I-ACCRETECH UF200R yiprobe ye-semiconductor ezenzekelayo ngokupheleleyo, engabizi kakhulu evela kwi-ACCRETECH (eJapan) yee-wafers eziyi-120–200mm (5–8 intshi). Isetyenziselwa uvavanyo lombane (uvavanyo lwe-CP) lweetships ze-wafer-level ngaphambi kokuzisika.
Yintoni eyenzayo?
Ngamafutshane: Ngaphambi kokuba i-wafer inqunqwe ibe ziitships ezahlukeneyo, iiprobes ziqhagamshelana nee-chip pads ukuze zenze uvavanyo lombane/olusebenzayo, zahlule iitships ezilungileyo nezineziphene. Inqanaba: Uvavanyo lwe-Wafer (CP)
Ithagethi: Ngokuyintloko yi-200mm (8-intshi), ikwafanelekile kwiiwafers ze-5/6-intshi
Iitships eziqhelekileyo: iLogic, iAnalog, izixhobo zamandla, izixhobo ezingabonakaliyo, iiMEMS
II. Iinkcukacha ezingundoqo (Ngokujonga nje)
Ubungakanani beWafer: 120/150/200mm (5–8-intshi)
Ukuchaneka kokubekwa: ± 1.5μm (XY)
Isantya Sokuhamba:
XY: Ukuya kuthi ga kwi-300 mm/s
Z: Ukuya kuthi ga kwi-30 mm/s
Uluhlu lobushushu: -40℃ ~ +150℃ (Ulawulo lobushushu olukhethwayo)
Inqanaba: Iqonga le-Z/θ eliqinileyo kakhulu, elihambelana nee-wafers ezibhityileyo/ezigobileyo
Ukusebenza: Ukulayisha nokukhulula izinto ngokuzenzekelayo, ukulungelelaniswa ngokuzenzekelayo, ukuhlolwa kweprobe
III. Imisebenzi ephambili
Inkqubo yoVavanyo oluZenzekelayo ngokupheleleyo
Ukulayisha iWafer ngokuzenzekelayo → Ukulungelelaniswa komfanekiso → Uqhagamshelwano lweProbe → Uvavanyo loMbane → Ukwahlulahlula kunye nokuRekhoda → Ukukhulula ngokuzenzekelayo
Ukuhambelana kweeNdidi ezininzi
I-Standard Logic, i-Analog, i-Power, i-MOSFET, i-Diode, i-Transistor, i-MEMS Zonke zinokulinganiswa. Uluhlu olubanzi lobushushu kunye novavanyo olukhethekileyo. Iinketho ezipheleleyo zobushushu obuphantsi/obuphezulu, umbane omncinci, uvavanyo lwe-voltage ephezulu, njl. Ukucubungula i-wafer encinci kakhulu/egobileyo. I-adsorption yangasemva + indlela ekhethekileyo yokuphatha, exhasa ii-wafer ezincinci kakhulu (≤50μm) kunye nee-wafer eziphezulu.
IV. Iingenelo (Xa kuthelekiswa neemveliso ezifanayo)
Umlinganiselo weendleko eziphezulu kunye nokusebenza kakuhle: Kufuphi nokuchaneka kunye neqonga le-UF2000 ephezulu (efana ne-MMI), kodwa ngexabiso elifikelelekayo.
Ubungakanani obuphezulu: I-XY high speed + ikhadi lokutshintsha iphini elikhawulezayo, elifanelekileyo kwimigca yemveliso ye-8-intshi ephezulu.
Izinzile kwaye ithembekile: Iqonga le-ACCRETECH elivuthiweyo, alinakugcinwa ixesha elide, kwaye lihlala ixesha elide.
Ukwandiswa okuguquguqukayo: Uyilo lweModular, lungongezwa kamva ngolawulo lobushushu, i-voltage ephezulu, i-micro-current, i-dual-bin, njl.
V. Uthelekiso oluqhelekileyo (ukukunceda ufumane imveliso efanelekileyo ngokukhawuleza)
UF200R: Imveliso yobunzima obuziisentimitha ezi-8 ngokubanzi, ingqiqo/amandla/izinto ezifihlakeleyo, ukubaluleka kokusebenzisa imali kakuhle.
UF190R: Incinci ngakumbi, ikwinqanaba lokuqala, ikhetha izixhobo ezizimeleyo/iibhetshi ezincinci.
UF2000: I-8-intshi ephezulu, ukuchaneka okuphezulu, ulawulo lobushushu olubanzi, i-MEMS/ iTekhnoloji ePhambili
Ngamafutshane: I-UF200R "yeyona probe station iphambili nengabizi kakhulu" kwimarike ephakathi yovavanyo oluyi-intshi ezi-8—inika ukuchaneka okwaneleyo, isantya esiphezulu, uzinzo, ukuqina, kunye nokwandiswa, okwenza ifaneleke kwimigca yemveliso ye-intshi ezi-8 enomthamo ophezulu, eneentlobo ngeentlobo ezininzi.


