ASM Pasifika Ikoranabuhanga Turret Wafer Urwego rwo Kugerageza SUNBIRD

SUNBIRD nuburyo bukora neza, busobanutse neza, bwuzuye bwikora bushingiye kuri wafer-urwego rwibizamini byagenewe inganda zikora semiconductor. Ikoreshwa cyane cyane mugupima amashanyarazi ya wafer mbere yo gukata (wafer sort / CP ikizamini). Ibyiza byingenzi byingenzi byinjira cyane, bihamye cyane, hamwe nubushakashatsi. Irashobora guhuza nibisabwa bitandukanye byikizamini kuva R&D kugeza kumusaruro rusange, cyane cyane ibereye murwego runini rwo kwipimisha ibintu byinshi byuzuzanya (nka chipiki ya logique, kwibuka, sensor, nibindi).

2. Ibyingenzi byingenzi nudushya twikoranabuhanga

2.1 Igishushanyo gishingiye kuri Turret

Ubushobozi bwo gupima bubangikanye: Binyuze muburyo bwa sitasiyo ya turret, kugereranya gupakira no gupakurura, guhuza, no kugerageza waferi bigerwaho, bigatezimbere cyane imikorere (nka tarret ya sitasiyo 8 irashobora gutunganya wafer nyinshi icyarimwe).

Igikorwa kidahagarara: Iyo tarret izunguruka kugirango ihindure sitasiyo, izindi sitasiyo zikomeza gukora, bivanaho igihe cyo gutegereza abapimisha gakondo.

2.2 Kwishyira hamwe kwuzuye

Ubufatanye bwa robo: Shyiramo amaboko ya robo yuzuye neza na sisitemu yo kwerekana amashusho kugirango uhite urangiza imizigo ya wafer, guhuza, guhuza iperereza no gutondeka.

Guteganya ubwenge algorithm: guhitamo ikurikirana ninzira, gukoresha ibikoresho byinshi (UPH irashobora kugera kubice 200+ / isaha, bitewe nibibazo bigoye).

2.3 Ubushobozi bwo gupima neza

Nano-urwego ruhagaze neza: laser interferometero cyangwa kodegisi ihanitse ikoreshwa kugirango harebwe niba amakarita ya probe hamwe na padiri wafer (muri mm 1μm).

Ikizamini cyimiyoboro myinshi: gishyigikira igeragezwa ryikigereranyo cyibihumbi bigera ku bihumbi, bihuye nibipimo bya DC / AC, RF, gupima ibimenyetso bivanze, nibindi.

2.4 Guhinduka no gupimwa

Igishushanyo mbonera: module yo kugenzura ubushyuhe (-55 ° C ~ 150 ° C), ikibaho cyibizamini byinshi-DUT, ikarita yerekana ikarita itandukanye (nka MEMS probe) irashobora gutoranywa ukurikije ibikenewe.

Porogaramu ifunguye porogaramu: ishyigikira kwishyira hamwe hamwe n’ibindi bikoresho bya EDA (nka Cadence, Keysight) na sisitemu ya MES kugirango ugere ku isesengura ryigihe nyacyo (SPC, Ikarita ya Bin).

2.5 Kwizerwa no gukomeza

Sisitemu yo kwisuzumisha: kugenzura-igihe nyacyo cyo kwambara, iperereza ryubushyuhe nibindi bipimo, bikurura kalibrasi cyangwa gutabaza.

Guhindura umurongo byihuse: Igishushanyo mbonera gisanzwe gishyigikira gusimbuza byihuse amakarita ya probe / ikibaho cyibizamini (igihe cyo guhindura

3. Ibisanzwe byo gusaba

Logic / memory chip mass test test: nkibizamini bya CP neza bya SoC, DRAM, na NAND Flash.

Ikizamini cyibanze-cyibanze: kugenzura ibintu byinshi bya MEMS (giroskopi, ibyuma byerekana ingufu).

Igeragezwa rya semiconductor ya gatatu: ihuza na voltage nini nubushyuhe bwo hejuru bwibisabwa bya wafers ya SiC / GaN.

4. Urugero rwa tekiniki ya tekinike (irashobora guhinduka ukurikije iboneza nyirizina)

Ikintu Ikigereranyo

Ingano ya Wafer 6 "/ 8" / 12 "(birashoboka)

Umubare wibizamini 4/6/8 birashoboka

Umwanya uhagaze ± 0.5μm @ 3σ

Ikigereranyo cy'ubushyuhe Ubushyuhe busanzwe ~ 150 ° C (module yubushyuhe buke)

Umubare ntarengwa wimiyoboro yikizamini 2048 (yaguka)

Imigaragarire y'itumanaho GPIB / Ethernet / SECS / GEM

5. Isesengura ryo gupiganwa ku isoko

Ibyiza:

Ugereranije n'abapima sitasiyo imwe (nka Prober gakondo), imikorere iratera imbere 30% ~ 50%.

Guhuza gukomeye, gushyigikira inzibacyuho itagira ingano kuva muri make yinjira muri R&D kugera kumurongo mwinshi mubikorwa rusange.

Ibicuruzwa bigereranya:

Irushanwa hamwe na Electron ya Tokiyo (TEL) Prober, Teradyne UltraFlex, nibindi, ariko ifite ibintu byihariye biranga ubwubatsi bwa turret no gukoresha neza.

6. Agaciro k'abakiriya

Kugabanya ibiciro byo kwipimisha: Kwinjiza byinshi bigabanya umubare wishoramari ryibikoresho.

Umusaruro wongerewe umusaruro: Kwipimisha neza-kugihe hamwe nigihe-cyo gutanga amakuru bifasha mugutezimbere inzira.

Guhuza n'imihindagurikire y'igihe kizaza: Bishyigikira ibizamini bya AI bigezweho kandi bipfunyika (nka Chiplet) ibisabwa byo kwipimisha.

7. Incamake

SUNBIRD itanga igisubizo cyizewe, cyizewe kandi cyoroshye cyo kugerageza wafer yinganda za semiconductor hifashishijwe igishushanyo mbonera cya turret, gukora automatike yuzuye hamwe nubushobozi bwo gupima neza, cyane cyane kubakora chip bateye imbere bakurikirana umusaruro mwinshi hamwe nubuziranenge bwamakuru. Ubwubatsi bwa modular bwububiko nabwo bubika umwanya wo kuzamura iterambere ryikoranabuhanga.