Here maramara ASM AMICRA NANO

Ko te AMICRA NANO a ASM he taputapu here maramara-hurihuri tino tika, he mea tino pai rawa atu. Inaa, ehara i te mea he taputapu here maramara-hurihuri noa iho, engari he taputapu e whakakotahi ana i ngā mahi here mate me te here maramara-hurihuri, e whakahaere ngāwari ana i ngā tukanga here rerekē.

Ngā Āhuatanga Matua me ngā Whakatakotoranga Hangarau o AMICRA NANO

Ngā Āhuatanga Whakaahuatanga Taipitopito

Momo Taputapu: Tino tika te here mate / Hurihia te here maramara

Tika Matua: Tika Whakatakotoranga/Whakataurite: ±0.2 µm @ 3σ

Ngā Tikanga Hononga: Hononga Ranu, Hononga Eutectic, Hononga Reera, Hononga Werawera (TCB), Whakaora UV

Awhe Pēhanga Hononga: 0.1 N ki te 20 N (tata ki te 10g ki te 2kg)

Rahi Maramara: Ka taea te pupuri i ngā maramara tino iti, hei tauira, 0.1mm x 0.1mm

Rahi o te Papa: Ka taea te pupuri i ngā papa tae atu ki te 300mm x 300mm

Te Tere Whakaputa (UPH): Tata ki te 200-400 maramara ia haora

Pūnaha Whakahaere: Atanga Matapihi

Ngā Ahu Taputapu: Tapuwae anake 2.23 x 1.0 m (tata ki te 7.3 x 3.3 putu)

Taiao Tukanga He rite tonu ki ngā tātari HEPA me te whakaputa katote, kia pai ai te noho o te rūma ma.

He taipitopito hangarau anō me te whakataurite ki ngā tauira ōrite

Tikanga

Ko te tino tika o te AMICRA NANO i ahu mai i tōna hoahoa ahurei: e whā ngā pūnaha whakaahua taumira teitei e mau ana ki te turanga karāhe tūturu, ko ētahi atu pūnaha whakahaere nekehanga e neke haere ana i ēnei kāmera pumau. I te whakakotahitanga me te whakaiti wiri kaha me te pūnaha whakaritenga hihiri, ka whakarite tēnei i te whakatakotoranga tika.

Ngā Wāhi Whakamahinga

Kua hangaia mō ngā tono tākai matatau me ngā whakaritenga tino tika, inā koa te hiranga i roto i te photonics silicon, te tākai taputapu whatu, te maramara-ki-te-wafer, me te whakaurunga IC 2.5D/3D.

Ngā Painga o te Tukanga

Haunga te tino tika o te whakatakotoranga, ka tautokohia hoki e te AMICRA NANO ngā tukanga here eutectic AuSn tere-teitei, ā, he āheinga here eutectic in-situ tōna, e whakapai ake ana i te putanga me te kounga hononga.

Ētahi atu Tauira Whakaputa

Haunga te NANO, kei roto hoki i te raupapa ASMPT AMICRA:

NOVA Pro: Ka tautoko hoki i te hononga maramara-hurihuri me te tika o te ±1.0 µm, ka tutuki ai te taurite i waenga i te tere me te tika.

AFC Plus: He hononga mate whānui tēnei, ā, he tika tōna ±1.5 µm, i hangaia hei tāpiri atu ki te raupapa NANO kounga teitei.

Hei whakarāpopototanga, kua hangaia te ASM AMICRA NANO kia tutuki ai ngā whakaritenga tākai tino uaua. Kāore i rite ki ngā taputapu e whakatairanga ana i te whai huatanga, e arotahi ana ki te whakatutuki i te tino tika o te ±0.2 µm, e mahi ana ki ngā R&D me te ranunga nui, te iti o te rahinga whakaputa matatau i roto i ngā mara matatau pēnei i te silicon photonics me te rorohiko AI.