Igikoresho cyo gushyiramo wafer ya semiconductor cya Nitto DR3000III

Iyi ni intangiriro irambuye ya NEL SYSTEM™ DR3000III ya Nitto Denko. Ni imashini ikoresha kaseti irinda umuriro ikora neza kandi ifite uruhare runini mu gukora semiconductor.

Imiterere y'ibanze n'ibisobanuro bya tekiniki

Ibisobanuro by'ingenzi bya tekiniki bya DR3000III ni ibi bikurikira:

Ibisobanuro by'Ikintu/Ibipimo

Ubwoko bw'ibikoresho: Imashini irinda kaseti ikoresha ikoranabuhanga ryikora ku buryo bwa 300mm wafers

Ingano ya Wafer ikoreshwa: 300mm (inchi 12) / 200mm (inchi 8)

Ubunini bwa Wafer ikoreshwa: 400μm cyangwa ubunini

Umusaruro: Wafer 68 ku isaha

Ikoranabuhanga ryo Gukoresha Kaseti: Uburyo bwo kugenzura porogaramu bukoresha uburyo bworoshye kandi budafite umuvuduko

Amahame Ahuye Nayo: Yujuje ibisabwa bya CE na SEMI S2/S8

Icyitonderwa: Ibisobanuro byavuzwe haruguru bishobora guhinduka hashingiwe ku ifu, kaseti, n'ibindi bintu, kandi bishobora no kuba birimo ibintu bitari ngombwa.

Ibyingenzi byingenzi ninyungu

Ibintu bikomeye bya DR3000III biyitandukanya n'abandi mu bijyanye no gukora ibintu neza:

Ikoranabuhanga ryo gukoresha ridafite umuvuduko: Iyi ni imwe mu nyungu zayo z'ingenzi mu ikoranabuhanga. Kugabanya umuvuduko wa kaseti mbere yo kuyishyira mu mwanya wayo bigenzura neza uburyo bwo kuyihindura mu mwanya wayo nyuma yo kuyisya inyuma, ibi bikaba ari ingenzi cyane mu gufata utubuto tunini kandi tworoheje cyane.

Kugenzura uburyo bwo gufunga ibintu mu buryo budakomeye: Ibi bikoresho bifite uburyo bwo gufunga ibintu mu buryo budakomeye kandi bigabanya cyane ibyago byo kwangirika kw'ishusho ya wafer mu gihe cyo gufunga ibintu mu buryo budakomeye.

Guhuza Wafer: Nubwo yagenewe wafer za 300mm, ihuza na wafer za 200mm kandi ishyigikira imikorere yihariye ifite ibintu byihariye nka ameza ashyushye (100°C) n'udupira dushyushye (60°C). Byongeye kandi, ifata neza wafer na wafers zabunzwe hamwe n'urwego runaka rwa warpage.

Ikoranabuhanga rikomeye kandi rikora mu buryo bwikora: Ibikoresho bifite:

Uburyo bwo gucunga ibikoresho bwikora: Bushyigikira kaseti za wafer zifunguye imbere (FOUP) / kaseti zifunguye, hamwe n'ukuboko kwa roboti kubatswemo kugira ngo bikoreshwe kandi bipakururwe mu buryo bwikora.

Kuboneza neza: Ikoresha sisitemu yo guhuza CCD idakora ku buryo bworoshye kugira ngo irebe ko lamination ari nziza.

Igenzura ry’ubwenge: Rifite imikorere ya dosiye y’inyandiko kugira ngo rikurikirane amakuru; kumenya kaseti igenda igwa birinda imikorere mibi. Imashini ikoresha wafer mapping scanner ishobora gutuma ibintu byinjira mu buryo bwikora.

Ikurikiza amahame yo mu rwego rwo hejuru rw’inganda: Ibikoresho byujuje ibisabwa ku mutekano no ku bidukikije bya SEMI S2/S8 kandi biboneka hamwe n’amabwiriza y’itumanaho ya SECS/GEM yo kwihuza neza na sisitemu zigezweho z’ikoranabuhanga zikoresha ibikoresho bya semiconductor.

Uburyo bworoshye gukoreshwa: Ecran nini ikozwe mu ifoto hamwe n'uburyo bwo guteka bituma akazi koroha kandi koroshye. Abakoresha bagomba guhamagara resept y'ibicuruzwa bihuye kugira ngo buzuze igenamiterere ryose ry'ibipimo mu buryo bwikora.

Ihame ry'imikorere: Mbere yo gusya inyuma, DR3000III ifata neza kaseti yo kurinda ku ruhande rw'inyuma rw'isukari ikoresheje uburyo butagira umuvuduko kugira ngo hirindwe kwangirika kwa mashini cyangwa kwanduzwa n'imiti ku ruhande rw'imbere rw'isukari mu gihe cyo kuyisya vuba vuba.

Ahantu hakoreshwa: DR3000III ikoreshwa cyane cyane mu bice by'ingenzi bikurikira:

Gukora Semiconductor: Udupira twa Logic na memory chips (DRAM, NAND Flash, nibindi): Kurinda imiterere y'uruziga rworoshye ku ruhande rw'imbere rwa wafer mu buryo bugezweho. Gupakira mu buryo bugezweho: Bitanga uburinzi bwa wafer mu gihe cyo gupakira wafer ya 300mm (Fan-In WLP, Fan-Out WLP, nibindi).

MEMS na Sensors: Irinda imiterere mitomike n'ibice by'imashini mu gihe cyo kugabanya uruhande rw'inyuma.

Ibikoresho bya Power Semiconductor: Bitunganya wafers z'ibikoresho by'amashanyarazi nka IGBTs na MOSFETs, bigabanya ubushobozi bwo kudakira no kunoza uburyo ubushyuhe bushira binyuze mu kugabanya ubushyuhe.

Ubufatanye n'ibindi bikoresho: Ku miyoboro yo gupakira ya semiconductor, DR3000III isanzwe ikorana n'ibikoresho bikurikira:

Ubufatanye n'ibikoresho byo gukoresha firime: Bikorana n'ibikoresho byo gukuraho kaseti ya Nitto NEL-MA3000-III mbere na nyuma yo kuyigabanya. DR3000III ibanza gukoresha kaseti yo kurinda kugira ngo irinde kaseti kwangirika mu gihe cyo kuyigabanya; nyuma yo kuyigabanya, NEL-MA3000-III ikuraho kaseti yo kurinda neza, igenzura ko kaseti yoroshye cyane ikora neza kandi itekanye mu gihe cyose cyo kuyigabanya.

Ubufatanye n'ibikoresho byo gusya: Ikorana bya hafi n'imashini zo gusya nk'intambwe yo kurinda. Nyuma y'uko wafers zisizwe na DR3000III, zishyirwa mu mashini isya kugira ngo zigabanye inyuma, bityo zigatuma inzira yo gusya ihora imeze neza kandi ihamye.

Muri rusange, Nitto DR3000III ni sisitemu yihariye yo kurinda wafer ikora mu buryo bwikora kandi ikora neza. Binyuze mu ikoranabuhanga ryayo ritagira tension, ikemura neza ibibazo bikunze kugaragara byo gupfunyika no gupfunyika bya wafer nini mu gihe cyo gupfunyika inyuma. Igira uruhare runini mu nganda za semiconductor, ikaba ari igikoresho cy'ingenzi mu kwemeza umusaruro n'ubwizerwe bw'inganda zikora chip zigezweho. Ku bijyanye n'ibiciro cyangwa ibibazo bya tekiniki, nyamuneka hamagara abahagarariye Nitto cyangwa abakwirakwiza ibicuruzwa mu Bushinwa bemewe.