Mīhini Tohu Taiaho ThinkLaser SigmaDSC

Ko te tūnga matua o te ThinkLaser SigmaDSC ko tētahi pūnaha tohu taiaho "Tohu Mārō" aunoa katoa—i hangaia mō ngā anga 100mm ki te 200mm (4 ki te 8-inihi)—e tutuki katoa ana i ngā paerewa rūma ma Akomanga 1 (ISO Akomanga 3).

Ko tōna uara matua kei te whakamahi i te hangarau taiaho me te whakahaere hohonu ka taea te whakarite hei waihanga i ngā waehere tautuhi pumau, e tino mārama ana ki ngā wafers. Kua hangaia ēnei waehere kia tu atu ki ngā uauatanga o ngā tukanga hanga kaha-nui e whai ake nei—pērā i te angiangi o te taha o muri, ngā maimoatanga pāmahana teitei, me te horoi matū—kia tino whai i te hua puta noa i tōna huringa ora katoa.

**Ngā Mātāpono Matua**

Ko te kaupapa matua o te SigmaDSC e aro ana ki te "Hard Marking":

**Tohu Wera Ira-Matrix:** Ka whakamahia e tēnei tikanga he hihi taiaho arotahi, he nui te kaha, e aro ana ki ngā wāhi motuhake o te mata o te papa. Mā tēnei ka rewa tonu, ka mimiti rānei te rauemi, ka hanga he kōhao ā-tinana (ngā rua) me te hohonutanga motuhake (tae atu ki te 110 maikorona).

**Te Pūmautanga Tino Pai o te Pāpā:** Ko te mea nui ki te whakatutuki i te tohu mārō ōrite kei roto i te pumau tino pai o te pāpā-ki-pāpā o te pūtake taiaho. Ko te taiaho totoka-āhua-pāpā a ThinkLaser kua patenthia e te diode ka whakahaere i te pumau o te pāpā ki te taumata <0.5% i te auau o te 1 kHz. Mā tēnei ka whakarite i te taumata teitei o te ōritetanga o te hohonutanga me te porowhita o ia ira kotahi—koia te tūāpapa mō te whakarite i te ōwehenga āhuatanga (ōwehenga tuaka nui-ki-iti) o te <1.1 me te whakarite kia pai ake te pānui.

**Ngā Tirohanga Āhua-Rua™:** He āhuatanga hoahoa nui e tuku ana i te ngāwari ake, ka taea e tēnei hangarau te whakawhiti i waenga i ngā rahi ā-ira e rua—mai i te 50µm ki te 110µm—mā te whakahaere pūmanawa i roto i te pūnaha kotahi, kia taea ai te whakatutuki i ngā momo rauemi tohu me ngā whakaritenga tono.

**Ngā Painga Matua me ngā Whakatakotoranga**

Kua hangaia te SigmaDSC hei whakahaere i te whānuitanga o ngā rauemi papa (tae atu ki te Silicon, Silicon Carbide, Gallium Arsenide, Gallium Nitride, Glass, Ceramics, me ētahi atu) me te tu atu ki ngā taiao uaua o te hanga semiconductor. Kua tautuhia mārama ōna tawhā mahi matua:

**Kāwai Āhuatanga** | **Whakaahuatanga Taipitopito / Ngā Whakatakotoranga Motuhake**

**Te Āheinga Tohu Mārō** | **Mana Hōhonu Ka Taea te Whakarite:** Ka whakarite aunoa i te hōhonutanga tohu, tae atu ki te 110 µm.

**Te Tika o te Hōhonutanga:** ±10%.

**Te Whakaputa:** Tae atu ki te 250 ngā anga ia hāora. Te Tika me te Hototahi | Te Hototahi me te Tukanga: Hototahi ki ngā anga 100mm ki te 200mm, me ngā panera 300mm/310mm.

Te Tika o te Tohu: I roto i te horahanga 50x50mm whai muri i te whakaritenga o te papatahi, ko te āheinga ki te tukurua ko ±0.125 mm.

Whānuitanga Whakamahinga: He pai mō te whānuitanga o ngā rauemi, tae atu ki te Silicon (Si), te Silicon Carbide (SiC), te Gallium Arsenide (GaAs), te Gallium Nitride (GaN), me ētahi atu.

Aunoatanga me te Whakawhitiwhiti Kōrero | Mahi Aunoa Katoa: Ka whakaiti i te wawaotanga ā-ringa, ā, ka tautoko i te whakahaere i te Rīpene Tuwhera.

Atanga Aunoatanga Wheketere: Tautoko ana i ngā kawa SECS II/GEM mō te whakaurunga maeneene ki ngā pūnaha MES wheketere.

Aroturukitanga Pūnaha Whānui: Ka tuhi tika i ngā raraunga mahi taiaho katoa tae noa ki te taumata SPC (Mana Tukanga Tatauranga).

Ngā Whakatakotoranga Pūmārō | Momo Taiaho: Taiaho totoka papu-diode Nd:YLF.

Roanga ngaru taiaho: 1053 nm.

Tauwāhi Tohu: Kei roto i te awhi porowhita 25mm mai i te taha o te papatahi, kia taea ai te whakanoho i ngā rōpū tohu maha ki tētahi aronga.

Pūnaha Whakahaere: Windows 7 Pro SP1 (32-moka).

Paerewa Ahumahi | Paerewa SEMI: E tutuki ana i ngā paerewa SEMI, e tautoko ana i ngā whakaritenga tohu pēnei i te T7, M12, me te M13.

Ngā Tiwhikete o te Ao: E tutuki ana i ngā paerewa haumaru me te taiao tae atu ki te CE, SEMI S2, S8, me te S14.

Ngā Mahi Matua me ngā Taupānga

Ko te SigmaDSC te mea nui e whakamahia ana i roto i ngā taiao hangahanga haurua-ā-ira, he mea nui te pupuri i te kaha ki te whai i ngā hua puta noa i te huringa ora katoa:

Te Hanganga Wafer Mua Ārahi-Haumaru: I te taenga tonu ki te rūma horoi, ka tuhia he tohu tuakiri ahurei, pumau ki runga i te wafer—he tohu tuakiri i hangaia hei tu atu i ngā uauatanga o ngā mahi tukatuka uaua katoa e whai ake nei (pēnei i te angiangi o te taha o muri). Koinei te puna ora mō te whai i te kounga me ngā raraunga Whakahaere Tukanga Tatauranga (SPC) puta noa i te tukanga whakaputa katoa—tae atu ki te hanga wafer silicon, ngā whare hanga whakarewa, me ngā Kaihanga Pūrere Whakauru (IDM).

Tākai Matatau: Ka whakarato i te tohu tuakiri pono mō ngā Wafer, ngā Panel rānei kua Whakahoutia i roto i ngā tukanga Tākai Taumata Wafer Fan-out (Fan-out WLP).

**Te Whakataurite i ngā Taputapu Tāpiri me ngā Raina Hua**

He wāhanga nui a SigmaDSC i roto i te otinga tautuhi wafer whānui a ThinkLaser. Ko te pūnaha SigmaClean i kōrerotia e koe he tāpiri motuhake ki tēnei:

**Āhuatanga** | **SigmaDSC (Tohu Mārō)** | **SigmaClean (Tohu Ngāwari)**

**Tukanga Matua** | Tohu Mārō | Tohu Ngāwari

**Ngā Painga Matua** | He hohonu te āhua o ngā tohu; ka taea te tu atu i ngā mahi tukatuka tino uaua, pērā i te huri ā-mīhini. | Kore para, he tino ma; e tutuki ana i ngā whakaritenga tino pakari mō te rūma horoi.

**Ngā Horopaki Whakamahinga Noa** | Whakamahia mō ngā angaanga e pāngia ana e ngā tukanga "mārō"—pērā i te angiangi o te taha o muri—kia mau tonu ai te whai i ngā whakaritenga. | Whakamahia i roto i ngā taiao hanga angaanga o mua, he mea nui te korenga o te kino o te mata, me te tino ma.

**Whakarāpopototanga**

Ko te ThinkLaser SigmaDSC he pūnaha tohu taiaho aunoa katoa e whakatapua ana ki te whakarato i te "tohu mārō" tino pakari mō ngā wafer 200mm. Ko ōna painga hangarau matua kei roto i tana whakahaere hohonu ka taea te whakarite, te hangarau Dual-Spot Optics™, me te atanga SECS/GEM mō te aunoatanga katoa. Mā te whakamahi i tētahi pūnaha taiaho pumau, te whakahaere porowhita kati, me ngā āhuatanga aunoatanga matatau, ka whakarite i te ōritetanga hohonu o te tohu me te porowhita puta noa i ngā momo rauemi papa. Engari i te mahi horoi, i ngā mahi huihui rānei, ka mahi i te mahi nui o te whakarato i te manatoko tuakiri ā-ao mō ngā wafer.