Chopukusira cha DISCO wafer DGP8761

DISCO DGP8761 ndi makina opukutira/kupukuta okha omwe akuyimira ukadaulo wake wapamwamba kwambiri, wopangidwira makamaka njira zochepetsera ma wafer a mainchesi 300 (300mm) zomwe zimagwiritsidwa ntchito bwino kwambiri. Chinthu chake chachikulu ndi kuthekera kwake kumaliza ntchito yonse—kuyambira kupukutira kosalala kumbuyo ndi kupukutira pang'ono mpaka kuchotsa kupsinjika—mu ntchito imodzi, yopitilira, yokonza ma wafer nthawi zonse mpaka makulidwe owonda kwambiri osakwana 25μm.

Popeza ndi yosinthidwa mwalamulo kukhala DGP8760 yodziwika bwino komanso yogulitsidwa kwambiri, ili ndi malonda abwino kwambiri pakati pa opanga apamwamba padziko lonse lapansi ndipo ndi chida chofunikira kwambiri pakulongedza zinthu zapamwamba, zida zamagetsi, ndi njira zina zomwe zimafuna kupanga ma wafer owonda kwambiri.

Chigawo Cha Hardware: Luntha ndi Kusintha kwa Kapangidwe ka Magawo Atatu

Chimake cha kusintha kwa magwiridwe antchito a DGP8761 chili mu kapangidwe kake kolondola ka ma axis atatu (ma axes atatu) ndi matebulo anayi (ma chuck-tables anayi).

Gawo la Ntchito la Axis Atatu:

Z1 Axis (Kupera Kovuta): Ili ndi udindo wochotsa mwachangu zinthu zambiri kumbuyo kwa wafer.

Z2 Axis (Kupera Mopyapyala): Imagwira ntchito yopera mopyapyala pamwamba pa wafer, zomwe zimapangitsa kuti makulidwe ake akhale olondola.

Z3 Axis (Kukonza Mosiyanasiyana): Ichi ndi chinsinsi cha kusinthasintha kwake. Ogwiritsa ntchito amatha kusankha kupukuta kouma (kuchepetsa kupsinjika), kupukuta kolondola kwambiri (Poligrind/UltraPoligrind), kapena ma module apadera a CMP kuti athetse kupsinjika, kuchotsa getter, ndi ntchito zina, kutengera zomwe zimafunika pa ndondomekoyi.

Spindle Yopangidwa Mwatsopano: Spindle yatsopanoyi imathandizira kupukutira mwachangu, zomwe zimapangitsa kuti nthawi yokonza ma wafers opyapyala ichepe. Nthawi yomweyo, kapangidwe kabwino ka mayendedwe kamachepetsa nthawi yosakonza, zomwe zimapangitsa kuti magwiridwe antchito onse azigwira ntchito bwino.

Mafotokozedwe Apamwamba a Spindle Performance:

Z1/Z2 Axis: Mphamvu ya spindle yawonjezeka kufika pa 6.3 kW, liwiro la 1,000 - 4,000 min⁻¹, kuyenda kwa Z-axis 120 mm.

Z3 Axis: Mphamvu ya spindle 5.3 kW, kuyenda kwa Z-axis 65 mm.

Kulondola kwa Z-Axis: Kuchuluka kwa chakudya choyima cha 0.0001 - 0.08 mm/s, kuyenda kochepa kwa 0.1 μm kumatsimikizira kulondola kwa makina.

Chidule cha Tsatanetsatane wa Mafotokozedwe

Gulu la Ma Parameter | Zizindikiro Zapadera

Kukula kwa Ntchito Yogwirira Ntchito: Φ200 mm / Φ300 mm (mainchesi 8 / mainchesi 12)

Njira Yopera: Z1/Z2 Axis: Kupera mkati mwa chakudya (kuzungulira kwa wafer)

Z3 Axis: Kugaya kosazolowereka mkati mwa chakudya (kuzungulira kwapadera kwa wafer)

Kapangidwe ka Spindle: Ma spindle atatu (nkhwangwa zitatu)

Kapangidwe ka tebulo logwirira ntchito: Matebulo anayi a chuck (matebulo anayi a chuck), pogwiritsa ntchito dongosolo la tebulo lozungulira

Zida Zopera/Kupukuta: Z1/Z2 Axis: Φ300 mm gudumu lopera la diamondi

Z3 Axis (DP): Φ450 mm chopukutira chouma

Z3 Axis (CMP): Φ450 mm CMP polishing pad

Miyeso ya Zipangizo: 1,690 mm (W) × 3,315 mm (D) × 1,800 mm (H)

Chitsanzo Choyikidwa pa FOUP: × 3,452 mm (D)

Kulemera kwa Zipangizo: Pafupifupi 6,700 kg (DP, kapangidwe ka Poligrind)

Pafupifupi 6,900 kg (kapangidwe ka CMP)

Zofunikira pa Mphamvu: Gawo Lachitatu 200/220/380/400 V, 50/60 Hz

Mpweya Wopanikizika: Woposa 0.5 MPa, woyera komanso wopanda mafuta, mame ali pansi pa -15℃

Ntchito Zazikulu ndi Ubwino wa Njira:

Mpikisano waukulu wa DGP8761 uli mu kuphatikiza kwake bwino kwa njira zingapo, zomwe zimapangitsa kuti pakhale zotsatira za "1+1>2".

Yankho la Malo Okha: Kudzera mu mkono wamkati wa roboti, wafer imatha kumaliza ntchito yonse yopera yopyapyala → kupukuta bwino → kupukuta kouma → kuyeretsa ndi kuumitsa, kupewa chiopsezo cha kugawanika komwe kumachitika chifukwa chogwira ntchito zingapo ndikufupikitsa kwambiri nthawi yopangira. DGP8761 imatha kukwaniritsa kusiyana konse kwa makulidwe (TTV) kosakwana 3μm pomwe ikukhalabe ndi mphamvu yopindika kwambiri.

Kupukuta Kouma ndi Kutola Kokongola (Kupeza): Ichi ndi chimodzi mwa zinthu zodziwika bwino za DGP8761. Imagwiritsa ntchito kupukuta kouma kwa Z3-axis kuti ichotse gawo lopopera, lomwe silimangoteteza chilengedwe kuposa njira zachikhalidwe zonyowa (zopanda mankhwala kapena madzi), komanso limapanga gawo lowonongeka pang'ono mkati mwa wafer, lomwe limagwira ntchito ngati "getter zone" kuti ligwire zonyansa zachitsulo, ndikuwonjezera kudalirika kwa zokolola ndi chip. Ukadaulo wapadera wa DISCO wa UltraPoligrind micro-abrasive umasunga mphamvu ya getter pomwe ukupeza mphamvu yayikulu ya chip.

Kusintha Kosinthika ndi Chilengedwe Chogwiritsira Ntchito

DGP8761 si chipangizo chokhachokha; imatha kulumikizidwa mosavuta m'makina osiyanasiyana odziyimira pawokha.

Kukula kwa Kulumikizana: Ikhoza kulumikizidwa ku DFM2800 multi-functional wafer attacher kuti igwirizane mwachindunji ndi DAF (Die Attach Film) pambuyo pochepetsa. Ingagwiritsidwenso ntchito popanga njira zamakono monga DBG (Dicing Before Grinding) kuti iwonjezere kuchuluka kwa ma wafers owonda.

Kukonza ndi Zida Zosinthira: Zimagwirizana ndi DISCO Mndandanda wa 8000 umakhala ndi magwiridwe antchito ambiri, ndipo zinthu zofunika kwambiri monga mawilo opukutira ndi mbale zosinthira zimakhala zosinthika, zomwe zimathandiza kukonza ndikuchepetsa ndalama zogulira zida zosinthira.

Mapulogalamu ndi Ntchito: Pogwiritsa ntchito mawonekedwe a GUI kutengera ukadaulo wa 8000 series, njira yogwirira ntchito yogwirizana imafupikitsa nthawi yophunzitsira ya wogwiritsa ntchito.

Malo ndi Kugwiritsa Ntchito Msika: DGP8761 imagwiritsidwa ntchito kwambiri popanga ma phukusi apamwamba (HPC/AI/3D IC), ma semiconductor amphamvu, ndi zida za MEMS. DISCO imaperekanso ntchito zodulira ndi kupukuta maziko pogwiritsa ntchito zida izi m'malo ake apadziko lonse lapansi aukadaulo (monga ku China ndi Singapore).

Zofunika Kuganizira Zosamalira: Kuti zitsimikizire kulondola, kutsatira kwambiri malamulo a DISCO (kutentha ndi chinyezi mkati mwa ±1°C, mpweya woyera wopanikizika) ndi zofunikira zomwe zingathe kugwiritsidwa ntchito ndikofunikira. Kuphatikiza apo, mfundo ya kayendedwe ka Z3 axis (kuphatikiza magawo 5 a machining ndi magawo a malo) imakhudza mwachindunji phindu la machining; makonda osayenera a parameter angayambitse mavuto pa ntchito.

Chidule: DISCO DGP8761 ndi makina opukutira/kupukuta apamwamba kwambiri omwe amaphatikiza bwino kwambiri kulondola kwambiri, kugwira ntchito bwino kwambiri, komanso kusinthasintha kwa njira. Sikuti imangopanga njira yopangira ma chips opyapyala kwambiri komanso, kudzera mu kukula kwamphamvu kwa makina ake, imakhala gawo lofunika kwambiri popanga mafakitale apamwamba anzeru a semiconductor. Kwa opanga otsogola omwe akufuna magwiridwe antchito apamwamba komanso kukhazikika kwa njira, imayimira ndalama zambiri.