Mīhini huri wafer DISCO DFG8541

He mīhini huri aunoa katoa te DISCO DFG8541 i hangaia hei whakatutuki i ngā hiahia o te angiangi o ngā papa wafer mō ngā papa wafer 8-inihi me ngā papa wafer iti iho. Hei whakapai ake i tōna mua, te DFG8540 tino hokohoko, ka taea te whakanoho hei "tauira matua mō te angiangi o ngā papa wafer 8-inihi," e mōhiotia ana mō tōna tino tika, tōna tino ma, me tōna tino pumau, he mea tino pai mō te tukatuka i ngā rauemi mārō me ngā rauemi pakarukaru pērā i te silicon carbide (SiC).

Kei raro nei he kupu whakataki taipitopito mō tōna mātāpono mahi, ōna mahi matua, ōna whakatakotoranga, me te uara mākete.

Mātāpono Mahi: Te Mahi Tahi o te Whai Hua me te Tika

E whakamahi ana te DFG8541 i te hoahoa "miro-rua, kapu-mōmiomio-toru".

Te Wehenga Mahi Mārama: Kei tētahi pou kotahi he wira huri matotoru hei tango wawe i te rauemi matua mai i te tuara o te anga; kei tētahi atu pou he wira huri angiangi hei whakaoti pai i te mata, kia maeneene, kia papatahi, kia kore ai e pakaru te hua whakamutunga.

Tukanga Tino Whai Hua: Ka mimitihia te anga ki te tēpu mahi mā te korehau. Mā te whakamahere tukanga tika, ka tutuki he tukanga mahi "whakapiri kotahi, tukatuka tonu" aunoa katoa, ka karohia ngā tūponotanga o te poke me te kino i puta mai i te whakawhiti rauemi i waenga i ngā taputapu rerekē.

Ngā Taupānga me ngā Tūranga: I tua atu i te Silicon

Hei taputapu whānui, he mahi nui tāna i roto i te ao o ngā irahiko haurua-toru o te whakatupuranga.

Mahi Matua: Te whakaangawari i ngā papa angiangi 8-inihi me ngā papa iti iho (Si/SiC) kia rite ki te matotoru e hiahiatia ana, te whakarite kia tino ōrite te matotoru (TTV), me te tango i ngā paparanga kino o te mata i puta mai i ngā tukanga o mua.

Te Pūtake Matua e Puta Ake Ana: Mā te whiriwhiri i tētahi porowhita taipana-teitei, ka taea e te DFG8541 te tukatuka pūmau i ngā rauemi tino-mārō pērā i te SiC. Koinei te take matua e tino manakohia ana i te mākete semiconductor hiko o nāianei.

Tirohanga Whānui mō ngā Tawhā Matua

Kāwai Tawhā | Ngā Whakatakotoranga Motuhake

Ngā Wāhanga Mahi e Pā Ana: Φ8 inihi (200mm) me raro iho; hototahi ki ngā anga Φ4, 5, 6, me te 8-inihi e whakamahi ana i te chuck whānui

Tikanga Huri: Hurihanga hurihuri roa i roto i te whāngai

Whirihoranga o te Porowhita: Porowhita takirua (2 tuaka), porowhita whāriki hau-wai (paerewa)

Tere o te Miro: 1,000 - 7,000 rpm

Mana o te Miro: Paerewa 4.2 kW

Whirihoranga Tēpu Mahi: E toru ngā tēpu mahi (e toru ngā tēpu pūwero)

Ngā Whakatakotoranga o te Wira Huri: Φ200 mm te wira huri taimana

Ngā Ahu Taputapu (W x D x H): Tata ki te 1,100 × 2,800 × 1,800 mm

Taumaha Taputapu: Tata ki te 3,000 kg

Ngā Mahi Matua me ngā Āhuatanga

He whakapai ake nui te DFG8541 mai i te DFG8540.

Ngā Āhuatanga/Ngā Mahi Whakaahuatanga Taipitopito

Ngā Āheinga Horoi Pai Rawa: Ngā pūwero wai-rua maha-teihana: Ki te whakatauritea ki te horoinga hau-wai tuku iho, ka kaha te tango i ngā matūriki puehu pai e piri ana ki te wafer i muri i te huri. He whānuitia te whakamahinga o tēnei hangarau i roto i ngā teihana mahi matua pērā i ngā kapu momi me ngā wāhanga mahi, ā, ka whakaiti i te tūponotanga o te pakaru o te wafer angiangi.

Whakaritenga Kore-Pa: Ka whakamahia he kāmera hei kimi i te pokapū angiangi, hei whakakapi i te pa ā-tinana me te whakakore i ngā karawarawa, i ngā kino rānei ki ngā taha i te wā o te whakaritenga.

Te Hanga Maamaa: Tohutohu Mō Ia Wafer: Ka taea te tukatuka aunoa i ngā wafer rerekē i roto i te rīpene wafer kotahi kia rite ki ā rātou tohutao kua whakaritea (te matotoru o te huri, te tere, me ētahi atu), ka urutau pai ki te whakaputa momo-momo, puranga-iti.

Ngā Mahi Tiaki Wafer: Ka whakauru i ngā tikanga tiaki maha, tae atu ki te mahere wafer (te ārai i te he o te tūnga/te wafer kau), te tirotiro i mua i te matotoru (te ārai i te rīpene takirua), me te pupuri korehau (te whakaoho mo te pakaru ohorere o te hiko), me te whakarite i te haumaru o ngā wafer utu nui.

Whakatikatika Honga Ka Taea te Whakarite Hiko: Ka taea te whakatikatika i te honga o te kapu momi mā te hiko mā ngā uara kei runga i te mata, kia pai ake ai te āhua tukatuka me te whakaiti i te wā kore mahi ā-ringa mō te whakatikatika.

Whakamahinga Whakarei Ake: Atanga Kaiwhakamahi Mata 19-inihi Nui Ake: Ki te whakatauritea ki te mata 15-inihi o te DFG8540, ehara i te mea he nui ake te mata engari he atanga kaiwhakamahi whakairoiro māmā hoki.

Te Tiaki Arotau: Mā te whakapai ake i te hanganga horoi o roto ka māmā ake te tiaki.

Hoahoa Penapena Pūngao me te Hoahoa Kiato: Ka whakaitihia e te miro hau hou te whakamahinga hau mā te 50%; ka whakaitihia e te hoahoa papu korehau kua hangaia ki roto te tapuwae mā te 15% ki te whakaritea ki tōna mua, ka tutuki ai ngā penapena matomato i roto i ngā taputapu me te whakahaere.

Te Tūnga me te Uara o te Mākete: Ki te whakataurite ki te DGP8761 matua e aro ana ki te mākete 12-inihi, ka aro nui ake te DFG8541 ki te mākete 8-inihi, ka waiho hei mīhini matua "mahi nui, utu-whai hua":

Te Tūnga Mahi: Ko te DFG8541 te paearu mahi mō ngā huri 8-inihi. Mā te whiriwhiri i tētahi porowhita taipana-teitei, ka angitu te wikitoria i ngā wero angiangi o ngā rauemi mārō me ngā rauemi pakarukaru pērā i te SiC, ka whakapūmau i tōna painga tino pai i te mākete 8-inihi.

Uara Pūtea: Hei whakapai ake pumau ki tētahi tūāpapa kua pakeke, he pono hoki mō te mahi pumau mō te wā roa me te putanga tonu, he mea tino whai hua, he iti te mōrearea, he pono hoki mō te haumi ki ngā taputapu raina whakaputa 8-inihi. Kua hokona kētia ēnei taputapu e ngā whare wānanga o te rohe (pērā i te Whare Wānanga o Xi'an Jiaotong) mō ngā rangahau matatau.

Ngā Whakaritenga Tiaki me te Tāutanga: Kia mau tonu ai te mahi a te DFG8541, kia tino tika hoki mō te wā roa, me piri pono ki ngā whakaritenga a DISCO mō te taiao tāutanga:

Te Ma o te Taiao: Me tāuta ki roto i tētahi rūma ma, he tino ma. Me pumau te pāmahana o te taiao i te 20-25℃, me te whakahaere i ngā piki me ngā heke i roto i te ±1℃. Ko te makuku whanaunga me noho i raro i te 55%.

Pūtake Hiko:

Hau Kōpeke: E hiahiatia ana he hau kōpeke parakore, ma, maroke, kāore he hinu, he pēhanga teitei o te 0.5 MPa, neke atu rānei.

Hiko: E hiahiatia ana he pūnaha hiko e toru-wāhanga e rite ana ki ngā hiahia o te taputapu.

Wai Whakamatao: Me whakamahi te wai whakakore iona (wai DI) me te tere rere pumau me te pāmahana pumau hei whakamatao i te porowhita. Me rite te pāmahana o te wai ki te pāmahana rūma me te iti o ngā piki me ngā heke o te pāmahana.

He mea nui te tirotiro me te whakakapi i ngā wira huri, te horoi i ngā pūwero korehau, me te tiaki i te pou hau, kia roa ake ai te ora o ngā taputapu me te whakarite kia hua te tukatuka.

Hei whakarāpopototanga, he otinga pakari, pono hoki te DISCO DFG8541 mō te whakangāwari i te anga angiangi o te anga 8-inihi. Ka tutuki i a ia te mahi tino pai i roto i ōna wāhanga matua, ā, kua arotauhia whānuitia mō te aunoatanga, te horoi, me te ngāwari o te whakamahi hei whakatutuki i ngā hiahia o te hanga hou.