TEL CELLESTA™ -i MD wotsukira ma wafer

TEL CELLESTA™ -i MD ndi njira yoyeretsera ya Tokyo Electron's (TEL) ya 300mm single-wafer cleaning system ya 10nm ndi ma process node apamwamba kwambiri. Yapangidwa makamaka kuti ithane ndi mavuto akuluakulu monga kuwonongeka kwa nyumba zazing'ono zomwe zimakhala ndi mapatani pang'ono panthawi yoyeretsa ndi kuumitsa mu njira zamakono, ndipo ndi chipangizo chofunikira kwambiri chomwe chimathandizira kupanga ma chips apamwamba kwambiri.

Kugwira Ntchito Kwambiri: Kusanthula Kwaukadaulo ndi Thandizo la Deta

Kuti timvetse bwino nkhaniyi, mfundo zake zazikulu zaukadaulo zafotokozedwa mwachidule pansipa:

Zinthu Zofunika Zizindikiro za Magwiridwe Antchito ndi Tsatanetsatane wa Zaukadaulo

Kuyika Ma Process Positioning Kulunjika ku 10nm ndi ma process node apamwamba kwambiri, makamaka pakuyeretsa kosawononga komanso kuchotsa tinthu tating'onoting'ono ta malo okhala ndi mapatani.

Ukadaulo Wapakati: Kuyeretsa ndi Kuumitsa Kumathandiza kuumitsa popanda kuwononga mapangidwe kudzera mu kayendetsedwe ka mpweya wa chipinda ndi kukonza bwino magwiridwe antchito a nozzle; kungagwiritse ntchito mankhwala monga SC-1 ndi DHF ponyowa; ndipo kumatha kuphatikiza ntchito zoyeretsera zakuthupi monga kutsuka ndi kupopera madzi awiri.

Mphamvu yogwira ntchito komanso modularity: Yokonzedwa ndi zipinda zotsukira zokwana 20, zomwe zimatha kufika ma wafers 1000 pa ola limodzi (WPH), komanso imathandizira kukulitsa kwa mayunitsi otsukira a bevel.

Kugwira ntchito kotsika mtengo: Dongosolo lokonzanso mankhwala lomangidwa mkati limachepetsa kwambiri ndalama zogwirira ntchito (CoO) ndipo limasunga bwino kugwiritsa ntchito sulfuric acid.

Kudalirika: Njira yake yoyendera yadutsa maulendo 750 miliyoni ogwiritsira ntchito ma wafer popanda kutsimikizira zolakwika zilizonse, zomwe zatsimikizira kuti kupanga kwake kwakukulu kumakhala kokhazikika.

Kugwiritsa Ntchito: Chifukwa cha ukadaulo wake wapamwamba komanso magwiridwe antchito okhazikika, CELLESTA™ -i MD imagwiritsidwa ntchito kwambiri popanga zida zapamwamba za semiconductor, zomwe zimagwira ntchito yofunika kwambiri m'magawo otsatirawa:

Ma chips a Logic: Amapereka malo oyera opangira ma chips a logic ogwira ntchito kwambiri monga ma CPU, ma GPU, ndi ma processor a AI.

Ma Memory chips: Amagwiritsidwa ntchito popanga ma memory chips monga DRAM ndi 3D NAND Flash, kuonetsetsa kuti ma memory cells ndi olondola komanso odalirika.

Kupaka Kwapamwamba: Kumagwiritsidwa ntchito kwambiri poyeretsa njira zamakono zopangira monga BSI (back-illuminated), 3D stacking, back-powered, ndi SoIC (system-on-chip).

Kuwunika Makampani ndi Udindo wa Msika

Monga chitsanzo chapamwamba kwambiri mu mndandanda wa CELLESTA, -i MD ikuyimira mulingo wapamwamba wa TEL pakuyeretsa kokhala ndi chofufumitsa chimodzi. Chifukwa cha magwiridwe antchito ake abwino kwambiri oyeretsa komanso kudalirika kwakukulu, mndandanda wa nsanjazi, pamodzi ndi SCREEN, uli ndi malo otsogola pamsika wapadziko lonse lapansi wa zida zotsukira za semiconductor, zomwe zimapangitsa kuti ikhale chida chofunikira kwambiri chothandizira kupanga ma chips apamwamba kwambiri.