Igikoresho cya Nitto Semiconductor Wafer mounter DR8500III

Nitto DR8500III ni igikoresho gikingira gikoresha tepi mu buryo bwikora mu buryo bwa Nitto NEL SYSTEM™, cyagenewe by'umwihariko utubati twa mm 200 (santimetero 8). Mu magambo make, inshingano yacyo y'ingenzi ni ugushyira urwego rwa tepi ikingira burundu ku ruhande rw'imbere rwa wafer (uruhande rufite imiterere y'uruziga) mbere yo gusya inyuma (bizwi kandi nk'inyuma), bikarinda kwangirika mu gihe cyo gusya vuba vuba.

Kugereranya ibipimo by'ingenzi bya DR8500III na DR3000III

Kugira ngo tugufashe gusobanukirwa vuba aho DR8500III iherereye, twayigereranije ifatanye na DR3000III, nayo ishyigikira utubati twa 300mm, bigatuma itandukaniro rihita rigaragara.

Ibintu byo kugereranya: DR8500III (Intangiriro Nkuru) DR3000III

Ahantu hakuru: Agakoresho gakingira kaseti gakoresha uburyo bwikora ku buryo bwikora ku buryo bwikora ku buryo bwa 200mm; Agakoresho gakingira kaseti gakoresha uburyo bwikora ku buryo bwikora ku buryo bwa 300mm

Ingano za Wafer zikoreshwa: santimetero 8/6/5/4 (200/150/125/100mm); 300/200mm (santimetero 12/santimetero 8)

Umusaruro: Ibisanzwe: Wafer 77 ku isaha

Verisiyo ya RF: Wafer 68/isaha; Wafer 68/isaha

Ubunini bwa Wafer buhuye: Wafers zidasya inyuma; 400µm cyangwa ubunini

Ibiranga by'ingenzi n'ibiranga tekiniki:

Imiterere ya tekiniki ya DR8500III ireba neza uburyo ikorana, imikorere yayo, ndetse no koroshya imikorere.

Ubushobozi bwa Wafer: Ubufasha busanzwe ku wafer za santimetero 8/6/5, hamwe n'ubufasha bwihariye ku wafer za santimetero 4. Byongeye kandi, udupira/udupira dushyushye dushobora kongerwamo nk'uburyo bwo kuzuza ibisabwa bitandukanye mu buryo bwo gutunganya.

Ikoranabuhanga ryo gukoresha firime igabanya umuvuduko: Verisiyo yayo ya RF ikoresha ikoranabuhanga ryo gukoresha umuvuduko muto, rigabanya cyane umuvuduko kuri wafer mu gihe cyo kuyikoresha no kugabanya ibyago byo kwangirika cyangwa kwangirika kwa wafer.

Ikoranabuhanga rigezweho mu buryo bworoshye kandi bugezweho: Ibi bikoresho byemerera ababikora kubona byihuse ibipimo byateguwe mbere y’uko bitangwa binyuze mu gice cyo gukoraho no gukora uburyo bwo guteka, bitanga imikorere yoroshye. Binakurikiza amahame y’umutekano ya CE kandi bitanga amabwiriza y’itumanaho ya SECS/GEM, bigatuma habaho kwihuza neza na sisitemu zigezweho zo kwihutisha imikorere y’uruganda rwa semiconductor.

Ahantu hakoreshwa: Isoko ry'ibanze rya DR8500III riri mu gukora semiconductor wafers za 200mm (8-inch), cyane cyane ingenzi muri izi nzira z'ingenzi zikurikira:

Gusya inyuma: Iyi ni yo shingiro ryayo. Mbere yo gusya inyuma, irinda uruhande rw'imbere rwa wafer, ikarinda amapine asya yihuta cyane gusya mu buryo bwa shimi, ikarinda kwanduza ubuso bwa wafer binyuze mu gusya amazi n'imyanda.

Gukata/Gukata Wafer: Mbere yo gukata wafer mu tubumbe duto, hashyirwaho kaseti yo gukata kugira ngo wafer ikomere, bityo ikomeze kandi igire ubuziranenge mu gihe cyo kuyikata.

Imirimo yo gufatanya n'urusobe rw'ibidukikije

Ku murongo wuzuye wo gukora amapaki ya semiconductor, DR8500III ntabwo ikora yonyine, ahubwo ikorana n'ibindi bikoresho kugira ngo ikore inzira yo gukora "gukoresha filime - inzira - gukuraho filime".

Ubufatanye n'imashini zikuraho firime: Nyuma y'ibikorwa nko gukata uruhande rw'inyuma no gukaraba hakoreshejwe laser, kaseti irinda igomba gukurwaho, bigasaba imashini ikuraho firime. Urugero, imashini ya Nitto yo gukuraho kaseti yikora ku buryo bwikora ni amahitamo asanzwe yo guhuza na DR8500III.

Ubufatanye n'ibikoresho byo gusya/gukata: Uburyo bwo gushyiramo filime ya DR8500III ni ingenzi mu gutanga "uburyo bwo gutunganya ibikoresho mbere y'uko bikoreshwa" ku bikoresho by'ingenzi nk'imashini zisya n'imashini zikata.

Incamake

Muri make, Nitto DR8500III ni imashini ikoresha filime ya wafer ya 200mm ikuze, ihamye kandi ikora neza. Agaciro kayo k'ingenzi ni ugutanga uburinzi bwizewe kuri wafer mbere y'ibikorwa by'ingenzi nko kugabanya inyuma hakoreshejwe ikoranabuhanga rigezweho kandi ridafite stress nyinshi, ibi bikaba ari ingenzi cyane mu kwemeza umusaruro n'imikorere ya chip ya nyuma.