ASM Pacific Technology Turret Wafer Level Test System SUNBIRD

SUNBIRD ndi njira yoyesera, yolondola kwambiri, yodziwikiratu yokha ya turret-based wafer-level yopangidwira makampani opanga ma semiconductor. Amagwiritsidwa ntchito kwambiri poyesa magetsi ophatikizika asanadulidwe (wafer sort/CP test). Ubwino wake waukulu ndi kutulutsa kwakukulu, kukhazikika kwakukulu, ndi kapangidwe kake. Itha kusinthira kuzinthu zosiyanasiyana zoyeserera kuchokera ku R&D mpaka kupanga misa, makamaka koyenera pazoyeserera zazikulu zamagawo ophatikizika kwambiri (monga chip logic, memory, sensors, etc.).

2. Zinthu zazikulu ndi zatsopano zamakono

2.1 Mapangidwe Otengera Turret

Kuthekera koyesa kofananira: Kupyolera mu kapangidwe ka ma turret amitundu yambiri, kutsitsa ndikutsitsa kofananira, kuyanjanitsa, ndikuyesa zowotcha zimatheka, kuwongolera bwino kwambiri (monga 8-station turret imatha kukonza zowotcha zingapo nthawi imodzi).

Osayimitsa: Turret ikazungulira kusintha masiteshoni, masiteshoni ena amapitilirabe, ndikuchotsa nthawi yodikira ya oyesa achikhalidwe.

2.2 Kuphatikizika kwathunthu

Kugwirizana kwa maloboti: Phatikizani zida zolondola kwambiri zama robotiki ndi makina oyika mawonekedwe kuti mutsirize kutsitsa, kuyanjanitsa, kulumikizana ndi kafukufuku ndi kusanja.

Algorithm yokonzekera mwanzeru: konzani zoyeserera ndi njira, onjezerani kagwiritsidwe ntchito ka zida (UPH imatha kufika 200+ zidutswa / ola, kutengera zovuta zoyesa).

2.3 Kuthekera koyezetsa kolondola kwambiri

Nano-level positioning kulondola: laser interferometer kapena high-resolution encoder imagwiritsidwa ntchito kutsimikizira kulondola kwa probe card ndi wafer pad (mkati mwa ± 1μm).

Kuyesa kwamakina angapo: kumathandizira kuyesa kofananira mpaka masauzande ambiri, ogwirizana ndi magawo a DC/AC, RF, kuyesa ma siginecha osakanikirana, ndi zina zambiri.

2.4 Kusinthasintha ndi scalability

Mapangidwe amtundu: gawo lowongolera kutentha (-55 ° C ~ 150 ° C), bolodi yoyeserera yamitundu yambiri ya DUT, mawonekedwe osiyanasiyana amakhadi a probe (monga kafukufuku wa MEMS) amatha kusankhidwa malinga ndi zosowa.

Mawonekedwe otseguka a mapulogalamu: amathandizira kuphatikiza ndi zida za EDA zachitatu (monga Cadence, Keysight) ndi machitidwe a MES kuti akwaniritse kusanthula kwa data zenizeni (SPC, Bin Map generation).

2.5 Kudalirika ndi kusakhazikika

Dongosolo lodzizindikiritsa: kuyang'anira nthawi yeniyeni ya kavalidwe ka probe, kukwera kwa kutentha ndi magawo ena, kuyambitsa kuwongolera kapena alamu.

Kusintha kwachangu kwa mzere: Mapangidwe okhazikika amathandizira kusinthika mwachangu kwa makhadi ofufuza / matabwa oyesera (nthawi yosinthira <10 mphindi).

3. Zochitika zofananira ndikugwiritsa ntchito

Kuyesa kwa logic/memory chip mass: monga kuyesa kwa CP kwa SoC, DRAM, ndi NAND Flash.

Kuyesa kwa sensor yolondola kwambiri: kutsimikizira kwamitundu ingapo kwa zida za MEMS (ma gyroscopes, sensor sensors).

Mayeso a semiconductor a m'badwo wachitatu: sinthani ndi kuyesa kwamphamvu kwambiri komanso kutentha kwambiri kwa zowotcha za SiC/GaN.

4. Chitsanzo cha parameter yaukadaulo (chosinthika malinga ndi kasinthidwe kwenikweni)

Chinthu Parameter

Wafer kukula 6"/8"/12" (customizable)

Chiwerengero cha malo oyeserera 4/6/8 masiteshoni ngati mukufuna

Kuyika kulondola ±0.5μm @ 3σ

Kutentha koyesa Kutentha kwanthawi zonse ~ 150°C (posankha gawo lotsika lotsika)

Chiwerengero chochulukira cha njira zoyesera 2048 njira (zokulitsa)

Kulumikizana kwa GPIB/Ethernet/SECS/GEM

5. Kusanthula mpikisano wamsika

Ubwino:

Poyerekeza ndi oyesa pa station imodzi (monga Prober yachikhalidwe), kuchita bwino kumapangidwa bwino ndi 30% ~ 50%.

Kugwirizana kwamphamvu, kumathandizira kusintha kosasunthika kuchokera pakutsika pang'ono mu R&D kupita pakupanga kwakukulu pakupanga kwakukulu.

Zofananira:

Imapikisana ndi Tokyo Electron (TEL) Prober, Teradyne UltraFlex, ndi zina zambiri, koma ili ndi mawonekedwe apadera pamamangidwe a turret komanso kutsika mtengo.

6. Mtengo wa Makasitomala

Kuchepetsa mtengo woyesera: Kuchulukirachulukira kumachepetsa kuchuluka kwa ndalama zogulira zida.

Zokolola zabwino: Kuyesa mwatsatanetsatane komanso kuyankha kwa data munthawi yeniyeni kumathandizira kukonza bwino ntchitoyi.

Kusinthika kwamtsogolo: Imathandizira kukhathamiritsa kwa mayeso oyendetsedwa ndi AI komanso kuyika kwapamwamba (monga Chiplet) zoyeserera.

7. Mwachidule

SUNBIRD imapereka njira yabwino, yodalirika komanso yosinthika yoyezetsa makina opangira ma semiconductor kudzera mu kamangidwe katsopano ka turret, makina odzichitira okha komanso kuyezetsa mwatsatanetsatane, makamaka kwa opanga ma chip otsogola omwe akufuna kupanga zambiri komanso mtundu wa data. Zomangamanga zake zokhazikika zimasungiranso malo okweza kuti zisinthidwe zamtsogolo zaukadaulo.