Umatshini wokubumba weFico AMS-i

I-AMS-i kumatshini wokubumba we-BESI yindibano ezenzekelayo kunye nenkqubo yovavanyo eveliswa yi-BESI. I-BESI yinkampani ye-semiconductor kunye ne-microelectronics yokuvelisa izixhobo ezikomkhulu eNetherlands. Yasekwa ngo-1995 kwaye igxile ekuboneleleni ngezixhobo zokudityaniswa kwe-semiconductor ekumgangatho ophezulu kwi-semiconductor yehlabathi kunye namashishini ombane. Iimveliso zayo ziquka izahluli ezisicaba, iindibano ezizenzekelayo kunye neenkqubo zovavanyo, njl.njl., kwaye ineeofisi kunye nothungelwano lwentengiso kumazwe amaninzi nakwimimandla yehlabathi jikelele.

Iimpawu eziphambili kunye neendawo zokusetyenziswa kwe-AMS-i

I-AMS-i liqonga lokumisa elichanekileyo elisuka kwi-BESI elinezi mpawu zilandelayo:

Uyilo oluncinci kakhulu: Ifanelekile kwizicelo ezahlukeneyo zendawo edibeneyo.

I-encoder ye-optical echanekileyo ephezulu: Ibonelela ngempendulo yendawo echanekileyo.

Inokupakishwa: Inokudityaniswa ngokuguquguqukayo kwiqonga le-XY okanye le-XYT, elilungele iimeko ezahlukeneyo zesicelo.

Impendulo ephezulu: Ifanelekile kwiimfuno zokulawula isantya esiphezulu.

Ukuchaneka okuphezulu: Ukuphindaphinda ukuchaneka kokumisa kunokufikelela ku-± 0.3μm, kwaye isisombululo sinokukhethwa njenge-0.2μm, 0.05μm, njl.

AMS-i iindawo isicelo

I-AMS-i ifanelekile kwi-sub-micron positioning, i-optical alignment platform, ulawulo lwamandla kunye nezinye iinkalo. Ngenxa yokuchaneka kwayo okuphezulu kunye neempawu zokuphendula okuphezulu, ifanelekile ngokukodwa kwizicelo zemizi-mveliso ezifuna ukuchaneka okuphezulu kokubekwa kunye nokulawula, njengokwenziwa kwe-semiconductor, ukuchaneka kwe-machining, njl.