Imashini yo gushyira ikimenyetso cya laser ya ThinkLaser SigmaDSC Wafer

Aho ThinkLaser SigmaDSC iherereye ni uburyo bwo gushyira ikimenyetso cya laser mu buryo bwikora bwitwa "Hard Marking" — bwagenewe cyane cyane utubati twa wafer twa 100mm kugeza 200mm (4 kugeza 8-inch) — bukurikiza amabwiriza y’icyumba cyo gusukura cya Class 1 (ISO Class 3).

Akamaro kayo k’ingenzi gashingiye ku gukoresha ikoranabuhanga rya laser hamwe n’uburyo bwo kugenzura ubujyakuzimu bushoboka kugira ngo hakorwe kode zihoraho kandi zisomeka neza ku bicuruzwa bya wafer. Izi kode zakozwe kugira ngo zihangane n’uburyo bukomeye bwo gukora ibintu bukoreshwa mu buryo bukomeye—nk’ubushyuhe bwinshi, kugabanya inyuma, no gusukura imiti—bityo bigatuma ibicuruzwa bikurikiranwa neza mu gihe cyose cy’ubuzima bwabyo.

**Amahame y'ingenzi**

Ishingiro ry'ikoranabuhanga rya SigmaDSC rireba "Gushyiraho ikimenyetso gikomeye":

**Kugaragaza Ubwiza bw'Agace ka Dot-Matrix:** Ubu buryo bukoresha umurasire wa laser ucurangwa n'ingufu nyinshi kandi ucucitse ugana ahantu runaka ku buso bwa wafer. Ibi bituma ibikoresho bishonga cyangwa bigashonga ako kanya, bigatera ubwiherero bufatika (ibinogo) bufite ubujyakuzimu bwihariye (kugeza kuri mikoroni 110).

**Guhagarara neza mu mikorere y'amajwi:** Urufunguzo rwo kugera ku bimenyetso bikomeye bimwe ruri mu guhagarara neza kw'amajwi hagati y'amajwi n'amajwi. Laser ya ThinkLaser ifite patented diode-pumped solid-state igenzura guhagarara neza kw'amajwi kugeza ku rwego rwa <0.5% ku gipimo cya 1 kHz. Ibi byemeza ko buri kadomo kamwe gafite uburebure buhanitse kandi buzunguruka—ikora nk'inkingi ikomeye yo kwemeza ko igipimo cy'amajwi (igipimo cy'amajwi kinini kugeza ku gito) cya <1.1 no kwemeza ko gisomwa neza.

**Dual-Spot Optics™:** Iyi koranabuhanga ni umwihariko w’igishushanyo mbonera gitanga uburyo bworoshye bwo guhindura imiterere y’amadosiye, kandi yemerera abayikoresha guhinduranya hagati y’ingano ebyiri zitandukanye z’amadosiye—kuva kuri 50µm kugeza kuri 110µm—binyuze mu kugenzura porogaramu muri sisitemu imwe, bityo ikaba yakira ibikoresho bitandukanye byo gushyiramo ibimenyetso n’ibisabwa mu ikoreshwa ryayo.

**Ibyiza by'ingenzi n'ibisobanuro**

SigmaDSC yakozwe kugira ngo ikore ibikoresho bitandukanye bya substrate (harimo Silicon, Silicon Carbide, Gallium Arsenide, Gallium Nitride, Ikirahuri, Ceramics, nibindi) no kwihanganira ibidukikije bigoye cyane byo gukora semiconductor. Ibipimo by'ingenzi by'imikorere yayo birasobanutse neza:

**Icyiciro cy'ibiranga** | **Ibisobanuro birambuye / Ibisobanuro byihariye**

**Ubushobozi bwo Gushyiraho Inyandiko** | **Ubujyakuzimu bushobora gukoreshwa mu buryo bwa porogaramu:** Ihindura uburebure bw'inyandiko mu buryo bwikora, ikagera kuri µm 110.

**Uburyo bwo Kwimbitse:** ± 10%.

**Umusaruro:** Kugeza kuri wafer 250 ku isaha. Ubuziranenge n'Ikoranabuhanga | Ikoranabuhanga n'Inzira: Ikorana na wafer 100mm kugeza kuri 200mm, hamwe n'ibice bya 300mm/310mm.

Ubuziranenge bw'ibimenyetso: Mu gace ka 50x50mm nyuma yo gutondeka wafer, ubushobozi bwo gusubiramo ni ± 0.125 mm.

Uburyo bwo gukoresha mu buryo bwagutse: Ikwiriye ibikoresho bitandukanye, birimo Silicon (Si), Silicon Carbide (SiC), Gallium Arsenide (GaAs), Gallium Nitride (GaN), n'ibindi.

Kwikora no Gutumanaho | Imikorere Yikora: Igabanya uburyo bwo gukoresha intoki kandi igashyigikira uburyo bwo gukoresha Cassette ifunguye.

Interineti y'ikoranabuhanga rikora mu buryo bwikora: Ishyigikira porotoli za SECS II/GEM kugira ngo ihuzwe neza na sisitemu za MES z'uruganda.

Igenzura ryimbitse rya sisitemu: Yandika neza amakuru yose y’imikorere ya laser kugeza ku rwego rwa SPC (Statistical Process Control).

Ibisobanuro by'ibikoresho | Ubwoko bwa Laser: Nd: YLF diode-pumped solid-state laser.

Uburebure bw'umuraba wa laser: 1053 nm.

Aho ikimenyetso giherereye: Mu gice cy'umugozi wa mm 25 uvuye ku nkombe ya wafer, bituma habaho gushyiramo amatsinda menshi y'ibimenyetso mu cyerekezo icyo ari cyo cyose.

Sisitemu Ikora: Windows 7 Pro SP1 (32-bit).

Amahame Ngenderwaho y'Inganda | Amahame Ngenderwaho: Yujuje ibisabwa byose ku mahame ngenderwaho, ishyigikira ibipimo by'ibimenyetso nka T7, M12, na M13.

Impamyabumenyi Mpuzamahanga: Iyubahiriza amahame y’umutekano n’ibidukikije arimo CE, SEMI S2, S8, na S14.

Imikorere y'ingenzi n'ikoreshwa

SigmaDSC ikoreshwa cyane cyane mu nganda zikora ibikoresho bya semiconductor aho kubungabunga uburyo bwo gukurikirana ibicuruzwa mu gihe cyose cy’ubuzima bwabyo ari ingenzi cyane:

Gutunganya Wafer ya Semiconductor Front-end: Ako kanya iyo winjiye mu cyumba cyo gusukura, handitseho ID idasanzwe kandi ihoraho kuri wafer—ID yagenewe kwihanganira ubukana bw'intambwe zose zikomeye zo gutunganya (nk'inyuma yo kugabanya). Iyi ni inzira y'ubuzima yo gukurikirana ubuziranenge n'amakuru ajyanye no kugenzura imikorere y'ibarurishamibare (SPC) mu gihe cyose cy'umusaruro—aho hagera nko mu gukora wafer ya silicon, mu nganda zikora uruganda, no mu bahanga mu bikoresho bihujwe (IDMs).

Gupakira mu buryo bugezweho: Bitanga ikimenyetso cyizewe cy’indangamuntu ku mabuye cyangwa amapaneli yavuguruwe mu buryo bwo gupakira mu buryo bwa Fan-out Wafer-Level Packaging (Fan-out WLP).

**Igereranya ry'ibikoresho by'inyongera n'imirongo y'ibicuruzwa**

SigmaDSC igize igice cy'ingenzi mu gisubizo cyuzuye cya ThinkLaser cyo kumenya wafer. Sisitemu ya SigmaClean wavuze ikora nk'icyuzuzo cyihariye kuri yo:

**Ikintu** | **SigmaDSC (Gushyiraho ikimenyetso gikomeye)** | **SigmaClean (Gushyiraho ikimenyetso cyoroshye)**

**Inzira y'ingenzi** | Gushyiraho ikimenyetso gikomeye | Gushyiraho ikimenyetso cyoroshye

**Ibyiza by'ingenzi** | Ibirango bifite uburebure bufatika; bishobora kwihanganira intambwe zikomeye nyuma yo gutunganya, nko gusya hakoreshejwe imashini. | Nta myanda ifite isuku nyinshi; byujuje ibisabwa cyane mu cyumba cyo gusukura.

**Ibintu bisanzwe byo gukoresha** | Ikoreshwa ku macupa ya wafer arimo gukomereka—nk'inyuma—kugira ngo igaragare neza. | Ikoreshwa mu nyubako z'imbere aho nta kwangirika kw'ubuso n'isuku nyinshi ari byo by'ingenzi.

**Incamake**

ThinkLaser SigmaDSC ni sisitemu yo gushyira ibimenyetso kuri laser yikora yagenewe gutanga "ibimenyetso bikomeye" biramba cyane kuri wafers za 200mm. Inyungu zayo z'ingenzi mu ikoranabuhanga ziri mu kugenzura ubujyakuzimu bwa porogaramu, ikoranabuhanga rya Dual-Spot Optics™, na interface ya SECS / GEM kugira ngo ikore ikoranabuhanga ryikora. Ikoresheje sisitemu ya laser ihamye, kugenzura closed-loop, hamwe n'imikorere igezweho yo gukora ikoranabuhanga, ituma uburebure bw'ibimenyetso bungana kandi buzunguruka mu bikoresho bitandukanye. Aho gukora imirimo yo gusukura cyangwa guteranya, ifite inshingano y'ingenzi yo gutanga icyemezo cy'indangamuntu ku isi yose kuri wafers.