Mīhini huri wafer DISCO DFG8560

Hei whakapai ake i te raupapa DFG800, he mīhini whakangāwari wafer aunoa katoa te DISCO DFG8560. He mea hanga motuhake hei whakatutuki i ngā wero o te whakangāwari wafer 12-inihi. Ko tōna kaupapa matua o te mahi e hangai ana ki te whirihoranga takirua-poro me te toru-papa, e whakaoti ana i ngā wāhanga "huri matarohia" me te "huri pai" o te tukanga whakangāwari i roto i te mahi whakapiri wafer kotahi. Mā tēnei hoahoa ka tino whakapai ake i te pai o te tukatuka me te whakahaere tika.

**Mātāpono Mahi**

Ka tutuki i te DFG8560 te angiangi o te angaanga mā te nekehanga miihini tino tika:

**Hanganga Pūmau:** Ka whakamahia e te mīhini he miro hau pūmau, kia tino pumau ai puta noa i te tukanga huri.

**Tukanga Hurihuri e Rua-Hipanga:**

**Te Huri Taratara:** Ka whakamahia e te miro tuatahi he wira kirikiri taratara (hei tauira, he wira taimana e herea ana ki te kapia). Mā te huri tere ka tere te tango i te nuinga o ngā rauemi mai i te taha o muri o te anga, ka tino whai hua.

**Te Hurihanga Matatika:** Ka whakamahia e te miro tuarua he wira kirikiri matatika (hei tauira, he wira taimana here-uku) hei huri tika i te papa. Ka hangaia e tēnei tukanga he mata maeneene, papatahi, ā, ka tangohia te paparanga pakaru i puta i te wā huri taratara.

I te mahi tūturu, ka puritia te wafer ki tōna tūranga i runga i te chuck hurihuri mā te momi korehau. Ka huri te chuck i te taha ke atu i te wira huri tere-rahi; ka neke poutū te wira ki raro, ka tapahia te mata o te wafer.

**Ngā Āhuatanga Matua**

Ko te mahi matua o te DFG8560 ko te whakaitiiti i te anga. Hei whakatutuki i tēnei, ka whakauruhia e ia he raupapa o ngā mahi matua:

**Mahi Aunoa Katoa:** Ka aunoatia e tēnei taputapu te tukanga mahi katoa mai i te utaina o te wafer, te whakatikatika, te huri, te horoi tae noa ki te tango i te mea, ka whakaitihia te wawaotanga ā-ringa me te whakapai ake i te pai o te whakaputa.

**Mana Whakamana Matotoru Tino Tika:** Mā te whakauru i tētahi pūnaha ine matotoru ipurangi tino taumira (0.1 μm), ka tutuki i te taputapu te mana whakahaere porowhita-katia o te tukanga huri, kia tika ai te matotoru o te papa whakamutunga.

**Tukatuka Angaanga Tino Angiangi:** Mā te arotau i ngā tawhā pūnaha huri me te tukatuka, ka taea e te DFG8560 te tukatuka pumau i ngā angaanga tino angiangi me te matotoru o te 100 μm, iti iho rānei, me te whakaiti i te mōrearea o te pakaru o te angaanga.

**Te Kitenga Hapa:** Ka taea e tēnei pūnaha te tautuhi i ngā hapa i runga i te mata o te anga, me te whakarato i te tautoko raraunga e tika ana mō ngā tukanga whakatika i muri mai, ngā takahuri urupare rānei.

**Atanga Kaiwhakamahi:** He LCD mata-pā me te atanga kaiwhakamahi whakairoiro (GUI) te taputapu, ā, ka whakaatu i te tūnga tukatuka me te taputapu i te wā tūturu, kia māmā ake ai, kia māmā ake ai hoki te whakahaere me te tiaki.

**Whakaurunga me te Whanuitanga Ipurangi:** Ka taea te whakauru pai i te DFG8560 ki roto i ngā raina whakaputa aunoa matatini ake, pēnei i:

**Pūnaha DBG (Post-Die Grinding):** Ka whakauruhia ngā tukanga tapatapahi me te angiangi, kia tino pai ai mō te hanga maramara tino angiangi.

**Mīhini Whakakanapa Maroke (hei tauira, DFP8160):** Ka hanga i tētahi pūnaha whakauru e mahi ana i te whakakanapa maroke i muri i ngā tukanga huri, ka whakaiti ake i te taratara o te mata o te papa (uara Ry) me te whakakore i ngā kino i puta mai i te huri.

**Wafer Laminator/Stripper:** Kua whakauruhia hei tāpiri, hei tango rānei i ngā kiriata whakakanapa tiaki, ka hangaia he rerenga mahi aunoa katoa.

**Whakawhitiwhitinga SECS/GEM:** Ka tautokohia e tēnei taputapu te kawa whakawhitiwhitinga SECS/GEM, e āhei ai te hononga ki tētahi Pūnaha Whakahaere Hanga (MES) o te wheketere mō te aroturuki mamao me te kohikohi raraunga whakaputa aunoa.

**Ngā Taupānga me ngā Mahi:**

Ko te mahi matua a te DFG8560 he whakarato i ngā angaanga he matotoru ōrite me te kounga mata tino pai mō ngā tukanga e whai ake nei pēnei i te tapatapahi me te takai; nā te whānui o te hototahitanga o ngā rauemi ka pai hoki mō te whānuitanga o ngā tono.

**Te Whakaiti i te Angiangi o te Angiangi:** Te whakaiti i te matotoru o te angiangi mai i tōna matotoru taketake ki te matotoru e hiahiatia ana—he whakaritenga taketake mō te nuinga o ngā tono.

**Tango Paparanga Kino:** Te whakakore i ngā paparanga pakaru i te ahotea i puta mai i ngā tukanga o runga (pēnei i te huri taha-muri)—he taahiraa nui hei whakarite i te kaha ā-pūkaha o te maramara.

**Whakamaheretanga Mata:** Te whakarato i tētahi papa papatahi mō ngā tukanga tika o muri mai (pēnei i te whakaahua me te hononga)—he whakaritenga mō te hanga tino tika.

**Te Tākai 3D me te Whakaaturanga TSV:** Te whakarato i ngā angiangi angiangi e hiahiatia ana hei whakatinana i te hangarau Through-Silicon Vias (TSV) me te whakaatu tika i te raro o te hanganga TSV—he wāhanga matua o te tākai matatau.

Te Hanga Pūrere Mana me te RF: Whakamahia hei whakaiti i te SiC, GaN, me ētahi atu anga haurua-ira hei whakaiti i te ātete-ki-te-tū me te whakapai ake i te mararatanga wera.

Te Hanga Pūrere Whatu me te Tātari: Whakamahia mō te whakaangawari tika me te whakapapatahi i ngā rauemi mārō me ngā rauemi pakarukaru pērā i te hapaira (te papa LED) me te lithium tantalate/lithium niobate (tātari RF).

Ngā Whakatakotoranga Taipitopito

Ngā Whakatakotoranga Ngā Whakatakotoranga

Rahi o te Mahinga Mahi e Pā Ana: Φ300 mm (12 inihi). Ka tautokohia e te tītaha whānui ngā angaanga Φ200 mm/Φ300 mm.

Tikanga Huri: Hurihanga angiangi roa i roto i te whāngai.

Whirihoranga o te Miro: Miro takirua (2 tuaka). Miro hau-pūmau e peia ana e te motuka auau-teitei kua hangaia ki roto.

Whirihoranga o te Ripanga Pūwero: E toru ngā ripanga pūwero, mā te whakamahi i te pūnaha ripanga hurihuri. Tere pūwero: 0-300 rpm.

Mana o te Miro: Putanga whakatauranga 4.8 kW.

Tere o te Miro: 1,000 - 4,000 min⁻¹ (rpm).

Te haere o te tuaka-Z: 120 mm (tae atu ki te pūtake).

Te tere whāngai huri tuaka-Z: 0.0001 - 0.08 mm/s (0.1 - 80 μm/s).

Te nekehanga iti rawa o te tuaka-Z: 0.1 μm.

Te whānuitanga ine matotoru: 0 - 1,800 μm.

Taumira ine matotoru: 0.1 μm.

Te āheinga ki te ine i te matotoru: ±0.5 μm.

Ngā whakatakotoranga o te wira huri: Φ300 mm te wira huri taimana.

Te rerekētanga matotoru o roto i te angaanga (TTV): Iti iho i te 3.0 μm (mā te whakamahi i tētahi tēpu mahi motuhake, te angaanga φ300 mm).

Te rerekētanga matotoru i waenga i ngā angaanga: I raro i te ±3.0 μm.

Te taratara o te mata i muri i te whakaotinga: Ry tata ki te 0.13 μm (mā te whakamahi i te wira huri #2000); Ry tata ki te 0.15 μm (mā te whakamahi i te wira huri #1400).

Ngā rahinga taputapu (W × T × T): Tata ki te 1,400 × 3,190 × 1,800 mm.

Taumaha taputapu: Tata ki te 4,000 kg.

Mana e hiahiatia ana: Āhua-toru 200/220/380/400 V, 50/60 Hz, ko te mana mōrahi e pau ana ko te 22 kVA.

Hau kōpeke e hiahiatia ana: Neke atu i te 0.5 MPa, ma, kāore he hinu, kei raro iho i te -15℃ te ira tomairangi, tata ki te 1,000 NL/min te tere rere.

Ngā whakaritenga mō te tuku wai: wai DI (wai whakakore ion), pāmahana 23±1℃, tere rere 6-10 L/min.

Ngā Painga Matua

Kei te whakaū tonu te DFG8560 i tōna tūranga mākete hei taputapu whakangāwari angiangi tino pai me ngā painga e whai ake nei:

Te tino tika o te huri: Mā te hoahoa kua arotauhia, ka tino pai ake te kounga o te huri, ka tutuki ai te matotoru o roto i te angaanga (TTV) me te ōritetanga i waenga i ngā angaanga, kia pai ai te mahi mō ngā tukanga uaua pēnei i te takai matatau.

Kounga Huri Pūmau: Mā te whakamahi i ngā tawhā huri me te whakahaere pai rawa atu ka taea te huri angiangi rawa, ā, ka taea te whakahaere i te tere pakaru, he mea nui tēnei mō ngā angiangi rahi-rahi utu nui.

Āhuatanga Tauine Pai Rawa: He maha ngā kōwhiringa whakauru ā-roto (pēnei i te DBG me te whakakanapa maroke), ka taea te urutau ki ngā whakapainga raina whakaputa me te tiaki katoa i te haumi a te kaiwhakamahi.

Hototahi Kaha: Ka taea te whakahaere i ngā momo rauemi (pēnei i te silicon, SiC, GaN, hapaira, LT/LN), ka whakarato i te ngāwari nui o te tukanga mō te hanga i ngā momo semiconductors me ngā taputapu optoelectronic.

He ngāwari ki te whakamahi, he ngāwari hoki ki te tiaki: Mā te atanga kaiwhakamahi me te mata pa e ngāwari ki te whakamahi ka tino whakaiti i te paepae whakahaere. I taua wā, ka taea te whakawhiti i ngā wāhanga matua me te raupapa 800, ka whakaiti i ngā utu o ngā rawa o ngā wāhanga e toe ana me ngā mōrearea mō te kore mahi.

Hoahoa Māmā: I tutuki he whakahekenga taumaha 1.0-tana (tata ki te 20%) me te pupuri tonu i ngā whakaritenga me te mahi. Mā ngā taputapu māmā ake ka māmā ake te tukanga tāutanga, ā, ka whakaitihia hoki ngā whakaritenga amo kawenga o te papa wheketere.

Whakarāpopototanga o ngā Āhuatanga Hangarau: Hoahoa Kapu Momi-Toru Tuaka-Rua: Ka wehea te huri taratara me te huri pai, ka oti i roto i te mahi piri kotahi, ka whakapai ake i te whai huatanga me te whakarite i te tika.

Miro hau-pūmau: Mā te whakamahi i tētahi miro hau-pūmau, ka whakakorehia e tēnei hoahoa te pā o te mīhini, ka iti ake te pakaru, ā, ka mau tonu te tika o te hurihuri mō ngā wā roa. He wāhanga matua tēnei mō te whakatutuki i te tika o te miihini tino teitei.

Hangarau whakahāngai ira huri takirua: Mā tēnei hangarau ka taea e ngā miro e rua te tohatoha i te tūranga huri tinana kotahi, ka whakakorea ngā hapa pūnaha i puta mai i te hē o te whakahāngai ira tukatuka. Ka whakapai ake tēnei i te ōritetanga matotoru (TTV) i roto i te wafer kotahi me te ōritetanga matotoru i waenga i ngā wafer, ka waiho hei hangarau matua mō te whakatutuki i te huri angiangi tino pumau.

Whakarāpopototanga: Hei whakamutunga, ko te DISCO DFG8560 he otinga whakaangawari wafer 12-inihi kua hangaia mō te hanga papatipu. Kei roto i ōna āhuatanga matua he hoahoa takirua-porowhita tika me te pumau o te pūnaha, e āhei ai te ōritetanga teitei me te kounga o te mata i te tukatuka i ngā wafer nui, tino angiangi, me ngā āheinga whakauru aunoa kaha.