibiranga/Imikorere Ibisobanuro birambuye

Ubushobozi bwo gusukura neza: Imashini nyinshi zikoresha amazi abiri: Ugereranije no gusukura amazi asanzwe akoresha umwuka, ibi bikuraho cyane uduce duto tw’umukungugu dufata ku ifu nyuma yo gusya. Iri koranabuhanga rikoreshwa cyane mu bigo by’imirimo nk’ibikombe byo gukurura n’ibikoresho byo gukora, bigabanya neza ibyago byo kwangirika kw’ifu y’umukungugu.

Guhuza hagati y’aho igice cy’inyuma giherereye: Ikoresha kamera kugira ngo imenye aho igice cy’inyuma giherereye, isimbura aho igice cy’inyuma giherereye no gukuraho iminkanyari cyangwa ibyangiritse mu gihe cyo guhuza igice.

Uburyo bwo gukora: Uburyo bwo gukora kuri buri wafer: Butuma wafer zitandukanye ziri muri kaseti imwe ya wafer zitunganywa mu buryo bwikora hakurikijwe uburyo zateguwe (ubugari, umuvuduko, nibindi), bugahinduka neza n'uburyo bwo gukora ubwoko bwinshi, buto.

Imirimo yo Kurinda Wafer: Ihuza uburyo bwinshi bwo kurinda, harimo gukoresha wafer mapping (kurwanya kutumvikana neza/wafer irimo ubusa), kugenzura ubugari mbere yo kuyipima (anti-double tape), no gufata vacuum (itangazo rituma umuriro uhagarara mu buryo butunguranye), rituma wafers zifite agaciro gakomeye zirinda umutekano.

Gukosora Guhindagurika kw'Ishusho mu Buryo bw'Amashanyarazi: Guhindagurika kw'Igikombe cyo Kuramo Ishusho bishobora guhindurwa neza hakoreshejwe amashanyarazi binyuze mu gaciro ka ecran, kunoza imiterere y'ishusho no kugabanya igihe cyo guhagarara n'intoki kugira ngo bigenzurwe.

Kongera ubushobozi bwo gukoresha: Ecran nini ya santimetero 19: Ugereranyije na ecran ya santimetero 15 ya DFG8540, ecran ntabwo ari nini gusa ahubwo inafite uburyo bwo gukoresha amashusho bugezweho.

Kubungabunga neza: Imiterere myiza y'isuku y'imbere ituma kubungabunga byoroha.

Kuzigama Ingufu no Gushushanya Ingufu: Iyi spindle nshya y'umwuka igabanya ikoreshwa ry'umwuka ku kigero cya 50%; igishushanyo mbonera cya pompe y'umwuka yubatswemo igabanya ubwinshi bw'ibikoresho ku kigero cya 15% ugereranije n'iyabanjirije, bigatuma habaho kuzigama ibidukikije haba mu bikoresho no mu mikorere.

Ishyirwa ku isoko n'agaciro karyo: Ugereranyije na DGP8761 y’ingenzi igamije isoko rya santimetero 12, DFG8541 yibanda cyane ku isoko rya santimetero 8, bigatuma iba imashini isanzwe "ikora neza kandi ihendutse":

Imiterere y'imikorere: DFG8541 ni yo ngengo y'imari ikoreshwa mu gusya ibyuma bifite santimetero 2. Mu guhitamo icyuma gikoresha amashanyarazi menshi, itsinda neza imbogamizi zo kugabanya ibikoresho bikomeye kandi byoroshye nka SiC, ikongera inyungu zayo ku isoko rya santimetero 2.

Agaciro k'ishoramari: Nk'ivugurura rihamye rijya ku rubuga rukuze, ni ingenzi mu mikorere ihamye y'igihe kirekire no gutanga umusaruro uhoraho, bigatuma iba amahitamo meza, adatera ingaruka mbi, kandi yizewe yo gushora imari mu bikoresho bya santimetero 2. Kaminuza zikomeye zo mu gihugu (nka Kaminuza ya Xi'an Jiaotong) zamaze kugura ibi bikoresho kugira ngo zikoreshwe mu bushakashatsi bugezweho.

Ibisabwa mu kubungabunga no gushyiraho: Kugira ngo DFG8541 ikore neza kandi mu buryo burambye, ni ngombwa gukurikiza cyane ibisabwa na DISCO ku bijyanye n'aho ishyirwa:

Isuku y'ibidukikije: Igomba gushyirwa mu cyumba cy'isuku gifite isuku nyinshi. Ubushyuhe bw'ikirere bugomba kuba buri hagati ya 20-25℃, kandi ihindagurika ry'ikirere rigenzurwa muri ± 1℃. Ubushyuhe busanzwe busabwa kuba buri munsi ya 55%.

Ingufu z'amashanyarazi:

Umwotsi Ufunze: Umwotsi ufunze neza, wumye kandi udafite amavuta, ufunze neza kandi ufite umuvuduko wa 0.5 MPa cyangwa irenga, urakenewe.

Amashanyarazi: Hakenewe amashanyarazi y’ibice bitatu ajyanye n’ibikenewe mu bikoresho.

Amazi akonjesha: Amazi yakuwemo iyyoni (DI water) afite umuvuduko uhoraho w'amazi n'ubushyuhe buhoraho arakenewe kugira ngo amazi akonjeshe. Ubushyuhe bw'amazi bugomba kuba buhuye n'ubushyuhe bw'icyumba hamwe n'ihindagurika rito ry'ubushyuhe.

Gusuzuma no gusimbuza amapine yo gusya buri gihe, gusukura utumashini dusukura, no kubungabunga umuyoboro w'umwuka ni ingenzi cyane mu kongera igihe cyo gukoresha ibikoresho no kwemeza ko umusaruro wabyo uboneka.

Muri make, DISCO DFG8541 ni igisubizo cyoroshye kandi cyizewe cyo kugabanya imashini za wafer cya santimetero 2. Ikora neza cyane mu nganda zayo kandi ikozwe neza cyane kugira ngo ikoreshwe mu buryo bwikora, isuku, kandi yoroheye gukoreshwa kugira ngo ihuze n'ibyo inganda zikora muri iki gihe zikeneye.