Imashini yo gusya ya DISCO DGP8761

DISCO DGP8761 ni imashini isya/isukura yikora ubwayo, ihagarariye ikoranabuhanga ryayo ry’ibanze, yagenewe by’umwihariko uburyo bwo gukata wafer ya santimetero 300 (300mm) ifite ubushobozi bwo kuyigabanya. Ikintu cy’ingenzi ikora ni ubushobozi bwayo bwo kurangiza igikorwa cyose—kuva ku gusya inyuma no gusya neza kugeza ku gukuraho imitsi—mu gikorwa kimwe, gihoraho, gitunganya wafer kugeza ku bunini buto cyane buri munsi ya 25μm.

Kubera ko yavuguruwe ku mugaragaro ikaba DGP8760 izwi cyane kandi igurishwa cyane, ifite imikorere myiza mu kugurisha mu nganda zikomeye ku isi kandi ni ibikoresho by'ingenzi mu gupakira ibikoresho bigezweho, ibikoresho by'amashanyarazi, n'izindi nzira zisaba gukora wafer nto cyane.

Ibikoresho by'ingenzi: Ubuhanga n'Iterambere ry'Igishushanyo cy'Imirongo Mitatu

Ishingiro ry'impinduka mu mikorere ya DGP8761 riri mu miterere yayo ihamye y'imirongo itatu (imirongo itatu) n'imirongo ine (imirongo ine).

Ishami ry'Umurimo rifite imitwe itatu:

Z1 Axis (Gusya nabi): Ishinzwe gukura vuba ibikoresho byinshi inyuma y'umugati.

Z2 Axis (Gusya neza): Ikora gusya neza ku buso bwa wafer, ikagera ku kugenzura neza ubugari.

Z3 Axis (Gutunganya ibintu byinshi): Ibi ni ingenzi mu gutuma ihinduka. Abakoresha bashobora guhitamo isuku yumye (igabanya stress), isya neza cyane (Poligrind/UltraPoligrind), cyangwa modules zihariye za CMP kugira ngo bakureho stress, bakureho getter, n'izindi nshingano, bitewe n'ibisabwa mu buryo.

Umugozi mushya wakozwe: Umugozi mushya ufasha mu gusya vuba, bikagabanya neza igihe cyo gutunganya imigozi mito. Muri icyo gihe, imiterere myiza yo gutwara igabanya igihe cyo kudatunganya, bikongera imikorere muri rusange.

Ibisobanuro by'imikorere yo hejuru ya Spindle:

Z1/Z2 Axi: Ingufu z'umugozi zariyongereye zigera kuri 6.3 kW, umuvuduko wa 1.000 - 4.000 min⁻¹, ingendo za Z-axis 120 mm.

Z3 Axi: Ingufu z'umugozi 5.3 kW, ingendo za Z-axis 65 mm.

Ubuziranenge bwa Z-Axis: Igipimo cyo kugaburira gihagaze cya 0.0001 - 0.08 mm/s, urugendo ruto rwa 0.1 μm rutuma habaho gukora neza.

Incamake y'ibisobanuro birambuye

Icyiciro cya Parametero | Ibipimo byihariye

Ingano y'ibikoresho bikoreshwa: Φ200 mm / Φ300 mm (inchi 8 / inchi 12)

Uburyo bwo gusya: Z1/Z2 Axis: Gusya mu ifunguro (guhinduranya umugati)

Z3 Axis: Gusya mu buryo budasanzwe (guhinduranya wafer)

Imiterere y'urusobe: Udusobe dutatu (imishumi itatu)

Imiterere y'imbonerahamwe y'akazi: Ameza ane y'inyuma (ameza 4 y'inyuma), hakoreshejwe sisitemu y'ameza azunguruka

Ibikoresho byo gusya/gusukura: Z1/Z2 Axis: Φ300 mm diyama isya urukiramende

Z3 Axis (DP): Φ450 mm yumye yo gusiga irangi

Z3 Axis (CMP): Φ450 mm CMP polishing pad

Ingano z'ibikoresho: 1,690 mm (Ubugari) × 3,315 mm (Ubugari) × 1,800 mm (Ubugari)

Icyitegererezo cya FOUP: × 3,452 mm (D)

Uburemere bw'ibikoresho: Hafi 6.700 kg (DP, imiterere ya Poligrind)

Hafi 6.900 kg (imiterere ya CMP)

Ibisabwa ku ngufu: Ibyiciro bitatu 200/220/380/400 V, 50/60 Hz

Umwotsi Ufunze: Hejuru ya 0.5 MPa, nta mavuta meza kandi nta ruhushya, ikigero cy'ikime kiri munsi ya -15℃

Imirimo y'ingenzi n'inyungu z'imikorere:

Ihiganwa ry'ingenzi rya DGP8761 riri mu guhuza neza ibikorwa byinshi, rigera ku ngaruka za "1+1>2".

Igisubizo cya One-Stop: Binyuze mu kuboko kwa roboti imbere, wafer ishobora kurangiza mu buryo bwikora igikorwa cyose cyo gusya neza → gusya neza → gusukura byumye → gusukura no kumisha, birinda ibyago byo gucikamo ibice biterwa no gufata ibintu byinshi no kugabanya cyane uruziga rw'umusaruro. DGP8761 ishobora kugera ku bunini bwose (TTV) buri munsi ya 3μm mu gihe igumana imbaraga nyinshi zo kugorora.

Gusukura byumye no Gutoragura (Gufata): Iki ni kimwe mu bintu bizwi cyane bya DGP8761. Ikoresha gusukura byumye bya Z3-axis kugira ngo ikureho urwego rwo gusya, rutangiza ibidukikije gusa kurusha uburyo busanzwe bwo gutose (nta miti cyangwa amazi bikoreshwa), ahubwo inakora urwego rwo kugenzura ibintu byangiza imbere muri wafer, rukora nk'"agace ko gufata imyanda y'icyuma" kugira ngo rufate imyanda, runoze umusaruro kandi rugire ubwiza bw'udupira. Ikoranabuhanga ridasanzwe rya DISCO rya UltraPoligrind rikomeza gukora neza mu gihe rigera ku mbaraga nyinshi za chip.

Imiterere n'Imikoreshereze y'Ibidukikije mu buryo bworoshye

DGP8761 si igikoresho cyihariye; gishobora kwinjira mu buryo butagorana muri sisitemu zitandukanye z’imikorere y’ikoranabuhanga.

Kwagura uburyo bwo guhuza: Ishobora guhuzwa na DFM2800 multi-functional wafer attacher kugira ngo ifatanye na DAF (Die Attach Film) nyuma yo gukata. Ishobora kandi gukoreshwa mu kubaka sisitemu zigezweho nka DBG (Dicing Before Grading) kugira ngo yongere umusaruro wa wafers zoroshye.

Kubungabunga n'Ibikoresho Bisimburana: Bihuye na DISCO. Uruhererekane rwa 8000 rugumana ubushobozi bwo gukorana neza, aho ibice by'ingenzi nk'amapine yo gusya n'amasahani yo kwambara bishobora gusimburana, bikoroshya kubungabunga no kugabanya ikiguzi cy'ibikoresho bisimburana.

Porogaramu n'Imikorere: Hakoreshejwe uburyo bwa GUI bushingiye ku ikoranabuhanga rya serivise 8000 rikuze, uburyo bwo gukora buhuza bugabanya igihe cyo guhugura abakoresha.

Isoko rihagaze n'ikoreshwa ryaryo: DGP8761 ikoreshwa cyane mu gupakira ibintu bigezweho (HPC/AI/3D IC), ibikoresho bya semiconductors zikoresha ingufu, n'ibikoresho bya MEMS. DISCO itanga kandi serivisi zo gukata no gusya ikoresheje ibi bikoresho mu bigo byayo by'ikoranabuhanga ku isi (nk'Ubushinwa na Singapuru).

Ibigomba kwitabwaho mu kubungabunga: Kugira ngo habeho ko ibintu ari byiza, gukurikiza neza ibidukikije bya DISCO (ubushyuhe n'ubushuhe biri muri ± 1°C, umwuka mwiza ufunze) n'ibisabwa mu gukoresha ni ngombwa. Byongeye kandi, uburyo bwo kugenda bwa Z3 axis (harimo n'ibipimo 5 by'imikorere n'aho ibintu biri) bigira ingaruka zitaziguye ku musaruro w'imikorere; imiterere idakwiye y'ibipimo ishobora gutera ibibazo mu mikorere.

Incamake: DISCO DGP8761 ni imashini isya/isukura igezweho ihuza neza ubuhanga bwo hejuru, imikorere myiza, no koroshya imikorere. Ntabwo itegura inzira yo gukora chips zigezweho gusa, ahubwo, binyuze mu buryo bukomeye bwo kwagura imikorere yayo, iba ingenzi mu kubaka inganda zigezweho za semiconductor smart. Ku nganda zikomeye zishaka imikorere myiza no kudahungabana kw'imikorere, ni ishoramari rikomeye.