Chopukusira cha DISCO DFG8560

Monga kukweza ku mndandanda wa DFG800, DISCO DFG8560 ndi makina ochepetsera ma wafer okha. Yapangidwa mwapadera kuti ikwaniritse zovuta za kuchepetsera ma wafer a mainchesi 12. Mfundo yake yayikulu yogwirira ntchito imachokera pa kasinthidwe ka dual-spindle ndi triple-chuck, kumaliza magawo onse a "rough grinding" ndi "fine grinding" a njira yochepetsera ma wafer mu ntchito imodzi yotsekera ma wafer. Kapangidwe kameneka kamathandiza kwambiri kukonza bwino ntchito komanso kuwongolera molondola.

**Mfundo Yogwirira Ntchito**

DFG8560 imapeza kupendekeka kwa wafer kudzera mu kayendedwe ka makina kolondola kwambiri:

**Kapangidwe Kolimba Kwambiri:** Makinawa amagwiritsa ntchito spindle yolimba kwambiri yokhala ndi mpweya, zomwe zimapangitsa kuti ikhale yolimba kwambiri panthawi yonse yopera.

**Njira Yopera ya Masitepe Awiri:**

**Kupera Mopanda Mphamvu:** Chopondera choyamba chimagwiritsa ntchito gudumu lolimba kwambiri (monga gudumu la diamondi lolumikizidwa ndi resin). Kuzungulira mwachangu kumachotsa mwachangu zinthu zambiri kumbuyo kwa wafer, zomwe zimapangitsa kuti ntchito ikhale yogwira ntchito bwino kwambiri.

**Kupera Mopyapyala:** Chopondera chachiwiri chimagwiritsa ntchito gudumu lopyapyala (monga gudumu la diamondi lolumikizidwa ndi ceramic) popera bwino wafer. Njirayi imapanga malo osalala, athyathyathya ndikuchotsa gawo lowonongeka lomwe limapangidwa panthawi yopera mopyapyala.

Pakugwira ntchito kwenikweni, wafer imagwiridwa pamalo pake pa chuck yozungulira pogwiritsa ntchito vacuum suction. Chuck imazungulira mosiyana ndi gudumu lopera lachangu; gudumu limapita pansi molunjika, ndikudula pamwamba pa wafer.

**Zinthu Zofunika**

Ntchito yaikulu ya DFG8560 ndi kuchepetsa ma wafer. Pachifukwa ichi, imagwirizanitsa ntchito zofunika kwambiri:

**Kugwira Ntchito Yokha:** Zipangizozi zimayendetsa ntchito yonse kuyambira pakukweza, kulumikiza, kupukuta, kuyeretsa mpaka kutsitsa, kuchepetsa kwambiri kugwiritsa ntchito ndi manja komanso kukonza bwino ntchito yopangira.

**Kuwongolera Kunenepa Molondola Kwambiri:** Mwa kuphatikiza njira yoyezera makulidwe pa intaneti yokhala ndi mawonekedwe apamwamba (0.1 μm), chipangizochi chimakwaniritsa kuwongolera kozungulira kwa njira yopera, ndikutsimikizira kulondola kwa makulidwe omaliza a wafer.

**Kukonza Wafer Woonda Kwambiri:** Mwa kukonza bwino magawo a makina opukutira ndi kukonza, DFG8560 imatha kukonza bwino ma wafer owonda kwambiri okhala ndi makulidwe a 100 μm kapena kuchepera, pomwe ikuchepetsa chiopsezo cha kusweka kwa wafer.

**Kuzindikira Ziphuphu:** Dongosololi limatha kuzindikira zolakwika pamwamba pa wafer, kupereka chithandizo chofunikira cha deta kuti zikonzedwe pambuyo pake kapena ma feedback loops.

**Chipangizo Chosavuta Kugwiritsa Ntchito:** Chili ndi LCD yotchinga ndi mawonekedwe owonetsera ogwiritsa ntchito (GUI), makinawa amawonetsa momwe zinthu zilili komanso momwe zida zilili nthawi yeniyeni, zomwe zimapangitsa kuti ntchito ndi kukonza zikhale zosavuta komanso zosavuta kugwiritsa ntchito.

**Kuphatikiza ndi Kukulitsa Paintaneti:** DFG8560 ikhoza kuphatikizidwa mosavuta m'mizere yovuta kwambiri yopangira yokha, monga:

**DBG (Post-Die Grinding System):** Imagwiritsa ntchito njira zodulira ndi kupukuta, zomwe zimapangitsa kuti ikhale yoyenera kwambiri popanga ma chips owonda kwambiri.

**Makina Opukutira Ouma (monga, DFP8160):** Amapanga dongosolo logwirizana lomwe limachita kupukuta kouma pambuyo popukutira, kuchepetsa kuuma kwa pamwamba pa wafer (Ry value) ndikuchotsa kuwonongeka komwe kumachitika chifukwa chopukutira.

**Wafer Laminator/Stripper:** Yophatikizidwa kuti igwiritse ntchito kapena kuchotsa mafilimu opukutira oteteza, ndikupanga njira yonse yogwirira ntchito yokha.

**SECS/GEM Communication:** Chipangizochi chimathandizira njira yolumikizirana ya SECS/GEM, zomwe zimathandiza kulumikizana ndi factory Manufacturing Execution System (MES) kuti iwunikire patali komanso kupeza deta yopangidwa yokha.

**Mapulogalamu ndi Ntchito:**

Ntchito yaikulu ya DFG8560 ndikupatsa ma wafer makulidwe ofanana komanso apamwamba kwambiri pazinthu zina monga kudula ndi kulongedza; kuyanjana kwake ndi zinthu zambiri kumapangitsanso kuti ikhale yoyenera kugwiritsidwa ntchito m'njira zosiyanasiyana.

**Kuchepetsa Wafer:** Kuchepetsa makulidwe a wafer kuchokera ku makulidwe ake oyambirira kufika ku makulidwe omwe akufuna—chofunikira kwambiri pa ntchito zonse.

**Kuchotsa Zigawo Zowonongeka:** Kuchotsa zigawo zowonongeka zomwe zimapangidwa m'njira zopita kumtunda (monga kupukuta kumbuyo)—gawo lofunika kwambiri pakutsimikizira mphamvu ya makina a chip.

**Kukonza Malo Ozungulira:** Kupereka gawo lapansi losalala kwambiri kuti zinthu zichitike molondola (monga kujambula zithunzi ndi kugwirizana)—chofunikira popanga zinthu molondola kwambiri.

**Kupaka ndi Kuwonetsa TSV mu 3D:** Kupereka ma wafers opyapyala ofunikira kuti akwaniritse ukadaulo wa Through-Silicon Vias (TSV) ndikuwunikira bwino pansi pa kapangidwe ka TSV—gawo lofunika kwambiri la kupakidwa kwapamwamba.

Kupanga Zipangizo Zamagetsi ndi RF: Zimagwiritsidwa ntchito pochepetsa ma wafer a SiC, GaN, ndi ma wafer ena a semiconductor kuti achepetse kukana ndikuwongolera kutentha.

Kupanga Chipangizo Chowunikira ndi Chosefera: Chimagwiritsidwa ntchito pochepetsa ndi kugawa bwino zinthu zolimba komanso zofooka monga safiro (LED substrate) ndi lithiamu tantalate/lithium niobate (RF filter).

Mafotokozedwe Atsatanetsatane

Mafotokozedwe Mafotokozedwe

Kukula kwa Ntchito Yogwirira Ntchito: Φ300 mm (mainchesi 12). Chuck ya Universal imathandizira ma wafer a Φ200 mm/Φ300 mm.

Njira Yopera: Kupera kwa wafer longitudinal in-feed.

Kapangidwe ka Spindle: Ma spindle awiri (ma axes awiri). Spindle yokhazikika yoyendetsedwa ndi injini yoyendetsedwa ndi mpweya.

Kapangidwe ka Tebulo la Chuck: Matebulo atatu a chuck, pogwiritsa ntchito makina ozungulira a tebulo. Liwiro la chuck: 0-300 rpm.

Mphamvu ya Spindle: Yopangidwa ndi 4.8 kW.

Liwiro la Spindle: 1,000 - 4,000 min⁻¹ (rpm).

Ulendo wa Z-axis: 120 mm (kuphatikiza komwe unayambira).

Chiŵerengero cha chakudya chopukusira cha Z-axis: 0.0001 - 0.08 mm/s (0.1 - 80 μm/s).

Kusuntha kochepa kwa Z-axis: 0.1 μm.

Kuyeza makulidwe: 0 - 1,800 μm.

Kuyeza makulidwe: 0.1 μm.

Kubwerezabwereza kwa muyeso wa makulidwe: ± 0.5 μm.

Zofunikira pa gudumu lopukusira: Gudumu lopukusira la diamondi la Φ300 mm.

Kupotoka kwa makulidwe a mkati mwa wafer (TTV): Osakwana 3.0 μm (pogwiritsa ntchito tebulo logwirira ntchito lokha, wafer wa φ300 mm).

Kupatuka kwa makulidwe pakati pa ma wafer: Osakwana ±3.0 μm.

Kukhwima kwa pamwamba mutamaliza: Ry pafupifupi 0.13 μm (pogwiritsa ntchito gudumu lopukusira #2000); Ry pafupifupi 0.15 μm (pogwiritsa ntchito gudumu lopukusira #1400).

Miyeso ya zida (W × D × H): Pafupifupi 1,400 × 3,190 × 1,800 mm.

Kulemera kwa zida: Pafupifupi makilogalamu 4,000.

Mphamvu yofunikira: Gawo lachitatu 200/220/380/400 V, 50/60 Hz, mphamvu yogwiritsira ntchito mphamvu yokwana pafupifupi 22 kVA.

Mpweya wopanikizika wofunikira: Wopitirira 0.5 MPa, woyera komanso wopanda mafuta, mame ali pansi pa -15℃, kuthamanga kwa madzi pafupifupi 1,000 NL/min.

Zofunikira pakupereka madzi: Madzi a DI (madzi oyeretsedwa), kutentha 23±1℃, kuchuluka kwa madzi 6-10 L/min.

Ubwino Waukulu

DFG8560 ikupitilizabe kulimbitsa msika wake ngati chipangizo chochepetsera ma wafer chomwe chimagwira ntchito bwino kwambiri ndi zabwino zotsatirazi:

Kulondola kwambiri pogaya: Kudzera mu kapangidwe kabwino, ubwino wa kugaya umawonjezeka bwino, zomwe zimapangitsa kuti makulidwe a intra-wafer akhale ofanana (TTV) komanso kuti mawafer akhale ofanana, zomwe zimapangitsa kuti zinthu zizigwira ntchito bwino pa ntchito zovuta monga ma CD apamwamba.

Ubwino Wogaya Wokhazikika: Kugaya ndi kugwiritsa ntchito bwino kumathandiza kuti ma wafer osalala komanso owonda kwambiri azitha kugaya, zomwe zimathandiza kuti azigaya bwino, zomwe ndizofunikira kwambiri pa ma wafer akuluakulu.

Kukula Kwapamwamba: Kumapereka njira zambiri zolumikizirana (monga DBG ndi dry polishing), kusintha mosavuta kuti zigwirizane ndi kusintha kwa mzere wopanga ndikuteteza kwathunthu ndalama zomwe ogwiritsa ntchito amagwiritsa ntchito.

Kugwirizana Kwambiri: Kutha kugwira ntchito ndi zipangizo zosiyanasiyana (monga silicon, SiC, GaN, safiro, LT/LN), zomwe zimapangitsa kuti pakhale kusinthasintha kwakukulu pakupanga ma semiconductor osiyanasiyana ndi zida zamagetsi.

Yosavuta Kugwiritsa Ntchito Komanso Yosavuta Kuisamalira: GUI yosavuta kugwiritsa ntchito ndi touchscreen zimachepetsa kwambiri malire ogwiritsira ntchito. Pakadali pano, zigawo zazikulu zimatha kusinthidwa ndi mndandanda wa 800, zomwe zimachepetsa ndalama zosungira zida zosinthira komanso zoopsa za nthawi yopuma.

Kapangidwe Kopepuka: Kuchepetsa kulemera kwa matani 1.0 (pafupifupi 20%) kunatheka posunga zofunikira ndi magwiridwe antchito. Zipangizo zopepuka zimapangitsa kuti njira yoyikira ikhale yosavuta komanso imachepetsa zofunikira zonyamula katundu pansi pa fakitale.

Chidule cha Zinthu Zaukadaulo: Kapangidwe ka Chikho cha Dual-Axis Three-Suction Cup: Chimalekanitsa kupukusa kosalala ndi kupukusa pang'ono, ndikumaliza ntchito imodzi yomangirira, ndikuwonjezera magwiridwe antchito pamene mukutsimikizira kulondola.

Spindle yokhazikika pa mpweya: Pogwiritsa ntchito spindle yokhazikika pa mpweya, kapangidwe kameneka kamachotsa kukhudzana kwa makina, zomwe zimapangitsa kuti pasakhale kuwonongeka kwambiri komanso kusunga kulondola kozungulira kwa nthawi yayitali. Ndi gawo lofunikira kwambiri pakukwaniritsa kulondola kwambiri kwa makina.

Ukadaulo wolumikiza mfundo ziwiri: Ukadaulo uwu umalola ma spindle awiri kugawana malo ofanana opukutira, kuchotsa zolakwika zomwe zimachitika chifukwa cha kusalinganika bwino kwa mfundo. Izi nthawi imodzi zimathandizira kuti makulidwe akhale ofanana (TTV) mkati mwa wafer imodzi komanso makulidwe pakati pa ma wafer, zomwe zimapangitsa kuti ikhale ukadaulo wofunikira kwambiri wopukutira wokhazikika komanso wowonda kwambiri.

Chidule: Pomaliza, DISCO DFG8560 ndi njira yochepetsera ma wafer ya mainchesi 12 yokha yomwe idapangidwa kuti ipange zinthu zambiri. Zinthu zake zazikulu zimaphatikizapo kapangidwe kake kolondola ka ma spindle awiri komanso kukhazikika kwabwino kwa makina, zomwe zimathandiza kuti pakhale kufanana kwapamwamba komanso mawonekedwe abwino kwambiri pokonza ma wafer akuluakulu, owonda kwambiri, komanso kuthekera kwamphamvu kophatikiza ma automation.