Mīhini huri wafer DISCO DGP8761

He mīhini huri/whakakanapa aunoa te DISCO DGP8761, e tohu ana i te tihi o tana hangarau, i hangaia mō ngā tukanga angiangi angiangi angiangi 12-inihi (300mm) tino whai hua. Ko tōna āhuatanga matua ko tōna kaha ki te whakaoti i te tukanga katoa—mai i te huri taratara o muri me te huri pai ki te tango ahotea—i roto i te mahi kotahi, tonu, e tukatuka tonu ana i ngā angiangi ki ngā matotoru tino angiangi i raro i te 25μm.

Hei whakahoutanga mana ki te DGP8760 rongonui, tino hokohoko hoki, e whakamanamana ana ki te mahi hokohoko tino pai i waenga i ngā kaihanga matua o te ao, ā, he taputapu nui hoki mō ngā tākai matatau, ngā taputapu hiko, me ētahi atu tukanga e hiahia ana ki te hanga angiangi rawa.

Te Matua Pūmārō: Te Matatau me te Whanaketanga o te Hoahoa Tuaka-Toru

Ko te ngako o te whanaketanga mahi o te DGP8761 kei roto i tōna hanganga tuaka-toru (tuaka-3) me ngā ripanga-papa-whā (ripanga-papa-4).

Te Wehenga Mahi Tuatoru-Toru:

Tuaka Z1 (Huri Taratara): He kawenga mō te tango wawe i te nuinga o ngā rauemi mai i te taha muri o te anga.

Tuaka Z2 (Huri Matatau): Ka mahi i te huri matatau ki runga i te mata o te papa, kia tika ai te whakahaere i te matotoru.

Tuaka Z3 (Tukatuka Whānui): Koinei te mea nui ki tōna ngāwari. Ka taea e ngā kaiwhakamahi te whiriwhiri i te oro maroke (whakamamae ahotea), te huri tino tika (Poligrind/UltraPoligrind), ngā kōwae CMP motuhake rānei hei tango i te ahotea, te tango i te getter, me ētahi atu mahi, i runga i ngā whakaritenga tukanga.

He Miro Hou: Ka tautoko te miro hou i te huri tere-rahi, ka whakapoto i te wā tukatuka mō ngā angiangi. I te wā kotahi, ka whakaitihia te wā kore tukatuka e te whakatakotoranga kawe kua arotauhia, ka whakapai ake i te whai huatanga whānui.

Ngā Whakatakotoranga Mahi Pūrerehua Teitei Ake:

Tuaka Z1/Z2: Kua piki ake te mana o te miro ki te 6.3 kW, te tere 1,000 - 4,000 min⁻¹, te haere o te tuaka-Z 120 mm.

Tuaka Z3: Mana o te miro 5.3 kW, te haere o te tuaka-Z 65 mm.

Te Tika o te Tuaka-Z: Ko te tere whāngai poutū o te 0.0001 - 0.08 mm/s, ko te nekehanga iti rawa o te 0.1 μm ka whakarite i te tika o te miihini.

Ngā Whakatakotoranga Taipitopito Tirohanga Whānui

Kāwai Tawhā | Ngā Tohu Motuhake

Rahi Mahi e tika ana: Φ200 mm / Φ300 mm (8 inihi / 12 inihi)

Tikanga Huri: Tuaka Z1/Z2: Huri ā-whāngai (hurihuri anga)

Tuaka Z3: Hurihanga whāngai rerekē (hurihanga papa motuhake)

Whirihoranga o te Porowhita: E toru ngā porowhita (3 ngā tuaka)

Whirihoranga Tēpu Mahi: E whā ngā tēpu chuck (4 ngā tēpu chuck), mā te whakamahi i te pūnaha tēpu hurihuri

Ngā Utauta Huri/Whakakanapa: Tuaka Z1/Z2: Wira huri taimana Φ300 mm

Tuaka Z3 (DP): papa whakakanapa maroke Φ450 mm

Tuaka Z3 (CMP): Papa whakakanapa CMP Φ450 mm

Ngā Ahu Taputapu: 1,690 mm (Wh) × 3,315 mm (H) × 1,800 mm (H)

Tauira Whakamau FOUP: × 3,452 mm (D)

Taumaha Taputapu: Tata ki te 6,700 kg (DP, whirihoranga Poligrind)

Tata ki te 6,900 kg (whiringa CMP)

Ngā Whakaritenga Mana: 200/220/380/400 V, 50/60 Hz, wāhanga-toru

Hau Kōpeke: Neke atu i te 0.5 MPa, ma, kāore he hinu, kei raro iho i te -15℃ te ira tomairangi

Ngā Mahi Matua me ngā Painga o te Tukanga:

Ko te tino whakataetae o te DGP8761 kei roto i tana whakaurunga angitu o ngā tukanga maha, kia tutuki ai te pānga "1+1>2".

Otinga Kotahi-Mutu: Mā te ringa karetao o roto, ka taea e te angaanga te whakaoti aunoa i te tukanga katoa o te huri taratara → te huri pai → te oro maroke → te horoi me te whakamaroke, ka karo i te tūponotanga o te pakaru i puta mai i te maha o ngā whakahaerenga me te whakapoto i te huringa whakaputa. Ka taea e te DGP8761 te whakatutuki i te rerekētanga matotoru katoa (TTV) iti iho i te 3μm me te pupuri tonu i te kaha piko teitei.

Te Whakakanapa Maroke me te Piki Piki (Te Whiwhi): Koinei tētahi o ngā āhuatanga tino rongonui o te DGP8761. Ka whakamahia e ia te whakakanapa maroke tuaka-Z3 hei tango i te paparanga ahotea huri, ehara i te mea he pai ake te taiao i ngā tukanga mākū tuku iho (kāore he matū, he wai rānei e whakamahia ana), engari ka hangaia hoki he paparanga pakaru-iti ka taea te whakahaere i roto i te wafer, e mahi ana hei "rohe tiki" hei hopu i ngā poke whakarewa, hei whakapai ake i te hua me te pono o te maramara. Ko te hangarau moroiti-whakakanapa UltraPoligrind ahurei a DISCO e pupuri ana i te pānga tiki me te whakatutuki i te kaha maramara teitei kāore i taea i mua.

Whirihoranga Ngāwari me te Pūnaha Rauropi Taupānga

Ehara te DGP8761 i te taputapu motuhake; ka taea te whakauru pai ki roto i ngā pūnaha aunoatanga maha.

Whanuitanga Hononga: Ka taea te hono atu ki te taputapu whakapiri wafer maha-mahi a DFM2800 hei whakapiri tika i te DAF (Die Attach Film) i muri i te whakaangawari. Ka taea hoki te whakamahi hei hanga i ngā pūnaha tukatuka matatau pēnei i te DBG (Dicing Before Grinding) hei whakapai ake i te hua o ngā wafer angiangi.

Te Tiaki me ngā Wāhanga E Tāpui Ana: Hototahi ki te DISCO He tino hototahi te raupapa 8000, me ngā wāhanga matua pēnei i ngā wira huri me ngā pereti whakakakahu ka taea te whakawhiti, e whakahaere ana i te tiaki me te whakaiti i ngā utu mō ngā wāhanga e tāpui ana.

Pūmanawa me te Whakahaere: Mā te whakamahi i tētahi atanga GUI e hangai ana ki te hangarau raupapa 8000 pakeke, ka whakapotohia te wā whakangungu kaiwhakahaere e te arorau whakahaere kotahi.

Tūnga me ngā Whakamahinga o te Mākete: E whakamahia whānuitia ana te DGP8761 i roto i ngā takai matatau (HPC/AI/3D IC), ngā haurua hiko, me ngā taputapu MEMS. Ka whakaratohia hoki e DISCO ngā ratonga tapahi me te huri i ngā whare whakarewa ma te whakamahi i ēnei taputapu i roto i ōna pokapū hangarau o te ao (pēnei i Haina me Singapore).

Ngā Whakaaro Tiaki: Hei whakarite i te tika, he mea nui te piripono ki ngā whakaritenga taiao a DISCO (te pāmahana me te haumākū i roto i te ±1°C, te hau kōpeke ma) me ngā whakaritenga pau. Hei tāpiri, ko te arorau nekehanga tuaka Z3 (tae atu ki ngā raupapa miihini e 5 me ngā tawhā tūranga) ka pā tika ki te hua miihini; ka taea e ngā tautuhinga tawhā hē te arahi ki ngā raruraru tukanga.

Whakarāpopototanga: DISCO Ko te DGP8761 he mīhini huri/whakakanapa kounga teitei e whakakotahi pai ana i te tino tika, te tino whai hua, me te ngāwari o te tukanga. Ehara i te mea ka whakatuwhera noa i te ara mō te hanga maramara tino angiangi hou, engari, mā roto i tōna kaha ki te whakawhanui i te pūnaha, ka noho hei wāhanga matua i roto i te hanga wheketere atamai semiconductor matatau. Mō ngā kaihanga matua e rapu ana i te mahi teitei me te pumau o te tukanga, he haumi rautaki nui tēnei.